公开(公告)号：US20160097792A1

公开(公告)日：2016-04-07

申请号：US14506022

申请日：2014-10-03

申请人： FREESCALE SEMICONDUCTOR, INC.

发明人： MICHAEL NAUMANN

IPC分类号： G01P15/125 ,  B81B3/00

CPC分类号： G01P15/125 ,  B81B3/0021 ,  B81B3/007 ,  B81B2201/0235 ,  G01P15/18 ,  G01P2015/0845

摘要： A microelectromechanical systems (MEMS) device, such as a three-axis MEMS device can sense acceleration in three orthogonal axes. The MEMS device includes a single proof mass and suspension spring systems that movably couple the proof mass to a substrate. The suspension spring systems include translatory spring elements and torsion spring elements. The translatory spring elements enable translatory motion of the proof mass relative to the substrate in two orthogonal directions that are parallel to the plane of the MEMS device in order to sense forces in the two orthogonal directions. The torsion spring elements enable rotation of the proof mass about a rotational axis in order to sense force in a third direction that is orthogonal to the other two directions. The translatory spring elements have asymmetric stiffness configured to compensate for an asymmetric mass of the movable element used to sense in the third direction.

摘要翻译： 诸如三轴MEMS器件的微机电系统（MEMS）装置可以感测三个正交轴中的加速度。 MEMS器件包括将校准质量块可移动地耦合到衬底的单个校准质量块和悬架弹簧系统。 悬架弹簧系统包括平移弹簧元件和扭转弹簧元件。 平移弹簧元件使平行于MEMS器件的平面的两个正交方向上的校准质量体能够相对于衬底的平移运动，以便在两个正交方向上感测力。 扭转弹簧元件使得证明块绕旋转轴线旋转，以便在与其它两个方向正交的第三方向上感测力。 平移弹簧元件具有非对称刚度，其被配置为补偿用于在第三方向上感测的可移动元件的不对称质量。

公开(公告)号：US08659101B2

公开(公告)日：2014-02-25

申请号：US13878776

申请日：2011-10-07

申请人： Kiyoko Yamanaka ,  Kengo Suzuki ,  Kazunori Ohta ,  Heewon Jeong ,  Masahide Hayashi

发明人： Kiyoko Yamanaka ,  Kengo Suzuki ,  Kazunori Ohta ,  Heewon Jeong ,  Masahide Hayashi

IPC分类号： B81B3/00 ,  G01L9/00 ,  H01L29/84

CPC分类号： B81B7/0058 ,  G01C19/5783 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0845 ,  H01L24/32 ,  H01L2224/05554 ,  H01L2224/48091 ,  H01L2224/49171 ,  H01L2224/73265 ,  H01L2924/14 ,  H01L2924/00014 ,  H01L2924/00

摘要： Provided is an inertial sensor device comprising a detection part having an MEMS structure, wherein convenience during sensor installation is ensured while erroneous operation caused by the application of external vibration is controlled. To achieve this objective, an anti-vibration structure (103) is provided in the inertial sensor device, between a semiconductor chip (102) mounted on a package substrate and a semiconductor chip (104) comprising a sensor detection part. The anti-vibration structure (103) has a structure in which the periphery of an anti-vibration part (103a) is surrounded by an anti-vibration part (103b) comprising a material having a larger Young's modulus.

摘要翻译： 提供了一种惯性传感器装置，其包括具有MEMS结构的检测部件，其中，在控制由施加外部振动引起的错误操作的同时确保传感器安装期间的便利性。 为了实现该目的，在惯性传感器装置中，在安装在封装基板上的半导体芯片（102）和包括传感器检测部件的半导体芯片（104）之间设置防振结构（103）。 防振结构（103）具有防振部（103a）的周围由包含杨氏模量较大的材料的防振部（103b）包围的结构。

公开(公告)号：US20130139595A1

公开(公告)日：2013-06-06

申请号：US13482989

申请日：2012-05-29

申请人： Ming-Han Tsai ,  Chih-Ming Sun

发明人： Ming-Han Tsai ,  Chih-Ming Sun

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/084 ,  G01P2015/0845

摘要： The present invention discloses a three-dimensional micro-electro-mechanical-system sensor. The sensor includes movable first electrodes, plural movable second electrodes, plural fixed third electrodes, and plural fixed fourth electrodes. The first electrodes and their adjacent third electrodes form at least one first capacitor and at least one second capacitor, and the second electrodes and their adjacent fourth electrodes form at least one third capacitor. The capacitance change of the first capacitor reflects the displacement of the proof mass along a first axis, the capacitance change of the second capacitor reflects the displacement of the proof mass along a second axis, and the capacitance change of the third capacitor reflects the displacement of the proof mass along a third axis. The first, second, and third axes define a three-dimensional coordinate system.

