公开(公告)号：US5853840A

公开(公告)日：1998-12-29

申请号：US879192

申请日：1997-06-20

申请人： Kazuo Saito ,  Yasushi Mochizuki ,  Seiji Yamamoto

发明人： Kazuo Saito ,  Yasushi Mochizuki ,  Seiji Yamamoto

IPC分类号： G01N1/28 ,  H01L21/02 ,  H01L21/66 ,  H01L23/544 ,  B32B18/00

CPC分类号： H01L22/34 ,  Y10T428/21 ,  Y10T428/30

摘要： A dummy wafer for use in a process for thin film formation on a wafer, which is made of a silicon carbide obtained by reacting a glassy carbon with silicon or with a silicon-containing gas, or comprises (1) a silicon carbide obtained by reacting a glassy carbon with silicon or with a silicon-containing gas and (2) a silicon carbide layer formed thereon by CVD. This dummy wafer alleviates the problems of the prior art; shows no warpage and contains no metal to become a contamination source for a semiconductor; has corrosion resistance to hydrofluoric acid, hydrochloric acid, etc., heat resistance and resistance to repeated heat cycles; and is inexpensive.

摘要翻译： 一种用于晶片薄膜形成工艺的虚拟晶片，其由通过使玻璃碳与硅或含硅气体反应获得的碳化硅制成，或包括（1）通过使 具有硅或含硅气体的玻璃碳和（2）通过CVD在其上形成的碳化硅层。 该虚拟晶片减轻了现有技术的问题; 没有翘曲，不含金属成为半导体的污染源; 对氢氟酸，盐酸等具有耐腐蚀性，耐热性和反复热循环性; 并且便宜。

公开(公告)号：US5066075A

公开(公告)日：1991-11-19

申请号：US456367

申请日：1989-12-26

申请人： Ichiro Kaneda ,  Seiji Yamamoto ,  Natsuji Fujii

发明人： Ichiro Kaneda ,  Seiji Yamamoto ,  Natsuji Fujii

IPC分类号： B60T8/34 ,  B60T8/36 ,  B60T8/42 ,  B60T13/68

CPC分类号： B60T8/4275 ,  B60T13/686 ,  B60T8/34 ,  B60T8/3675 ,  Y10S303/10

摘要： An actuator unit for an anti-skid brake system for an automotive vehicle, employs a built-in structure, in which all components, such as an EV valve, an AV valve, a pressure accumulator, an one-way check valve and so forth, are built-in a single cast block casing. Especially, fluid flow paths are formed integrally with the casing for enabling the overall unit compact enough for facilitating in the limited space in a vehicular body.

摘要翻译： 用于机动车辆的防滑制动系统的致动器单元采用内置结构，其中所有部件，例如EV阀，AV阀，蓄压器，单向止回阀等 ，内置一个单个铸块套管。 特别地，流体流动路径与壳体一体地形成，使得整体单元足够紧凑以便于在车体中的有限空间中。

公开(公告)号：US4755782A

公开(公告)日：1988-07-05

申请号：US82488

申请日：1987-08-07

申请人： Seiji Yamamoto

发明人： Seiji Yamamoto

IPC分类号： H01H51/22 ,  H01F7/08 ,  H01F7/14

CPC分类号： H01F7/14

摘要： A magnetically operated actuator comprises a support structure: a generally elongated operating element mounted on the support structure for selective displacement between first and second positions; at least one electromagnet assembly for driving the operating element to displace the latter between the first and second positions under the influence of magnetism emanating therefrom, which electromagnet assembly comprises a first magnetic member and a solenoid unit disposed around the first magnetic member and adapted to develop a magnetic field when electrically energized, with the first magnetic member being exposed in the magnetic field developed by the solenoid unit when the solenoid unit is electrically energized; and at least two second magnetic members cooperable with the first magnetic member. One of the first and second magnetic members is fixed to the support structure and the other of the first and second magnetic members is fixed to the operating element while the solenoid unit is fixed to the support structure.

摘要翻译： 磁操作的致动器包括支撑结构：安装在支撑结构上的大体上细长的操作元件，用于在第一和第二位置之间进行选择性位移; 至少一个电磁体组件，用于驱动所述操作元件，以在所述第一和第二位置之间在所述第一和第二位置之间移动所述操作元件，所述电磁体组件包括第一磁性构件和设置在所述第一磁性构件周围并适于显影的螺线管单元 当电通电时的磁场，当螺线管单元被电通电时，第一磁性构件在由螺线管单元产生的磁场中暴露; 以及与第一磁性构件配合的至少两个第二磁性构件。 第一和第二磁性构件中的一个固定到支撑结构，并且第一和第二磁性构件中的另一个固定到操作元件，同时螺线管单元固定到支撑结构。