公开(公告)号：US20190214215A1

公开(公告)日：2019-07-11

申请号：US16311985

申请日：2017-03-16

申请人： MEIDENSHA CORPORATION

发明人： Daizo TAKAHASHI ,  Michihiro HATANAKA

IPC分类号： H01J35/06 ,  H01J1/304 ,  H01J9/50

CPC分类号： H01J35/065 ,  H01J1/304 ,  H01J9/50 ,  H01J35/06 ,  H01J2201/30453 ,  H01J2235/062 ,  H01J2235/064 ,  H05G1/00

摘要： Emitter (3) and target (7) are arranged so as to face each other in vacuum chamber (1), and guard electrode (5) is provided at outer circumferential side of electron generating portion (31) of emitter (3). Emitter (3) is supported movably in both end directions of vacuum chamber (1) by emitter supporting unit (4) having movable body (40). To perform regeneration process of guard electrode (5), emitter is moved to no-discharge position by operating emitter supporting unit, and state in which field emission of electron generating portion (31) is suppressed is set, then by applying voltage across guard electrode (5), discharge is repeated. After regeneration process, by operating emitter supporting unit again, emitter is moved to discharge position, and state in which field emission of electron generating portion (31) is possible is set with movement of movable body (40) toward the other end side being restrained by movement restraining unit (6).

公开(公告)号：US20180197711A1

公开(公告)日：2018-07-12

申请号：US15853485

申请日：2017-12-22

申请人： CORPORATION FOR NATIONAL RESEARCH INITIATIVES

发明人： Mehmet Ozgur ,  Paul Sunal ,  Lance Oh ,  Michael Huff ,  Michael Pedersen

IPC分类号： H01J1/304 ,  H01J9/02 ,  B82Y10/00 ,  B82Y40/00

CPC分类号： H01J1/304 ,  B82Y10/00 ,  B82Y40/00 ,  H01J9/025 ,  H01J2201/30469

摘要： The present invention is directed to a method for the fabrication of electron field emitter devices, including carbon nanotube (CNT) field emission devices. The method of the present invention involves depositing one or more electrically conductive thin-film layers onto a electrically conductive substrate and performing lithography and etching on these thin film layers to pattern them into the desired shapes. The top-most layer may be of a material type that acts as a catalyst for the growth of single- or multiple-walled carbon nanotubes (CNTs). Subsequently, the substrate is etched to form a high-aspect ratio post or pillar structure onto which the previously patterned thin film layers are positioned. Carbon nanotubes may be grown on the catalyst material layer. The present invention also described methods by which the individual field emission devices may be singulated into individual die from a substrate.

公开(公告)号：US09812279B2

公开(公告)日：2017-11-07

申请号：US14386884

申请日：2012-12-31

申请人： TongYuan textile limited

发明人： Jian Xin Yan

IPC分类号： H01J1/304 ,  H01J37/06 ,  C23C16/40 ,  H01J1/14 ,  H01J9/02

CPC分类号： H01J1/304 ,  C23C16/40 ,  H01J1/14 ,  H01J9/025 ,  H01J37/06 ,  H01J2201/30446 ,  H01J2237/06316 ,  Y10T428/2916

摘要： The present invention discloses an electrode material that eases electron injection and does not react with contact substances. The structure of the material includes a conductive substrate plane on the top of which an emissive material is coated. The emissive coating bonds strongly with the substrate plane. The emissive material is of low work function and high chemical stability.

公开(公告)号：US09779906B2

公开(公告)日：2017-10-03

申请号：US15503539

申请日：2015-10-02

申请人： KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO

发明人： Tsuyoshi Ishikawa ,  Takashi Katsuno ,  Narumasa Soejima

IPC分类号： H01J29/48 ,  H01J1/30 ,  H01J1/34 ,  H01J1/35 ,  H01J1/304 ,  H01S3/16

CPC分类号： H01J29/481 ,  H01J1/304 ,  H01J1/3046 ,  H01J1/34 ,  H01J1/35 ,  H01S3/1636

摘要： An electron emission device includes a substrate and an electron emission layer. The electron emission layer is provided above the substrate, and is provided with an opening. The electron emission layer has an edge defining the opening and is configured to emit electrons from the edge when the edge is irradiated with light.

公开(公告)号：US20170221667A1

公开(公告)日：2017-08-03

申请号：US15396701

申请日：2017-01-02

申请人： Elwha LLC

发明人： Roderick A. Hyde ,  Jordin T. Kare ,  Tony S. Pan ,  Lowell L. Wood,, JR.