摘要翻译： 本发明公开了一种三维微机电系统传感器。 传感器包括可移动的第一电极，多个可移动的第二电极，多个固定的第三电极和多个固定的第四电极。 第一电极及其相邻的第三电极形成至少一个第一电容器和至少一个第二电容器，并且第二电极及其相邻的第四电极形成至少一个第三电容器。 第一电容器的电容变化反映了沿着第一轴的检测质量块的位移，第二电容器的电容变化反映了沿第二轴的检验质量块的位移，并且第三电容器的电容变化反映了第三电容器的位移 沿着第三轴的检验质量。 第一，第二和第三轴定义三维坐标系。

公开(公告)号：US20130099292A1

公开(公告)日：2013-04-25

申请号：US13807555

申请日：2011-06-30

申请人： Goro Nakatani

发明人： Goro Nakatani

IPC分类号： H01L25/07 ,  H01L21/50

CPC分类号： H01L25/071 ,  B81C1/00246 ,  B81C2203/0771 ,  G01C19/5733 ,  G01C19/5769 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0831 ,  G01P2015/0845 ,  H01L21/50 ,  H01L27/0617 ,  H01L27/092 ,  H01L29/84 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor substrate of a semiconductor device has a sensor region and an integrated circuit region, and a cavity is formed immediately under a surface layer portion of the sensor region. A capacitive acceleration sensor is formed on the sensor region by working a surface layer portion of the semiconductor substrate opposed to the cavity. The capacitive acceleration sensor includes an interdigital fixed electrode and an interdigital movable electrode. A CMIS transistor is formed on the integrated circuit region. The CMIS transistor includes a P-type well region and an N-type well region formed on the surface layer portion of the semiconductor substrate. A gate electrode is opposed to the respective ones of the P-type well region and the N-type well region through a gate insulating film formed on a surface of the semiconductor substrate.

摘要翻译： 半导体器件的半导体衬底具有传感器区域和集成电路区域，并且在传感器区域的表面层部分的正下方形成腔体。 通过加工与腔体相对的半导体衬底的表面层部分，在传感器区域上形成电容式加速度传感器。 电容式加速度传感器包括叉指式固定电极和叉指式可动电极。 在集成电路区域上形成CMIS晶体管。 CMIS晶体管包括形成在半导体衬底的表面层部分上的P型阱区域和N型阱区域。 栅电极通过形成在半导体衬底的表面上的栅极绝缘膜与P型阱区和N型阱区相对。

公开(公告)号：US20230314469A1

公开(公告)日：2023-10-05

申请号：US18308543

申请日：2023-04-27

申请人： STMICROELECTRONICS S.r.l.

发明人： Alessandro TOCCHIO ,  Francesco RIZZINI

IPC分类号： G01P15/18 ,  G01P15/097 ,  G01P15/125

CPC分类号： G01P15/18 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0845

摘要： A MEMS tri-axial accelerometer is provided with a sensing structure having: a single inertial mass, with a main extension in a horizontal plane defined by a first horizontal axis and a second horizontal axis and internally defining a first window that traverses it throughout a thickness thereof along a vertical axis orthogonal to the horizontal plane; and a suspension structure, arranged within the window for elastically coupling the inertial mass to a single anchorage element, which is fixed with respect to a substrate and arranged within the window, so that the inertial mass is suspended above the substrate and is able to carry out, by the inertial effect, a first sensing movement, a second sensing movement, and a third sensing movement in respective sensing directions parallel to the first, second, and third horizontal axes following upon detection of a respective acceleration component. In particular, the suspension structure has at least one first decoupling element for decoupling at least one of the first, second, and third sensing movements from the remaining sensing movements.

