Amorphous-diamond electron emitter
    1.
    发明授权
    Amorphous-diamond electron emitter 失效
    无定形金刚石电子发射体

    公开(公告)号:US06204595B1

    公开(公告)日:2001-03-20

    申请号:US08500282

    申请日:1995-07-10

    Inventor: Steven Falabella

    CPC classification number: H01J1/304 H01J2201/30457

    Abstract: An electron emitter comprising a textured silicon wafer overcoated with a thin (200 Å) layer of nitrogen-doped, amorphous-diamond (a:D-N), which lowers the field below 20 volts/micrometer have been demonstrated using this emitter compared to uncoated or diamond coated emitters wherein the emission is at fields of nearly 60 volts/micrometer. The silicon/nitrogen-doped, amorphous-diamond (Si/a:D-N) emitter may be produced by overcoating a textured silicon wafer with amorphous-diamond (a:D) in a nitrogen atmosphere using a filtered cathodic-arc system. The enhanced performance of the Si/a:D-N emitter lowers the voltages required to the point where field-emission displays are practical. Thus, this emitter can be used, for example, in flat-panel emission displays (FEDs), and cold-cathode vacuum electronics.

    Abstract translation: 已经证明使用这种发射体与未涂覆的或金刚石相比,包括用薄(200)氮掺杂的非晶金刚石(a:DN)层覆盖的纹理化硅晶片的电子发射器 涂覆的发射体,其中发射是接近60伏/微米的场。 硅/氮掺杂的非晶金刚石(Si / a:D-N)发射极可以通过使用经过滤的阴极弧系统在氮气气氛中用无定形金刚石(a:D)覆盖纹理硅晶片来制备。 Si / a:D-N发射极的增强性能降低了场致发射显示实用的点所需的电压。 因此,该发射极可用于例如平板发射显示器(FED)和冷阴极真空电子器件

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