IPC分类号： H01J19/24 ,  H01J9/18 ,  H01J9/02

CPC分类号： H01J19/24 ,  H01J1/304 ,  H01J1/3046 ,  H01J1/308 ,  H01J9/025 ,  H01J9/18 ,  H01J2209/0223

摘要： A horizontal multilayer junction-edge field emitter includes a plurality of vertically-stacked multilayer structures separated by isolation layers. Each multilayer structure is configured to produce a 2-dimensional electron gas at a junction between two layers within the structure. The emitter also includes an exposed surface intersecting the 2-dimensional electron gas of each of the plurality of vertically-stacked multilayer structures to form a plurality of effectively one-dimensional horizontal line sources of electron emission.

公开(公告)号：US09524848B2

公开(公告)日：2016-12-20

申请号：US14536555

申请日：2014-11-07

申请人： Gregory Hirsch

发明人： Gregory Hirsch

IPC分类号： G21K5/02 ,  H01J37/073 ,  H01J37/08 ,  H01J1/304 ,  H01J9/02

CPC分类号： H01J37/073 ,  H01J1/304 ,  H01J1/3044 ,  H01J9/025 ,  H01J37/08 ,  H01J2201/30411 ,  H01J2237/06341 ,  H01J2237/0805

摘要： A method of producing field emitters having improved brightness and durability relying on the creation of a liquid Taylor cone from electrically conductive materials having high melting points. The method calls for melting the end of a wire substrate with a focused laser beam, while imposing a high positive potential on the material. The resulting molten Taylor cone is subsequently rapidly quenched by cessation of the laser power. Rapid quenching is facilitated in large part by radiative cooling, resulting in structures having characteristics closely matching that of the original liquid Taylor cone. Frozen Taylor cones thus obtained yield desirable tip end forms for field emission sources in electron beam applications. Regeneration of the frozen Taylor cones in-situ is readily accomplished by repeating the initial formation procedures. The high temperature liquid Taylor cones can also be employed as bright ion sources with chemical elements previously considered impractical to implement.

摘要翻译： 一种制造具有改善的亮度和耐久性的场致发射体的方法，其依赖于具有高熔点的导电材料产生液体泰勒锥。 该方法要求用聚焦激光束熔化线基底的端部，同时在材料上施加高的正电位。 随后通过停止激光功率使所得的熔融泰勒锥快速淬火。 在很大程度上通过辐射冷却促进快速淬火，导致具有与原始液体泰勒锥的特征密切相似的特征的结构。 因此获得的冷冻泰勒锥在电子束应用中产生用于场发射源的期望的尖端形式。 通过重复初始形成程序容易地实现冷冻泰勒锥的原位再生。 高温液体泰勒锥也可用作具有以前认为不实际实施的化学元素的明亮离子源。

公开(公告)号：US09478385B2

公开(公告)日：2016-10-25

申请号：US14339004

申请日：2014-07-23

申请人： Electronics and Telecommunications Research Institute

发明人： Jae-woo Kim ,  Yoon-Ho Song ,  Jin Woo Jeong ,  Jun Tae Kang ,  Sungyoul Choi ,  Jeong Yong Choi

IPC分类号： H01J9/02 ,  H01J1/304 ,  H01J1/34 ,  H01J35/06 ,  B82Y30/00

CPC分类号： H01J1/304 ,  B82Y30/00 ,  H01J1/34 ,  H01J35/065 ,  H01J2201/30469 ,  H01J2201/3423 ,  Y10S977/742 ,  Y10S977/939

摘要： Provided are a field emission device and a method of manufacturing the same. The field emission device includes an anode electrode and a cathode electrode which are opposite to each other, a counter layer provided on the anode electrode, and a field emitter provided on the cathode electrode and facing the counter layer. Herein, the field emitter includes a carbon nanotube emitting cold electrons and a photoelectric material emitting photo electrons.

摘要翻译： 提供场致发射器件及其制造方法。 场致发射器件包括彼此相对的阳极电极和阴极电极，设置在阳极电极上的对置层，以及设置在阴极电极上且面向对置层的场致发射体。 这里，场致发射体包括发射冷电子的碳纳米管和发射光电子的光电材料。

公开(公告)号：US20160217962A1

公开(公告)日：2016-07-28

申请号：US14607533

申请日：2015-01-28

申请人： Eloret Corporation

发明人： Michael Mikio Oye

IPC分类号： H01J9/02 ,  H01J1/304

CPC分类号： H01J9/025 ,  B82Y20/00 ,  B82Y30/00 ,  B82Y40/00 ,  H01J1/304 ,  H01J1/3042 ,  H01J2201/30469 ,  Y10S977/843 ,  Y10S977/939

摘要： A method of forming nanotubes may comprise applying a photoresist to a metal substrate, selectively exposing a first portion of the photoresist to electromagnetic radiation while not exposing a second portion to the electromagnetic radiation, removing the second portion of the photoresist from the metal substrate exposing a first portion of the metal substrate, exposing the first portion of the metal substrate to an etchant removing the first portion of the photoresist exposing a second portion of the metal substrate, and growing carbon nanotubes on the second portion of the metal substrate.

