公开(公告)号：US09618944B2

公开(公告)日：2017-04-11

申请号：US14686344

申请日：2015-04-14

申请人： General Electric Company

发明人： Qing Shan

IPC分类号： G05D16/20

CPC分类号： G05D16/2053 ,  G05D16/20 ,  G05D16/2046

摘要： A method and system for characterizing pressure controller valves of a pressure controller system are described herein. The pressure controller system includes a first valve and a second valve coupled to a manifold and a controller configured to control operation of the first valve and the second valve. The first valve regulates mass flowrate into the manifold and the second valve regulates mass flowrate released from the manifold. To characterize the apply valve, an electronic solenoid current to the first valve is increased until the manifold pressure rate exceeds the pressure rate threshold. When the manifold pressure rate exceeds the pressure rate threshold, the electronic solenoid current to the first valve decreases until the manifold pressure rate falls below the pressure rate threshold. These steps continue until the manifold pressure exceeds a manifold pressure threshold. At this point, the first valve is closed and characterization of the second valve commences.

公开(公告)号：US20150268669A1

公开(公告)日：2015-09-24

申请号：US14663625

申请日：2015-03-20

申请人： ASCO NUMATICS GMBH

发明人： MARTIN VOGT ,  HARALD STEINLE ,  FELIX AMS

IPC分类号： G05D7/06

CPC分类号： G05D7/0635 ,  G05D16/0672 ,  G05D16/2053 ,  G05D16/2093 ,  Y10T137/261 ,  Y10T137/7759 ,  Y10T137/86598 ,  Y10T137/86702

摘要： A device for providing an output fluid at a regulated output pressure includes a pressure control unit controlled via a pilot control pressure and a pilot control unit that provides the pilot control pressure. The pressure control unit includes an inlet chamber for an input fluid having an input pressure, an outlet chamber for the output fluid having the regulated output pressure and a first valve unit that acts between the inlet chamber and the outlet chamber. A first diaphragm of the pressure control unit is acted upon by the pilot control pressure. A second diaphragm, which is mechanically coupled to the first diaphragm is acted upon by the output fluid having the output pressure acts. At least the second diaphragm mechanically acts on the first valve unit.

摘要翻译： 用于以稳定的输出压力提供输出流体的装置包括经由先导控制压力控制的压力控制单元和提供先导控制压力的先导控制单元。 压力控制单元包括用于具有输入压力的输入流体的入口室，用于具有调节输出压力的输出流体的出口室和作用在入口室和出口室之间的第一阀单元。 压力控制单元的第一隔膜由先导控制压力作用。 机械耦合到第一隔膜的第二隔膜由具有输出压力作用的输出流体作用。 至少第二隔膜机械地作用在第一阀单元上。

公开(公告)号：US20140358301A1

公开(公告)日：2014-12-04

申请号：US14252969

申请日：2014-04-15

申请人： TESCOM CORPORATION

发明人： Gordon Cameron Muir ,  Timothy Patrick Franzwa

IPC分类号： G05D16/20

CPC分类号： G05D16/2093 ,  F16K7/12 ,  G05D7/012 ,  G05D16/0636 ,  G05D16/2053

摘要： A method of controlling a regulator with a pilot device includes periodically detecting an outlet pressure at an outlet of the regulator with a feedback pressure sensor. The method also includes comparing each detected outlet pressure with a set-point control pressure. Additionally, the method includes opening an exhaust valve of the pilot device when a detected outlet pressure is determined to be greater than the set-point control pressure such that a loading gas in the pilot device, which is applied to a top surface of a diaphragm of the regulator, exhausts out through the exhaust valve to reduce loading on the diaphragm. The method further includes sensing a loading pressure in the outlet port of the pilot valve with the loading pressure sensor after opening the exhaust valve and comparing the loading pressure to a predetermined minimum threshold pressure. When the loading pressure is determined to be equal to or less than the predetermined minimum threshold value, the method includes closing the exhaust valve.

