公开(公告)号：US20060059921A1

公开(公告)日：2006-03-23

申请号：US11222226

申请日：2005-09-09

申请人： Zhili Hao ,  Mark Fowler ,  Jay Hammer ,  Michael Whitley ,  David Brown

发明人： Zhili Hao ,  Mark Fowler ,  Jay Hammer ,  Michael Whitley ,  David Brown

IPC分类号： F25B9/00

CPC分类号： F25B9/145 ,  F25B2309/1403 ,  F25B2309/1407 ,  F25B2400/06 ,  F25B2400/15

摘要： A MEMS based thermoacoustic cryo-cooler for thermal management of cryogenic electronic devices and a resonant tube used therein. A vertical comb-drive can provides an acoustic source through a driving plate to the resonant tube. By exciting a standing wave within the resonant tube, a temperature difference develops across a stack in the tube, thereby enabling heat exchange between heat exchangers. A tapered resonant tube improves the efficiency of the cooling system, compared with a simple cylinder configuration, leading to reduced harmonics and strong standing waves.

摘要翻译： 一种用于低温电子设备的热管理的MEMS热声低温冷却器和其中使用的谐振管。 垂直梳状驱动器可以通过驱动板向谐振管提供声源。 通过激发谐振管内的驻波，管中的堆叠产生温差，从而实现热交换器之间的热交换。 与简单的气缸配置相比，锥形谐振管提高了冷却系统的效率，从而降低了谐波和强驻波。

公开(公告)号：US20050000233A1

公开(公告)日：2005-01-06

申请号：US10717604

申请日：2003-11-21

申请人： Zhili Hao ,  Mark Fowler ,  Jay Hammer ,  Michael Whitley ,  David Brown

发明人： Zhili Hao ,  Mark Fowler ,  Jay Hammer ,  Michael Whitley ,  David Brown

IPC分类号： F25B9/14 ,  F25B9/00

CPC分类号： F25B9/145 ,  F25B2309/1403 ,  F25B2309/1407 ,  F25B2400/06 ,  F25B2400/15

摘要： A MEMS based thermoacoustic cryo-cooler for thermal management of cryogenic electronic devices. The cryogenic cooling system can be integrated directly into a cryogenic electronic device. A vertical comb-drive provides an acoustic source through a driving plate to a resonant tube. By exciting a standing wave within the resonant tube, a temperature difference develops across a stack in the tube, thereby enabling heat exchange between heat exchangers. A tapered resonant tube improves the efficiency of the cooling system, compared with a simple cylinder configuration, leading to reduced harmonics and strong standing waves.

摘要翻译： 一种基于MEMS的热声低温冷却器，用于低温电子设备的热管理。 低温冷却系统可以直接集成到低温电子设备中。 垂直梳齿驱动器通过驱动板向谐振管提供声源。 通过激发谐振管内的驻波，管中的堆叠产生温差，从而实现热交换器之间的热交换。 与简单的气缸配置相比，锥形谐振管提高了冷却系统的效率，从而降低了谐波和强驻波。

公开(公告)号：US07017351B2

公开(公告)日：2006-03-28

申请号：US10717604

申请日：2003-11-21

申请人： Zhili Hao ,  Mark Fowler ,  Jay A. Hammer ,  Michael Whitley ,  David R. Brown

发明人： Zhili Hao ,  Mark Fowler ,  Jay A. Hammer ,  Michael Whitley ,  David R. Brown

IPC分类号： F25B9/00

CPC分类号： F25B9/145 ,  F25B2309/1403 ,  F25B2309/1407 ,  F25B2400/06 ,  F25B2400/15

摘要： A MEMS based thermoacoustic cryo-cooler for thermal management of cryogenic electronic devices. The cryogenic cooling system can be integrated directly into a cryogenic electronic device. A vertical comb-drive provides an acoustic source through a driving plate to a resonant tube. By exciting a standing wave within the resonant tube, a temperature difference develops across a stack in the tube, thereby enabling heat exchange between heat exchangers. A tapered resonant tube improves the efficiency of the cooling system, compared with a simple cylinder configuration, leading to reduced harmonics and strong standing waves.

摘要翻译： 一种基于MEMS的热声低温冷却器，用于低温电子设备的热管理。 低温冷却系统可以直接集成到低温电子设备中。 垂直梳齿驱动器通过驱动板向谐振管提供声源。 通过激发谐振管内的驻波，管中的堆叠产生温差，从而实现热交换器之间的热交换。 与简单的气缸配置相比，锥形谐振管提高了冷却系统的效率，从而降低了谐波和强驻波。

公开(公告)号：US20070089519A1

公开(公告)日：2007-04-26

申请号：US11450186

申请日：2006-06-09

申请人： Zhili Hao ,  Farrokh Ayazi

发明人： Zhili Hao ,  Farrokh Ayazi

IPC分类号： G01H11/00

CPC分类号： G01H11/08

摘要： Disclosed are sensing apparatus, such as mass sensors, comprising longitudinal block resonators having annexed platforms that offer the improved mass sensitivity at micron scale, high-Q in air, simplicity of fabrication, and improved reliability. Exemplary mass sensors comprise a central block separated from a substrate. Two annexed platforms are coupled to the central block by way of two separating beams that are separated from the substrate. One or more anchors are coupled to the central block by way of support beams that are separated from the substrate by insulating material. One or more transducers are provided for actuating and sensing vibration of the central block and the annexed platforms. The transducers may employ capacitive and piezoelectric drive and sense schemes.

