公开(公告)号：US20060015206A1

公开(公告)日：2006-01-19

申请号：US10890410

申请日：2004-07-14

Applicant: Merritt Funk ,  Kevin Pinto ,  Asao Yamashita ,  Wesley Natzle

Inventor： Merritt Funk ,  Kevin Pinto ,  Asao Yamashita ,  Wesley Natzle

IPC: G06F19/00

CPC classification number: H01L22/20 ,  H01L21/67248 ,  H01L21/67253 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A dual chamber apparatus including a first chamber and a second chamber which is configured to be coupled to the first chamber at an interface. Each of the first chamber and the second chamber has a transfer opening located at the interface. An insulating plate is located on one of the first chamber and the second chamber at the interface and is configured to have a low thermal conductivity such that the first chamber and the second chamber can be independently controlled at different temperatures when the first chamber and the second chamber are coupled together. Additionally, the apparatus may include an alignment device and/or a fastening device for fastening the first chamber to the second chamber. In embodiments, the insulating plate may be constructed of Teflon. Further, the first chamber may be a chemical oxide removal treatment chamber and the second chamber may be a heat treatment chamber.

Abstract translation: 一种双室装置，包括第一室和第二室，其构造成在界面处联接到第一室。 第一室和第二室中的每个具有位于界面处的传送开口。 绝缘板位于界面处的第一室和第二室中的一个上，并被构造成具有低导热性，使得当第一室和第二室可以在不同的温度下独立地控制第一室和第二室 腔室耦合在一起。 另外，该装置可以包括用于将第一室紧固到第二室的对准装置和/或紧固装置。 在实施例中，绝缘板可以由特氟隆构成。 此外，第一室可以是化学除氧处理室，第二室可以是热处理室。

公开(公告)号：US20050165731A1

公开(公告)日：2005-07-28

申请号：US11057422

申请日：2005-02-15

Applicant: Merritt Funk

Inventor： Merritt Funk

IPC: H01L21/02 ,  G05B15/02 ,  G05B19/418 ,  G05B23/02 ,  G06F17/30

CPC classification number: G05B15/02 ,  G05B19/41865 ,  G05B19/41875 ,  G05B23/0224 ,  G05B2219/32128 ,  G05B2219/33054 ,  G05B2219/33055 ,  G05B2219/35504 ,  G05B2219/36284 ,  G05B2219/42001 ,  Y02P90/14 ,  Y02P90/20 ,  Y02P90/22 ,  Y02P90/86

Abstract: A method for managing data in a semiconductor processing environment. Raw data is collected during a process. Also, trace file data and process log file data are received. The raw data is synchronized with the trace file data and process log file data to create wafer data summary data is calculated from the raw data and a file is created containing the wafer data and the summary data.

Abstract translation: 一种用于在半导体处理环境中管理数据的方法。 在一个过程中收集原始数据。 而且，接收跟踪文件数据和进程日志文件数据。 原始数据与跟踪文件数据和进程日志文件数据同步，以创建晶片数据摘要数据是从原始数据计算的，并创建一个包含晶圆数据和摘要数据的文件。

公开(公告)号：US20050065630A1

公开(公告)日：2005-03-24

申请号：US10966112

申请日：2004-10-18

Applicant: Merritt Funk ,  Wei Chen

Inventor： Merritt Funk ,  Wei Chen

IPC: H01L21/02 ,  G05B19/042 ,  G05B19/418 ,  G06F19/00

CPC classification number: G05B19/042 ,  G05B19/418 ,  G05B19/4187 ,  G05B2219/32128 ,  G05B2219/45031 ,  Y02P90/14 ,  Y02P90/205 ,  Y02P90/86

Abstract: A GUI is presented for configuring and initializing a semiconductor processing system, which includes a number of processing tools, a number of processing modules, a number of sensors, a number of processing models, and an alarm management system. The graphical display is organized so that all significant parameters are clearly and logically displayed so that the user is able to perform the desired configuration, initialization, and troubleshooting tasks with as little input as possible. The GUI is web-based and is viewable by a user using a web browser.

Abstract translation: 提供了用于配置和初始化半导体处理系统的GUI，其包括多个处理工具，多个处理模块，多个传感器，多个处理模型和警报管理系统。 图形显示被组织，使得所有重要的参数都被清楚和逻辑地显示，使得用户能够以尽可能少的输入执行所需的配置，初始化和故障排除任务。 GUI是基于Web的，并且可以由使用web浏览器的用户查看。