公开(公告)号：US09246017B2

公开(公告)日：2016-01-26

申请号：US13761748

申请日：2013-02-07

申请人： mCube, Incorporated

发明人： Dolf van der Heide ,  Shingo Yoneoka

IPC分类号： H01L29/84 ,  G01P15/08

CPC分类号： H01L29/84 ,  G01P15/08 ,  G01P2015/0845 ,  G01P2015/0848

摘要： An integrated MEMS inertial sensor device includes one or more three-axis MEMS inertial sensor devices, such as accelerometers, with dual or single proof mass configurations. These designs can be compact and can decouple the motion of each axis to minimize the measurement errors due to cross-axis sensitivity. Some embodiments include a frame to decouple the motion of two axes and to provide geometric symmetry. Some embodiments also include double-folded springs. In a specific embodiment, the three axes of an integrated MEMS accelerometer device are entirely decoupled. Thus, the actuation of each axis, through a force due to acceleration, has little or substantially no effect on the other axes.

摘要翻译： 集成的MEMS惯性传感器装置包括一个或多个三轴MEMS惯性传感器装置，例如具有双重或单质量质量配置的加速度计。 这些设计可以紧凑，并且可以解耦每个轴的运动，以最小化由于横轴灵敏度引起的测量误差。 一些实施例包括用于解耦两个轴的运动并提供几何对称的框架。 一些实施例还包括双折叠弹簧。 在具体实施例中，集成MEMS加速度计装置的三个轴完全解耦。 因此，通过由于加速度引起的力，每个轴的致动对其它轴几乎没有或基本上没有影响。

公开(公告)号：US08997564B2

公开(公告)日：2015-04-07

申请号：US13492717

申请日：2012-06-08

申请人： Steven S. Nasiri ,  David Sachs ,  Babak Taheri

发明人： Steven S. Nasiri ,  David Sachs ,  Babak Taheri

IPC分类号： G01P1/02 ,  G01P15/00 ,  G01P15/18 ,  G01P15/08 ,  G01P15/125 ,  G01C19/5769

CPC分类号： G01C19/5776 ,  G01C19/5769 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0845 ,  G01P2015/0865 ,  G01P2015/088

摘要： A module operable to be mounted onto a surface of a board. The module includes a linear accelerometer to provide a first measurement output corresponding to a measurement of linear acceleration in at least one axis, and a first rotation sensor operable to provide a second measurement output corresponding to a measurement of rotation about at least one axis. The accelerometer and the first rotation sensor are formed on a first substrate. The module further includes an application specific integrated circuit (ASIC) to receive both the first measurement output from the linear accelerometer and the second measurement output from the first rotation sensor. The ASIC includes an analog-to-digital converter and is implemented on a second substrate. The first substrate is vertically bonded to the second substrate.

摘要翻译： 一种可操作以安装在电路板表面上的模块。 该模块包括线性加速度计，以提供对应于至少一个轴线性加速度的测量的第一测量输出，以及第一旋转传感器，其可操作以提供对应于围绕至少一个轴线的旋转测量的第二测量输出。 加速度计和第一旋转传感器形成在第一基板上。 该模块还包括专用集成电路（ASIC），用于接收来自线性加速度计的第一测量输出和来自第一旋转传感器的第二测量输出。 ASIC包括模数转换器并且被实现在第二基板上。 第一衬底垂直地结合到第二衬底。

公开(公告)号：US08497672B2

公开(公告)日：2013-07-30

申请号：US12881765

申请日：2010-09-14

申请人： Takashi Kawakubo ,  Toshihiko Nagano ,  Michihiko Nishigaki ,  Hiroshi Ono

发明人： Takashi Kawakubo ,  Toshihiko Nagano ,  Michihiko Nishigaki ,  Hiroshi Ono

IPC分类号： G01P15/00

CPC分类号： G01P15/097 ,  G01P15/0888 ,  G01P15/18 ,  G01P2015/0817 ,  G01P2015/0845

摘要： The present embodiments provide an acceleration sensor, which enables highly accurate detection and has an extremely compact size. The acceleration sensor of the present embodiments is provided with a substrate, a anchor portion formed on the substrate, a support beam, which has one end connected to the anchor portion and extends across a space from the substrate, and a proof mass which is connected to the other end of the support beam and held across a space from the substrate. The acceleration sensor is further provided with first and second piezoelectric bending resonators, a comparison unit, and a calculation unit. The first and second piezoelectric bending resonators have one end connected to the anchor portion and the other end connected to the proof mass or the support beam and have a stack of a first electrode, a first piezoelectric film, and a second electrode. The first and second piezoelectric bending resonators extend on the both sides of the support beam and perform bending resonance motion in a direction perpendicular to the piezoelectric film. The comparison unit measures a difference of a resonance frequency between the first and second piezoelectric bending resonators. The calculation unit calculates an acceleration in a direction perpendicular to the extending direction of the support beam in the substrate surface from the difference of the resonance frequency.

