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1.发明授权Voltage detector having compensation for polarization change caused by spontaneous birefringence 失效电压检测器具有由自发双折射引起的偏振变化的补偿
公开(公告)号：US4866372A
公开(公告)日：1989-09-12
申请号：US200502
申请日：1988-05-31
CPC分类号： G01R1/071 , G01R15/242
摘要： A voltage detector detects a voltage developing in a selected area of an object such as an integrated circuit by utilizing an electro-optic material equipped in an optical probe. A change in refractive index of the first electro-optic material which is caused by the voltage in the object, is detected as a change of polarization of a light beam passing through the first electro-optic material. In order to compensating for a polarization change caused by the spontaneous birefringence, the first and second electro-optic materials made of the same material are disposed in such a manner that the first and second electro-optic materials and aligned along a light-traveling direction with their lengths in the light-traveling direction being substantially identical and with their optic axes being perpendicular to each other.
摘要翻译： 电压检测器通过利用配备在光学探针中的电光材料来检测在诸如集成电路的对象的选定区域中显影的电压。 由物体中的电压引起的第一电光材料的折射率的变化被检测为通过第一电光材料的光束的偏振变化。 为了补偿由自发双折射引起的偏振变化，由相同材料制成的第一和第二电光材料以这样的方式设置，使得第一和第二电光材料沿着光行进方向 其长度在光行进方向上基本相同，并且其光轴彼此垂直。
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2.发明授权Method of positioning an electrooptic probe of an apparatus for the measurement of voltage 失效定位用于测量电压的装置的电光探针的方法
公开(公告)号：US5552716A
公开(公告)日：1996-09-03
申请号：US213005
申请日：1994-03-14
IPC分类号： G01R19/00 , G01R31/302 , G01R31/308 , G01R29/12
CPC分类号： G01R31/308
摘要： An method of positioning an E-O probe applied to an apparatus for the measurement of voltage. In the first step, the relative position of the E-O probe against the magnifying optical system in the first condition of being focused the magnifying optical system on the base of the E-O probe, and the focal point difference between the focal plane of the magnifying optical system in the second condition that the E-O probe is substantially out of the optical path for observation of the surface of the device and the focal plane in the first condition are stored. The relative position and the focal point difference are fixed in the apparatus for the measurement of voltage regardless of the device to be measured. Next, in the second step, the focus of the magnifying optical system is adjusted to the observation position of the surface of the device in the second condition, and then in the third step, the magnifying optical system, the E-O probe, and the probe stage are separated from the device by the focal point difference stored in the first step by the Z-axis stage, and in the fourth step, the E-O probe is moved to the relative position of the E-O probe stored in the first step relative to the magnifying optical system by the probe stage.
摘要翻译： 将用于测量电压的设备的E-O探头定位的方法。 在第一步骤中，在将放大光学系统聚焦在EO探针的基座上的第一条件下，EO探针对放大光学系统的相对位置以及放大光学系统的焦平面之间的焦点差 在第二条件下，EO探针基本上不在用于观察装置的表面的光路中，并且在第一条件下存储焦平面。 无论要测量的装置如何，相对位置和焦点差都固定在用于测量电压的装置中。 接下来，在第二步骤中，放大光学系统的焦点在第二条件下被调整到装置的表面的观察位置，然后在第三步骤中，放大光学系统，EO探针和探针 通过Z轴级在第一步骤中存储的焦点差与装置分离阶段，并且在第四步骤中，将EO探针移动到相对于第一步骤中存储的EO探针的相对位置 通过探针台放大光学系统。
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公开(公告)号：US5164667A
公开(公告)日：1992-11-17
申请号：US619913
申请日：1990-11-30
IPC分类号： G01R1/07 , G01R15/24 , G01R19/155
CPC分类号： G01R1/071 , G01R15/242 , G01R19/155
摘要： A voltage detecting device using an electro-optical material with a refractive index which is changed by a voltage at a part of an object comprising a light source, comprises an electro-optical material for changing the optical path of the light beam from the light source in accordance with the refraction index of the electro-optical material and a slit or optical fiber extractor at a predetermined position at the output of the electro-optical material for extracting the quantity of light of the light beam at the predetermined position and a detector detecting a voltage at the part of the object from the quantity of light extracted.