摘要翻译： 形成纳米管的方法可以包括将光致抗蚀剂施加到金属基底上，将光致抗蚀剂的第一部分选择性地暴露于电磁辐射，同时不将第二部分暴露于电磁辐射，从金属基底去除第二部分光致抗蚀剂， 金属基板的第一部分，将金属基板的第一部分暴露于蚀刻剂，去除暴露金属基板的第二部分的光致抗蚀剂的第一部分，以及在金属基板的第二部分上生长碳纳米管。

公开(公告)号：US09373477B2

公开(公告)日：2016-06-21

申请号：US14599989

申请日：2015-01-19

申请人： Tsinghua University ,  HON HAI PRECISION INDUSTRY CO., LTD.

发明人： Peng Liu ,  De-Jie Li ,  Chun-Hai Zhang ,  Duan-Liang Zhou ,  Bing-Chu Du ,  Shou-Shan Fan

IPC分类号： H01L29/06 ,  H01J31/12 ,  H01J29/02 ,  H01J29/18

CPC分类号： H01J31/12 ,  H01J1/304 ,  H01J1/308 ,  H01J1/312 ,  H01J29/02 ,  H01J29/18 ,  H01J31/127 ,  H01J2201/30469 ,  H01J2201/3125 ,  H01J2329/0455 ,  H01J2329/0478 ,  H01J2329/0484

摘要： An electron emission device includes a number of electron emission units spaced from each other, wherein each of the number of electron emission units includes a first electrode, a semiconductor layer, an insulating layer, and a second electrode stacked with each other, the first electrode includes a carbon nanotube layer, a number of holes defines in the semiconductor layer, and a portion of the carbon nanotube layer suspended on the number of holes.

摘要翻译： 电子发射装置包括彼此间隔开的多个电子发射单元，其中多个电子发射单元中的每一个包括彼此堆叠的第一电极，半导体层，绝缘层和第二电极，第一电极 包括碳纳米管层，在半导体层中限定多个孔，并且一部分碳纳米管层悬挂在孔数上。

公开(公告)号：US09324556B2

公开(公告)日：2016-04-26

申请号：US14424074

申请日：2013-08-12

申请人： TOHOKU UNIVERSITY ,  DOWA HOLDINGS CO., LTD.

发明人： Norihiro Shimoi ,  Kazuyuki Tohji ,  Yasumitsu Tanaka ,  Hiroyuki Kai

IPC分类号： H01J63/06 ,  H01J1/304 ,  H01J9/02 ,  H01J31/12 ,  H01J63/02

CPC分类号： H01J63/06 ,  H01J1/304 ,  H01J9/025 ,  H01J31/127 ,  H01J63/02 ,  H01J2201/30469 ,  H01J2329/0455 ,  Y10T428/24479 ,  Y10T428/24612

摘要： A field electron emission film that is capable of being operated with low electric power and enhancing the uniformity in luminance within the light emission surface contains from 60 to 99.9% by mass of tin-doped indium oxide and from 0.1 to 20% by mass of carbon nanotubes. The film has a structure wherein grooves having a width in a range of from 0.1 to 50 mm are formed in a total extension of 2 mm or more per 1 mm2 on a surface of the film, and carbon nanotubes are exposed on a wall surface of the grooves. After forming an ITO film containing carbon nanotubes on a substrate, grooves are formed on a surface of the ITO film, and the end portions of the carbon nanotubes exposed to the wall surface of the grooves are designated as an emitter.

摘要翻译： 能够以低功率运转并提高发光面内的亮度均匀性的场致电子发射膜含有锡掺杂氧化铟60〜99.9质量％，碳含量0.1〜20质量％ 纳米管 该膜具有这样的结构，其中在膜的表面上形成宽度在0.1至50mm范围内的沟槽以2mm / mm 2以上的总延伸面形成，并且碳纳米管暴露在膜的表面上 凹槽。 在基板上形成含有碳纳米管的ITO膜之后，在ITO膜的表面上形成槽，将暴露于槽壁表面的碳纳米管的端部指定为发光体。