摘要翻译： 本实施例提供加速度传感器，其能够进行高精度的检测并具有非常紧凑的尺寸。 本实施例的加速度传感器设置有基板，形成在基板上的锚固部分，支撑梁，其一端连接到锚定部分并且延伸穿过基板的空间，以及连接的检测质量块 到支撑梁的另一端并且保持在与基板的空间上。 加速度传感器还设置有第一和第二压电弯曲谐振器，比较单元和计算单元。 第一和第二压电弯曲谐振器的一端连接到锚定部分，另一端连接到检测质量块或支撑梁，并且具有第一电极，第一压电膜和第二电极的堆叠。 第一和第二压电弯曲谐振器在支撑梁的两侧延伸，并在垂直于压电薄膜的方向上进行弯曲共振运动。 比较单元测量第一和第二压电弯曲谐振器之间的谐振频率的差。 计算单元从谐振频率的差计算与基板表面中的支撑梁的延伸方向垂直的方向的加速度。

公开(公告)号：US20110271760A1

公开(公告)日：2011-11-10

申请号：US13143099

申请日：2010-02-16

申请人： Hideo Ohkoshi ,  Shigehiro Yoshiuchi ,  Tsuyoshi Sakaue

发明人： Hideo Ohkoshi ,  Shigehiro Yoshiuchi ,  Tsuyoshi Sakaue

IPC分类号： G01C19/56

CPC分类号： G01P3/02 ,  G01C19/574 ,  G01C19/5769 ,  G01P15/02 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0845 ,  G01P2015/0857

摘要： An inertial force sensor includes a detector element, a supporting body supporting the detector element, and a case holding the detector element via the first supporting body. The supporting body has flexibility and has a plate shape. The detector element includes a weight, a flexible coupling portion extending along a plane and supporting the weight, a fixing portion holding the weight via the coupling portion, and a detector detecting angular velocities about at least two axes non-parallel to each other. The supporting body extends in parallel with the plane from the detector element, and bends at a bending portion in a direction away from the plane. This inertial force sensor can detect the angular velocities while preventing erroneous detection caused by external impacts and vibrations.

摘要翻译： 惯性力传感器包括检测器元件，支撑检测器元件的支撑体以及经由第一支撑体保持检测器元件的壳体。 支撑体具有柔性并具有板形。 检测器元件包括重物，沿着平面延伸并支撑重物的柔性联接部分，通过联接部分保持重物的固定部分，以及检测围绕彼此不平行的至少两个轴线的角速度的检测器。 支撑体与来自检测器元件的平面平行地延伸，并且在远离平面的方向上在弯曲部弯曲。 该惯性力传感器可以检测角速度，同时防止由外部冲击和振动引起的错误检测。

公开(公告)号：US20060021436A1

公开(公告)日：2006-02-02

申请号：US10517808

申请日：2003-06-10

申请人： Konrad Kapser ,  Ulrich Prechtel ,  Helmut Seidel

发明人： Konrad Kapser ,  Ulrich Prechtel ,  Helmut Seidel

IPC分类号： G01P15/18 ,  G01P15/02

CPC分类号： G01P15/18 ,  G01P15/125 ,  G01P2015/0831 ,  G01P2015/0834 ,  G01P2015/0845 ,  G01P2015/086

摘要： A multi-axial monolithic acceleration sensor has the following features. The acceleration sensor consists of plural individual sensors with respectively a main sensitivity axis arranged on a common substrate. Each individual sensor is rotatably moveably suspended on two torsion spring elements and has a seismic mass with a center of gravity. Each individual sensor has components that measure the deflection of the seismic mass. The acceleration sensor preferably consists of at least three identical individual sensors. Each individual sensor is suspended eccentrically relative to its center of gravity and is rotated by 90°, 180° or 270° relative to the other individual sensors.

摘要翻译： 多轴单片加速度传感器具有以下特点。 加速度传感器由多个单独的传感器组成，分别具有布置在公共基板上的主灵敏度轴。 每个单独的传感器可旋转地可移动地悬挂在两个扭转弹簧元件上并且具有重心的地震质量。 每个单独的传感器具有测量地震质量的偏转的组件。 加速度传感器优选地由至少三个相同的单独传感器组成。 每个传感器相对于其重心偏心悬挂，并相对于其他单独的传感器旋转90°，180°或270°。