摘要翻译： 本发明公开了一种感测装置，例如质量传感器，其包括具有附加平台的纵向块谐振器，其提供微米尺度上的改进的质量灵敏度，空气中的高Q，制造的简单性和改进的可靠性。 示例性的质量传感器包括与衬底分离的中心块。 两个连接的平台通过与衬底分离的两个分离梁联接到中心块。 一个或多个锚通过支撑梁联接到中心块，所述支撑梁通过绝缘材料与基板分离。 提供一个或多个换能器用于致动和感测中央块和附属平台的振动。 换能器可以采用电容和压电驱动和感测方案。

公开(公告)号：US07819011B2

公开(公告)日：2010-10-26

申请号：US11450186

申请日：2006-06-09

申请人： Zhili Hao ,  Farrokh Ayazi

发明人： Zhili Hao ,  Farrokh Ayazi

IPC分类号： G01H11/00

CPC分类号： G01H11/08

摘要： Disclosed are sensing apparatus, such as mass sensors, comprising longitudinal block resonators having annexed platforms that offer the improved mass sensitivity at micron scale, high-Q in air, simplicity of fabrication, and improved reliability. Exemplary mass sensors comprise a central block separated from a substrate. Two annexed platforms are coupled to the central block by way of two separating beams that are separated from the substrate. One or more anchors are coupled to the central block by way of support beams that are separated from the substrate by insulating material. One or more transducers are provided for actuating and sensing vibration of the central block and the annexed platforms. The transducers may employ capacitive and piezoelectric drive and sense schemes.

摘要翻译： 本发明公开了一种感测装置，例如质量传感器，其包括具有附加平台的纵向块谐振器，其提供微米尺度上的改进的质量灵敏度，空气中的高Q，制造的简单性和改进的可靠性。 示例性的质量传感器包括与衬底分离的中心块。 两个连接的平台通过与衬底分离的两个分离梁联接到中心块。 一个或多个锚通过支撑梁联接到中心块，所述支撑梁通过绝缘材料与基板分离。 提供一个或多个换能器用于致动和感测中央块和附属平台的振动。 换能器可以采用电容和压电驱动和感测方案。

公开(公告)号：US20090083011A1

公开(公告)日：2009-03-26

申请号：US12221857

申请日：2008-08-07

申请人： Zhili Hao

发明人： Zhili Hao

IPC分类号： G06F17/10 ,  G06G7/48

CPC分类号： G06F17/5009 ,  G06F2217/16 ,  G06F2217/80

摘要： A method and computer system for predicting or calculating the quality factor of a mechanical resonant (MR) device. The system and method simulates uncoupled elastic vibration of the MR device to produce simulated dilatation of the MR device, collects data relating to the dilatation and maximum stored elastic vibration energy of the device design. It determines the internal heat source data of the MR device caused by dilatation based on the thermal expansion effect of the MR device material, conveying the internal heat source data along with transient heat conduction data to a simulation engine, which simulates and determines the temperature variation within the MR device. Thermoelastic damping over one cycle of vibration of the MR device is determined, enabling the determination of the quality factor relating to thermoelastic damping as a function of the thermoelastic damping over one cycle of vibration of the MR device, and the maximum elastic vibration energy stored over one cycle of vibration.

摘要翻译： 一种用于预测或计算机械谐振（MR）装置的品质因子的方法和计算机系统。 该系统和方法模拟MR装置的非耦合弹性振动，以产生MR装置的模拟扩张，收集与装置设计的膨胀和最大储存弹性振动能量有关的数据。 它决定了基于MR装置材料的热膨胀效应的膨胀引起的MR装置的内部热源数据，将内部热源数据与瞬态热传导数据一起传送到模拟引擎，模拟引擎模拟和确定温度变化 在MR设备内。 确定MR装置的一个振动循环的热弹性阻尼，使得能够确定与MR装置的一个振动周期上的热弹性阻尼有关的热弹性阻尼的质量因子，以及存储在MR装置的最大弹性振动能量 一个循环的振动。

公开(公告)号：US08175855B2

公开(公告)日：2012-05-08

申请号：US12221857

申请日：2008-08-07

申请人： Zhili Hao

发明人： Zhili Hao

IPC分类号： G06F17/10

CPC分类号： G06F17/5009 ,  G06F2217/16 ,  G06F2217/80

摘要： A method and system for predicting the quality factor of a mechanical resonant (MR) device. The system and method simulates uncoupled elastic vibration of the MR device to produce simulated dilatation and collects data relating to the dilatation and maximum stored elastic vibration energy. It determines the internal heat source data of the MR device caused by dilatation based on the thermal expansion effect of the MR device material, conveying the internal heat source data along with transient heat conduction data to a simulation engine, which simulates and determines the temperature variation. Thermoelastic damping over one cycle of vibration is determined, enabling the prediction of the quality factor relating to thermoelastic damping over one cycle of vibration of the MR device, and the maximum elastic vibration energy stored over one cycle of vibration.

摘要翻译： 一种用于预测机械谐振（MR）装置的品质因子的方法和系统。 该系统和方法模拟MR装置的非耦合弹性振动，以产生模拟扩张，并收集与膨胀和最大存储的弹性振动能量有关的数据。 它决定了基于MR装置材料的热膨胀效应的膨胀引起的MR装置的内部热源数据，将内部热源数据与瞬态热传导数据一起传送到模拟引擎，模拟引擎模拟和确定温度变化 。 确定一个振动循环的热弹性阻尼，使得能够预测与MR装置的一个振动循环相关的热弹性阻尼的质量因子，以及在一个振动周期上存储的最大弹性振动能。