摘要翻译： 用先导装置控制调节器的方法包括使用反馈压力传感器周期性地检测调节器的出口处的出口压力。 该方法还包括将每个检测出口压力与设定点控制压力进行比较。 此外，该方法包括当检测出的出口压力被确定为大于设定点控制压力时打开先导装置的排气阀，使得先导装置中的加载气体施加到隔膜的顶面 的调节器，通过排气阀排出，以减少隔膜上的负载。 该方法还包括在打开排气阀之后利用负载压力传感器感测先导阀的出口中的负载压力，并将负载压力与预定的最小阈值压力进行比较。 当加载压力被确定为等于或小于预定最小阈值时，该方法包括关闭排气阀。

公开(公告)号：US08469047B2

公开(公告)日：2013-06-25

申请号：US13116631

申请日：2011-05-26

申请人： Pierre R. Delajoud ,  Robert B. Haines ,  Thomas A. Lohkamp

发明人： Pierre R. Delajoud ,  Robert B. Haines ,  Thomas A. Lohkamp

IPC分类号： F16K31/126

CPC分类号： G01L27/005 ,  G05D16/0672 ,  G05D16/2053 ,  Y10T137/2544 ,  Y10T137/7793 ,  Y10T137/7826 ,  Y10T137/7836 ,  Y10T137/87177 ,  Y10T137/87185 ,  Y10T137/87249

摘要： Embodiments of the present invention are directed toward pressure controllers and calibrators for setting or measuring pressures in test devices. In one embodiment, the pressure controller contains a dual reference pressure controller. The dual reference pressure controller is operable to maintain two different pressures relative to a reference pressure. The first pressure being a relatively fixed amount greater than the reference pressure and the second pressure being a relatively fixed amount less than the reference pressure.

摘要翻译： 本发明的实施例涉及用于设置或测量测试装置中的压力的​​压力控制器和校准器。 在一个实施例中，压力控制器包含双参考压力控制器。 双参考压力控制器可操作以相对于参考压力保持两个不同的压力。 第一压力是大于参考压力的相对固定的量，而第二压力是小于参考压力的相对固定的量。

公开(公告)号：US07064671B2

公开(公告)日：2006-06-20

申请号：US09796902

申请日：2001-02-28

申请人： Richard J. Vanderah ,  Paul R. Adams ,  David E. Woolums ,  Jon B. Milliken

发明人： Richard J. Vanderah ,  Paul R. Adams ,  David E. Woolums ,  Jon B. Milliken

IPC分类号： G08B21/00

CPC分类号： G05B19/042 ,  G01F1/363 ,  G01F1/40 ,  G01F1/42 ,  G05B2219/24138 ,  G05B2219/25036 ,  G05B2219/25289 ,  G05D16/2053 ,  G05D16/2093

摘要： Methods are disclosed for collecting sensor data in a pressure regulator system including a controller and a plurality of sensors. The controller and each of the individual sensors are activated as required to collect sensor data during a sampling period thereby reducing the amount of power consumed by the pressure regulator system. Further power conservation measures are implemented by using a battery sensor to monitor the capacity of the pressure regulator battery and placing the pressure regulator in reduced power consumption operating modes as the capacity of the battery is reduced.

摘要翻译： 公开了用于在包括控制器和多个传感器的压力调节器系统中收集传感器数据的方法。 根据需要，控制器和每个单独的传感器被激活以在采样周期期间收集传感器数据，从而减少压力调节器系统消耗的功率量。 通过使用电池传感器来监测压力调节器电池的容量并且将压力调节器放置在降低的功耗操作模式中以进一步节能措施，因为电池的容量减小。

公开(公告)号：US07052576B2

公开(公告)日：2006-05-30

申请号：US10322557

申请日：2002-12-19

申请人： Jin-Jun Park ,  Jin-Seok Hong

发明人： Jin-Jun Park ,  Jin-Seok Hong

IPC分类号： B05C11/00 ,  C23F1/00 ,  H01L21/306

CPC分类号： H01L21/67253 ,  B01J2219/00162 ,  B01J2219/00191 ,  C23C16/45557 ,  G05D16/2053 ,  H01J37/32449

摘要： A desired level of pressure is established in at least one chamber that forms part of a closed atmosphere, such as in a semiconductor device processing facility. A pressure control system includes at least one space increase/decrease device that has a partition which is movable to increase and/or decrease the volume of free space within the chamber(s), a pressure sensor for detecting the pressure within the chamber(s), and a controller for controlling the movement of the partition based on the detected pressure. A chamber is provided with positive or negative pressure to increase or decrease the pressure therein while the pressure in the chamber is monitored. As soon as the pressure within the chamber equals a predetermined pressure, the providing of the positive or negative pressure is stopped. The partition is moved to vary the effective volume of free space in the chamber(s) to change the pressure in the chamber from the predetermined pressure to the desired pressure.

