公开(公告)号：US20020117937A1

公开(公告)日：2002-08-29

申请号：US10128542

申请日：2002-04-24

Inventor： Minoru Sakata ,  Takuya Nakajima ,  Tomonori Seki ,  Teruhiko Fujiwara ,  Masashi Takeuchi

IPC: H02N002/00

CPC classification number: H01H1/0036 ,  B81B7/0077 ,  B81B2201/016 ,  B81B2207/095 ,  B81C2203/0118 ,  H01H1/20 ,  H01H9/52 ,  H01H57/00 ,  H01H59/0009 ,  H01H61/02 ,  H01H67/22 ,  H01H2001/0042 ,  H01H2001/0084 ,  H01H2057/006 ,  H01H2061/006

Abstract: A thin plate-shaped substrate 21 comprised of a monocrystal is provided with a piezoelectric element 24, and both ends of a movable piece 20 whose one surface is provided with a movable contact 25 are fixed and supported to a base 11. Then, by curving the movable piece 20 via the piezoelectric element 24, the movable contact 25 is brought in and out of contact with a pair of fixed contacts 38 and 39 that face the movable contact. With this arrangement, a subminiature micro-relay having a mechanical contact mechanism that has a small resistance in turning on the contact and the desired vibration resistance, frequency characteristic and insulating property can be obtained.

公开(公告)号：US20020008444A1

公开(公告)日：2002-01-24

申请号：US09254030

申请日：1999-02-26

Inventor： MINORU SAKATA ,  TAKUYA NAKAJIMA ,  TOMONORI SEKI ,  TERUHIKO FUJIWARA ,  MASASHI TAKEUCHI

IPC: H01L041/04

CPC classification number: H01H1/0036 ,  B81B7/0077 ,  B81B2201/016 ,  B81B2207/095 ,  B81C2203/0118 ,  H01H1/20 ,  H01H9/52 ,  H01H57/00 ,  H01H59/0009 ,  H01H61/02 ,  H01H67/22 ,  H01H2001/0042 ,  H01H2001/0084 ,  H01H2057/006 ,  H01H2061/006

Abstract: A thin plate-shaped substrate 21 comprised of a monocrystal is provided with a piezoelectric element 24, and both ends of a movable piece 20 whose one surface is provided with a movable contact 25 are fixed and supported to a base 11. Then, by curving the movable piece 20 via the piezoelectric element 24, the movable contact 25 is brought in and out of contact with a pair of fixed contacts 38 and 39 that face the movable contact. With this arrangement, a subminiature micro-relay having a mechanical contact mechanism that has a small resistance in turning on the contact and the desired vibration resistance, frequency characteristic and insulating property can be obtained.

Abstract translation: 由单晶构成的薄板状基板21设置有压电元件24，并且其一个表面设置有可动触点25的可动件20的两端固定并支撑在基座11上。然后，通过弯曲 经由压电元件24的可动片20与可动触点对置的一对固定触点38,39接触而脱离接触。 通过这种布置，可以获得具有机械接触机构的小型微型继电器，其具有接通触点的小电阻和期望的振动阻抗，频率特性和绝缘性能。

公开(公告)号：US06239685B1

公开(公告)日：2001-05-29

申请号：US09418011

申请日：1999-10-14

Applicant: Thomas Robert Albrecht ,  Timothy Clark Reiley

Inventor： Thomas Robert Albrecht ,  Timothy Clark Reiley

IPC: H01H3746

CPC classification number: G11C23/00 ,  B81B3/0024 ,  B81B2201/016 ,  B81B2201/032 ,  G11B5/40 ,  G11B19/04 ,  H01H1/0036 ,  H01H1/20 ,  H01H37/52 ,  H01H2001/0042 ,  H01H2001/0084 ,  H01H2037/008

Abstract: A bistable micromechanical switch that includes a substrate, at least two anchor points formed on the substrate, and a beam structure that includes a two-material beam attached to at least two anchor points. The two-material beam has a first portion, a second portion and a center portion. The first portion of the two-material beam is formed from a first layer of a first material and a second layer of a second material such that the first layer of the first portion is proximate to the surface of the substrate and the second layer of the first portion is remote from the surface of the substrate. The first material has a first coefficient of thermal expansion and the second material has a second coefficient of thermal expansion such that the second coefficient of thermal expansion is greater than the first coefficient of thermal expansion. The second portion of the two-material beam is formed from a first layer of the second material and a second layer of the first material such that the first layer of the second portion is proximate to the surface of the substrate and the second layer of the second portion is remote from the surface of the substrate. The beam structure has a first and a second stable state such that the center portion of the beam structure is deflected toward the surface of the substrate for the first stable state and is deflected away from the surface of the substrate for the second stable state.

Abstract translation: 一种双稳态微机械开关，其包括基板，形成在基板上的至少两个锚定点以及包括连接到至少两个锚定点的双材料梁的梁结构。 双材料梁具有第一部分，第二部分和中心部分。 双材料束的第一部分由第一材料的第一层和第二材料的第二层形成，使得第一部分的第一层靠近衬底的表面，并且第二层的第二层 第一部分远离基板的表面。 第一材料具有第一热膨胀系数，第二材料具有第二热膨胀系数，使得第二热膨胀系数大于第一热膨胀系数。 双材料束的第二部分由第二材料的第一层和第一材料的第二层形成，使得第二部分的第一层靠近基板的表面，并且第二层的第二层 第二部分远离基板的表面。 梁结构具有第一和第二稳定状态，使得梁结构的中心部分朝向基板的表面偏转第一稳定状态，并且偏转离开基板的表面用于第二稳定状态。