摘要翻译： 使用折射率由包含光源的物体的一部分的电压改变的电光材料的电压检测装置包括用于改变来自光源的光束的光路的电光材料 根据电光材料的折射率和在电光材料的输出处的预定位置处的狭缝或光纤提取器，用于提取在预定位置处的光束的光量和检测器检测 从提取的光量的物体的一部分的电压。
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公开(公告)号：US4996475A
公开(公告)日：1991-02-26
申请号：US200575
申请日：1988-05-31
CPC分类号： G01R1/071 , G01R15/242
摘要： A voltage detector detects a voltage developing in a selected area of an object such as an integrated circuit by utilizing an electro-optic material equipped in an optical probe. A change in refractive index of the electro-optic material which is caused by the voltage in the object, is detected as a change of polarization of a light beam passing through the electro-optic material. In order to accomplish precise detection of the voltage, a mirror in the form of a thin metal film or a multilayered dielectric film is disposed at the tip of electro-optic material and, at the same time, a transparent electrode is disposed on the side of electro-optic material opposite to the side where the mirror is disposed. As a result, lines of electric force produced by the voltage developing in the object are aligned in the electro-optic material parallel to the center line of the optical probe and the change in refractive index becomes uniform.
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公开(公告)号：US4982151A
公开(公告)日：1991-01-01
申请号：US390768
申请日：1989-08-08
CPC分类号： G01R15/242 , G01R1/071
摘要： A voltage measuring apparatus comprises an optical probe furnished with an electro-optic material whose refractive index is changed in accordance with a voltage developing in a given part of an object and an auxiliary electrode for terminating electric lines of force coming from the given part, a light source for producing light to be inputted to the electro-optic material, a light polarization detector for detecting a polarization state of output light from the electro-optic material, and a power source for applying a variable voltage to the auxiliary electrode. An absolute value of the voltage in the given part can be determined as a specific value of the variable voltage obtained when no change is detected in the polarization state of the output light.
摘要翻译： 电压测量装置包括配备有电光材料的光学探针，该光学材料的折射率根据对象的给定部分中产生的电压而变化，以及用于终止来自给定部分的电力线的辅助电极， 用于产生要输入到电光材料的光的光源，用于检测来自电光材料的输出光的偏振状态的光偏振检测器和用于向辅助电极施加可变电压的电源。 可以将给定部分中的电压的绝对值确定为在输出光的偏振状态中检测不到变化时获得的可变电压的特定值。
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公开(公告)号：US5237388A
公开(公告)日：1993-08-17
申请号：US762457
申请日：1991-09-19
申请人： Isuke Hirano , Hironori Takahashi , Tsuneyuki Urakami , Tamiki Takemori , Yutaka Tsuchiya , Shinichiro Aoshima
发明人： Isuke Hirano , Hironori Takahashi , Tsuneyuki Urakami , Tamiki Takemori , Yutaka Tsuchiya , Shinichiro Aoshima
CPC分类号： G01J4/04
摘要： Young's interferometer consisting of a single slit and a double slit member, and an analyzer are arranged along the axis of light to be measured. Parallel slits of the double slit member are provided with respective polarizers whose paralyzing directions are at .+-.45.degree. to the longitudinal direction of the parallel slits. The polarizing direction of the analyzer is set in parallel with the parallel slits. The incident light passes through Young's interferometer and the analyzer to form an interference fringe, which is detected by an image detector unit. An image analyzer unit produces an intensity profile of the interference fringe and determines the polarization state of the incident light, for instance, by comparing the produced intensity profile with conceivable profiles stored in advance.