摘要翻译： 在形成封闭气氛的一部分的至少一个室中，例如在半导体器件处理设备中建立所需的压力水平。 压力控制系统包括至少一个空间增减装置，其具有可移动的分隔件，以增加和/或减小腔室内的自由空间的体积;压力传感器，用于检测腔室内的压力 ）和用于基于检测到的压力来控制分隔件的移动的控制器。 腔室具有正压或负压以增加或减小其中的压力，同时监测腔室中的压力。 只要室内的压力等于预定的压力，停止提供正压或负压。 移动隔板以改变腔室中的自由空间的有效体积，以将腔室中的压力从预定压力改变到期望的压力。

公开(公告)号：US06944524B2

公开(公告)日：2005-09-13

申请号：US10765753

申请日：2004-01-27

申请人： William W. Shier ,  Lee H. Theusch ,  James D. Snavley

发明人： William W. Shier ,  Lee H. Theusch ,  James D. Snavley

IPC分类号： G05D16/18 ,  G05D16/20 ,  G05D23/00

CPC分类号： G05D16/2053 ,  G05D16/2093 ,  Y10T137/0396

摘要： An air flow regulator includes a damper (14) and an air cylinder (20) operatively connected with the damper (14) to adjust a damper setting. A pressure sensor (52) indicates a pneumatic pressure in the air cylinder (20). An air pressure regulator (42) is operatively connected with the air cylinder (20) to pressurize and exhaust the air cylinder (20) responsive to an electrical input (70). The air pressure regulator (42) includes a calibration table (64) associating steady state air cylinder pressure values with regulator shut-off pressure values. Responsive to the electrical input (70) updating a steady-state air cylinder pressure value, the air pressure regulator (42) pressurizes or exhausts the air cylinder (20) until the pressure sensor (52) indicates a pressure corresponding to a regulator shut-off pressure value associated in the calibration table (64) with the updated steady-state air cylinder pressure value, whereupon the air pressure regulator (42) ceases the pressurizing or exhausting.

摘要翻译： 气流调节器包括阻尼器（14）和与阻尼器（14）可操作地连接以调节阻尼器设定的气缸（20）。 压力传感器（52）表示气缸（20）中的气动压力。 空气压力调节器（42）与气缸（20）可操作地连接，以响应于电输入（70）对气缸（20）进行加压和排气。 空气压力调节器（42）包括将稳态气缸压力值与调节器关闭压力值相关联的校准表（64）。 响应于更新稳态气缸压力值的电输入（70），空气压力调节器（42）对气缸（20）进行加压或排气，直到压力传感器（52）表示对应于调节器关闭的压力， 在校准表（64）中与更新的稳态气缸压力值相关联的关闭压力值，于是空气压力调节器（42）停止加压或排气。

公开(公告)号：US06860284B2

公开(公告)日：2005-03-01

申请号：US10332686

申请日：2001-04-27

申请人： Gebhard Wuerth ,  Matthias Schanzenbach ,  Juergen Binder ,  Timo Jahnz ,  Ulrich Gottwick ,  Michael Schubert

发明人： Gebhard Wuerth ,  Matthias Schanzenbach ,  Juergen Binder ,  Timo Jahnz ,  Ulrich Gottwick ,  Michael Schubert

IPC分类号： B60T8/32 ,  B60T8/36 ,  B60T8/88 ,  B60T15/00 ,  B60T17/22 ,  F16K25/00 ,  F16K29/00 ,  F16K31/02 ,  G05D16/00 ,  G05D7/06

CPC分类号： B60T8/326 ,  B60T8/36 ,  B60T15/00 ,  B60T17/221 ,  F16K25/00 ,  F16K29/00 ,  F16K31/02 ,  G05D16/2053 ,  Y10T137/043 ,  Y10T137/776 ,  Y10T137/7761

摘要： A method and a device for controlling at least one valve, in response to a detected leak in the system including the valve. An activation signal is generated which opens the valve briefly for flushing purposes and closes it again, or moves the valve ball at great speed onto the valve seat.

