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公开(公告)号：US5444365A
公开(公告)日：1995-08-22
申请号：US113239
申请日：1993-08-30
IPC分类号： G01R15/24 , G01R1/07 , G01R19/00 , G01R31/302 , G01R31/319 , G01R1/04
CPC分类号： G01R1/071 , Y10S435/808
摘要： A change in voltage can be sensitively detected at a local part of a measured object. A set of laser medium and E-O probe are disposed between a pair of mirrors, a first one and a second one, forming a laser resonator. A linearly polarized light is emitted from the laser medium. The polarized light enters the E-O probe, and returns after being reflected by the second mirror. When a voltage is given to the E-O probe from the measured object, depending on the voltage, a refractive index of the E-O probe is changed, the light emitted from the E-O probe is ovally polarized, and a resonance status of the laser resonator then varies. Therefore, the light intensity emitted through the partially penetrating first mirror to the outside of the laser resonator corresponds to the voltage at the measured object in the proximity of the E-O probe. Consequently, a voltage distribution on the measured object such as IC with fine structures can be two-dimensionally detected.
摘要翻译： 可以在测量对象的局部部分敏感地检测电压变化。 一组激光介质和E-O探头设置在一对反射镜之间，第一和第二反射镜形成激光谐振器。 从激光介质发射线偏振光。 偏振光进入E-O探头，并在被第二个反射镜反射之后返回。 当从测量对象向EO探针施加电压时，根据电压，EO探针的折射率改变，从EO探针发射的光被卵巢极化，然后激光谐振器的共振状态变化 。 因此，通过部分穿透的第一反射镜发射到激光谐振器的外部的光强度对应于E-O探头附近的测量对象处的电压。 因此，可以二维地检测诸如具有精细结构的IC的测量对象上的电压分布。
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公开(公告)号：US5055770A
公开(公告)日：1991-10-08
申请号：US507514
申请日：1990-04-11
CPC分类号： G01R1/071 , G01R15/242
摘要： A voltage in a selected area of an object is measured by launching an input light beam into an electrooptic material whose refractive index is changed in accordance with an electric field created by the voltage in a selected area of an object to be measured, and detecting a change in polarization or in a deflection angle of an output light beam from the electrooptic material. A medium having a dielectric constant greater than the air is placed between the area to be measured and the electrooptic material.
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公开(公告)号：US4982152A
公开(公告)日：1991-01-01
申请号：US201205
申请日：1988-06-02
IPC分类号： G01R1/07 , G01R15/24 , G01R19/00 , G01R19/155 , G01R31/302 , H01L21/66
CPC分类号： G01R1/071 , G01R15/242 , G01R19/155
摘要： A voltage detecting device using an electro-optical material with a refractive index which is changed by a voltage at a part of an object comprising a light source, comprises an electro-optical material for changing the optical path of the light beam from the light source in accordance with the refraction index of the electro-optical material and a slit or optical fiber extractor at a predetermined position at the output of the electro-optical material for extracting the quantity of light of the light beam at the predetermined position and a detector detecting a voltage at the part of the object from the quantity of light extracted.
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公开(公告)号：US4975635A
公开(公告)日：1990-12-04
申请号：US264706
申请日：1988-10-31
CPC分类号： G01R15/242 , G01R13/347 , G01R13/40
摘要： A voltage detector for measuring the voltage waveform of an object being measured on the basis of the optical intensity signal corresponding to the voltage of the object, including a light source for generating light, an optical modulator for converting the light from the light source into an optical intensity signal corresponding to the voltage of the object, and a sampling type high-speed photodetector for sampling the optical intensity signal from the optical modulator and measuring the voltage waveform of the object on the basis of the sampled optical intensity signal.
摘要翻译： 一种电压检测器，用于根据与物体的电压相对应的光强度信号来测量被测物体的电压波形，包括用于产生光的光源，用于将来自光源的光转换成光源的光调制器 对应于物体的电压的光强度信号，以及采样型高速光电检测器，用于对来自光调制器的光强度信号进行采样，并根据取样的光强度信号测量物体的电压波形。
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公开(公告)号：US4962353A
公开(公告)日：1990-10-09
申请号：US256793
申请日：1988-10-12
CPC分类号： G01R13/347 , G01R13/40 , G01R15/24 , G01R29/02
摘要： A voltage detector with an optical modulator comprising a pulse light source for outputting light pulses, a pulse train generator for generating a light pulse train having a pulse interval with the aid of light pulses provided by the pulse light source and for applying the light pulse train to an optical modulator, and a detector for detecting the optical intensities of light pulses forming the light pulse train which are modulated by the optical modulator with a voltage waveform to be detected.
摘要翻译： 一种具有光调制器的电压检测器，包括用于输出光脉冲的脉冲光源，脉冲串发生器，用于借助于由脉冲光源提供的光脉冲产生具有脉冲间隔的光脉冲串，并用于施加光脉冲 以及检测器，用于检测由光学调制器调制的形成光脉冲串的光脉冲的光强度，并具有待检测的电压波形。
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公开(公告)号：US4906922A
公开(公告)日：1990-03-06
申请号：US217790
申请日：1988-07-12
IPC分类号： G01R15/24 , G01R31/308
CPC分类号： G01R31/308 , G01R15/242
摘要： A voltage detecting device for detecting voltages in an object under test including an electro-optic material covering a plurality of parts of the object under test; the refractive index of the electro-optic material being variable according to an applied voltage. A light source emits light through the electro-optic material toward the object under test and a detecting device receives an emergent light beam reflected from within the electro-optic material in order to detect voltages in the object. Further, a scanning device automatically scans the object under test with the light beam in order to detect voltages at a plurality of locations on the object.
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