公开(公告)号：US09246017B2

公开(公告)日：2016-01-26

申请号：US13761748

申请日：2013-02-07

申请人： mCube, Incorporated

发明人： Dolf van der Heide ,  Shingo Yoneoka

IPC分类号： H01L29/84 ,  G01P15/08

CPC分类号： H01L29/84 ,  G01P15/08 ,  G01P2015/0845 ,  G01P2015/0848

摘要： An integrated MEMS inertial sensor device includes one or more three-axis MEMS inertial sensor devices, such as accelerometers, with dual or single proof mass configurations. These designs can be compact and can decouple the motion of each axis to minimize the measurement errors due to cross-axis sensitivity. Some embodiments include a frame to decouple the motion of two axes and to provide geometric symmetry. Some embodiments also include double-folded springs. In a specific embodiment, the three axes of an integrated MEMS accelerometer device are entirely decoupled. Thus, the actuation of each axis, through a force due to acceleration, has little or substantially no effect on the other axes.

摘要翻译： 集成的MEMS惯性传感器装置包括一个或多个三轴MEMS惯性传感器装置，例如具有双重或单质量质量配置的加速度计。 这些设计可以紧凑，并且可以解耦每个轴的运动，以最小化由于横轴灵敏度引起的测量误差。 一些实施例包括用于解耦两个轴的运动并提供几何对称的框架。 一些实施例还包括双折叠弹簧。 在具体实施例中，集成MEMS加速度计装置的三个轴完全解耦。 因此，通过由于加速度引起的力，每个轴的致动对其它轴几乎没有或基本上没有影响。

公开(公告)号：US20130214367A1

公开(公告)日：2013-08-22

申请号：US13761748

申请日：2013-02-07

申请人： mCube, Incorporated

发明人： Dolf van der Heide ,  Shingo Yoneoka

IPC分类号： H01L29/84

CPC分类号： H01L29/84 ,  G01P15/08 ,  G01P2015/0845 ,  G01P2015/0848

摘要： An integrated MEMS inertial sensor device includes one or more three-axis MEMS inertial sensor devices, such as accelerometers, with dual or single proof mass configurations. These designs can be compact and can decouple the motion of each axis to minimize the measurement errors due to cross-axis sensitivity. Some embodiments include a frame to decouple the motion of two axes and to provide geometric symmetry. Some embodiments also include double-folded springs. In a specific embodiment, the three axes of an integrated MEMS accelerometer device are entirely decoupled. Thus, the actuation of each axis, through a force due to acceleration, has little or substantially no effect on the other axes.

摘要翻译： 集成的MEMS惯性传感器装置包括一个或多个三轴MEMS惯性传感器装置，例如具有双重或单质量质量配置的加速度计。 这些设计可以紧凑，并且可以解耦每个轴的运动，以最小化由于横轴灵敏度引起的测量误差。 一些实施例包括用于解耦两个轴的运动并提供几何对称的框架。 一些实施例还包括双折叠弹簧。 在具体实施例中，集成MEMS加速度计装置的三个轴完全解耦。 因此，通过由于加速度引起的力，每个轴的致动对其它轴几乎没有或基本上没有影响。