摘要翻译： 一种用于响应于包括阀的系统中检测到的泄漏来控制至少一个阀的方法和装置。 产生一个激活信号，该信号会短暂地打开阀门以进行冲洗，并重新关闭阀门，或将阀门以极快的速度移动到阀座上。

公开(公告)号：US20020117214A1

公开(公告)日：2002-08-29

申请号：US09798014

申请日：2001-02-28

发明人： Jeffrey C. Tucker ,  Brian L. Andersen ,  Robert Mittelstadt

IPC分类号： G05D007/00

CPC分类号： G05D7/005 ,  G05D16/2053 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8326

摘要： A fluid delivery and control system is provided for a fluid delivery line having elastic components. The system includes a pressure sensor, an electronically controlled valve, processing circuitry, and computer program code logic. The pressure sensor is operative to detect fluid pressure within a fluid delivery line. The electronically controlled valve includes an adjustable flow regulating aperture disposed in the line, interposed along a linear flow axis, and operative to regulate fluid flow through the line. The processing circuitry communicates with the pressure sensor and the electronically controlled valve. The computer program code logic is executed by the processing circuitry and is configured to generate an output signal. The output signal comprises an operating parameter of at least one of the pressure sensor and the electronically controlled valve to adjust flow capacity of the flow regulating aperture of the valve to dissipate pressure oscillations within the fluid delivery line. A method is also provided.

摘要翻译： 为具有弹性部件的流体输送管线提供流体输送和控制系统。 该系统包括压力传感器，电子控制阀，处理电路和计算机程序代码逻辑。 压力传感器用于检测流体输送管线内的流体压力。 电子控制阀包括设置在管线中的可调节的流量调节孔，沿着线性流动轴线插入，并且可操作以调节通过管线的流体流动。 处理电路与压力传感器和电子控制阀连通。 计算机程序代码逻辑由处理电路执行并被配置为产生输出信号。 输出信号包括压力传感器和电子控制阀中的至少一个的操作参数，以调节阀的流量调节孔的流量，以消散流体输送管线内的压力振荡。 还提供了一种方法。

公开(公告)号：US06356811B1

公开(公告)日：2002-03-12

申请号：US09170982

申请日：1998-10-13

申请人： Ronald E. Beselt

发明人： Ronald E. Beselt

IPC分类号： G05D1600

CPC分类号： G05D16/2053

摘要： A method and apparatus for controlling the state of a pneumatic actuator having a valve that connects the actuator to a supply pressure and a valve that connects the actuator to an exhaust pressure. The method involves closing the supply pressure and exhaust pressure valves, determining the current state of the pneumatic actuator, and then determining the difference between the current state and a desired state. The appropriate pressure valve to be opened and the period to be opened is then calculated based on pre-determined calibration data for the actuator which permits the end state of the actuator to be predicted. The appropriate valve is then opened for the calculated period to adjust the actuator to the desired state. The process is then repeated until the current state of the actuator is the desired state. A controller unit that uses the above method is also disclosed. Equipment incorporating the method and apparatus of the present invention enjoys significantly reduced manufacturing and installation costs. The size of the components and the assembly time for the equipment is also reduced. The design allows for flexibility with regard to various pneumatic actuator types. The system can handle different sources of state feedback such as pressure or position without major changes to hardware. In addition, feedback of the pneumatic actuator state allows for diagnosis of the system with timely scheduling of necessary maintenance. Deterioration of pneumatic actuators is detected and can be compensated for to maintain full operation of the system.

摘要翻译： 一种用于控制气动致动器的状态的方法和装置，其具有将致动器连接到供给压力的阀和将致动器连接到排气压力的阀。 该方法包括关闭供应压力和排气压力阀，确定气动致动器的当前状态，然后确定当前状态与期望状态之间的差异。 然后根据允许致动器的结束状态预测的致动器的预先确定的校准数据来计算要打开的适当的压力阀和要打开的时间。 然后在计算的时间段内打开适当的阀门以将致动器调整到所需状态。 然后重复该过程，直到致动器的当前状态为期望状态。 还公开了使用上述方法的控制器单元。 结合本发明的方法和装置的设备显着降低了制造和安装成本。 设备的尺寸和装配时间也减少了。 该设计允许在各种气动执行器类型方面具有灵活性。 该系统可以处理不同的状态反馈源，例如压力或位置，而不会对硬件造成重大变化。 此外，气动执行器状态的反馈允许系统的诊断，及时调度必要的维护。 检测到气动执行器的劣化，并可以补偿以保持系统的完全运行。