公开(公告)号：US06180506B2

公开(公告)日：2001-01-30

申请号：US09152836

申请日：1998-09-14

Applicant: Timothy D. Sullivan

Inventor： Timothy D. Sullivan

IPC: H01L214763

CPC classification number: H01L21/76858 ,  H01L21/76847 ,  H01L21/76849 ,  H01L21/76877

Abstract: A multi-film damascene metal interconnect line for a semiconductor device and the method for manufacturing the interconnect line. The interconnect line has a redundant layer film included within the top surface of the interconnect line which reduces stress voiding and electromigration. The interconnect line is produced by depositing a redundant film part-way through the deposition of the bulk metal film and does not require additional polishing steps.

Abstract translation: 一种用于半导体器件的多层镶嵌金属互连线及其制造方法。 互连线具有包括在互连线的顶表面内的冗余层膜，其减少应力空隙和电迁移。 通过在块状金属膜的沉积中部分地沉积冗余膜并且不需要额外的抛光步骤来产生互连线。

公开(公告)号：US4184093A

公开(公告)日：1980-01-15

申请号：US922620

申请日：1978-07-07

Applicant: Timothy D. Sullivan

Inventor： Timothy D. Sullivan

IPC: B06B1/06 ,  H04R17/02 ,  H01L41/10

CPC classification number: H04R17/025 ,  B06B1/0688 ,  Y10S310/80

Abstract: A transducer, suitable for sensing acoustic signals underwater, includes aiezoelectric polymer film. The device comprises a rectangular sandwich arrangement with a plastic frame in the center having plastic plates connected on either side and a piezoelectric polymer film on the outside of each plastic plate. The film is arranged so that the most active direction of the polymer lies in the transverse plate direction. Electric wires are connected to opposing surfaces of each piezoelectric polymer film. When the sandwich arrangement is complete an air cavity that is compliant to the stiffness of the plates is created in the center within the plastic frame.

Abstract translation: 适用于水下感测声学信号的传感器包括压电聚合物膜。 该装置包括矩形夹层结构，其中心具有塑料框架，其中塑料板在两侧连接，压电聚合物膜位于每个塑料板的外侧。 该膜被布置成使得聚合物的最活跃的方向位于横向板方向上。 电线连接到每个压电聚合物膜的相对表面。 当三明治布置完成时，在塑料框架的中心产生符合板的刚度的空气腔。