摘要翻译： 由单个狭缝和双缝隙构件组成的杨氏干涉仪和分析器沿着待测量的光轴设置。 双缝构件的平行狭缝设置有各自的偏振器，其麻痹方向与平行狭缝的纵向方向成+/- 45度。 分析仪的偏振方向与平行狭缝平行设置。 入射光通过杨氏干涉仪和分析仪，形成一个由图像检测器单元检测的干涉条纹。 图像分析器单元产生干涉条纹的强度分布并且确定入射光的偏振状态，例如通过将产生的强度分布与预先存储的可想到的曲线进行比较。
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7.发明授权Low noise pulsed light source utilizing laser diode and voltage detector device utilizing same low noise pulsed light source 失效低噪声脉冲光源利用激光二极管和电压检测器使用同样的低噪声脉冲光源
公开(公告)号：US5179565A
公开(公告)日：1993-01-12
申请号：US710392
申请日：1991-06-05
IPC分类号： G01R15/22 , H01S5/062 , H01S5/0683
CPC分类号： G01R15/22 , H01S5/06835 , H01S5/06216
摘要： A low noise pulsed light source utilizing a laser diode for generating a short pulsed light of a high repetitive frequency. The low noise pulsed light source includes a laser diode drived by an electric pulse generator for emitting repetitive pulsed light; a current source for supplying a bias current to the laser diode; and a photodetector for detecting the repetitive pulsed light emitted from the laser diode; and control means. The control means modulates at least one of the bias current from the current source and the amplitude of a pulse signal generated from the electric pulse generator in accordance with an output signal from the photodetector such that the intensity of the pulsed light is kept unchanged and any noise involved in the same is reduce. A feedback system including the photodetector and the control means has a peak in its frequency characteristics within a frequency band for light detecting in a light measuring system utilizing the low noise pulsed light source.
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公开(公告)号：US5034683A
公开(公告)日：1991-07-23
申请号：US460645
申请日：1990-01-03
IPC分类号： G01R15/24 , G01R31/308
CPC分类号： G01R31/308 , G01R15/242
摘要： A voltage detecting device for detecting voltages in an object under test including an electro-optic material covering a plurality of parts of the object under test; the refractive index of the electro-optic material being variable according to an applied voltage. A light source emits light through the electro-optic material toward the object under test and a detecting device receives an emergent light beam reflected from within the electro-optic material in order to detect voltages in the object. Further, a scanning device automatically scans the object under test with the light beam in order to detect voltages at a plurality of locations on the object.
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9.发明授权Voltage detector using electro-optic material having anti-reflective coatings 失效电压检测器使用具有抗反射涂层的电光材料
公开(公告)号：US4968881A
公开(公告)日：1990-11-06
申请号：US305346
申请日：1989-02-02
CPC分类号： G02F1/0311 , G01R15/242
摘要： A voltage detector comprises a light modulator which employs an electro-optic material whose refractive index changes according to the voltage developing in an object to be measured. A transparent anti-reflection film having a refractive index and thickness which are predetermined on the bases of a refractive index of the electro-optic material and a wavelength of incident light is formed on both light entrance and exit surfaces of the electro-optic material.
摘要翻译： 电压检测器包括光调制器，该光调制器采用其折射率根据在待测物体中产生的电压而变化的电光材料。 在电光材料的光入射表面和出射表面上形成具有在电光材料的折射率和入射光的波长的基础上预定的折射率和厚度的透明抗反射膜。
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公开(公告)号：US5153667A
公开(公告)日：1992-10-06
申请号：US617615
申请日：1990-11-26
CPC分类号： G01R15/24 , G01R1/071 , G01R13/347 , G01R15/242
摘要： A light beam is chopped and split into two beams. Intensity of a first beam is changed by using, e.g., an electrooptic material in accordance of a change in a signal to be detected, such as a voltage in an electronic device, and detected by a first photodetector. On the other hand, a second beam is detected by a second photodetector without being subjected to the intensity change. At least one of the outputs of the first and second photodetectors are adjusted so that they become equal to each other when no signal is applied to the light intensity changing means. The difference of the thus adjusted output signals is detected by, e.g., a lock-in amplifier in a narrow band at the chopping frequency.
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