-
公开(公告)号：US20240274373A1
公开(公告)日：2024-08-15
申请号：US18290891
申请日：2022-09-15
CPC分类号： H01H1/20 , H01H1/0036 , H01H2001/0057
摘要： An electrical contact system includes a first contact, a first diffusion layer disposed on the first contact, a first liquid metal layer disposed on the first diffusion layer, a second contact, a second diffusion layer disposed on the second contact, and a second liquid metal layer disposed on the second diffusion layer.
-
公开(公告)号：US12050102B2
公开(公告)日：2024-07-30
申请号：US17025977
申请日：2020-09-18
发明人： Gabriele Gattere , Carlo Valzasina , Enri Duqi
CPC分类号： G01B7/22 , B81B7/0058 , G01L1/14 , H01G5/01 , H01G5/16 , H01H1/0036 , H03K17/975 , B81B2201/0221 , B81B2201/0292 , B81B2203/0154 , B81B2203/0181 , B81B2203/0307 , B81B2203/04 , B81B2203/056 , B81B2207/012 , G06F3/044
摘要： A button device includes a MEMS sensor having a MEMS strain detection structure and a deformable substrate configured to undergo deformation under the action of an external force. The MEMS strain detection structure includes a mobile element carried by the deformable substrate via at least a first and a second anchorage, the latter fixed with respect to the deformable substrate and configured to displace and generate a deformation force on the mobile element in the presence of the external force; and stator elements capacitively coupled to the mobile element. The deformation of the mobile element causes a capacitance variation between the mobile element and the stator elements. Furthermore, the MEMS sensor is configured to generate detection signals correlated to the capacitance variation.
-
3.发明申请公开(公告)号：US20190233277A1
公开(公告)日：2019-08-01
申请号：US16379982
申请日：2019-04-10
CPC分类号： B81B3/0072 , B81B3/0021 , B81B2201/01 , B81B2201/014 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81C1/0015 , B81C1/00365 , B81C1/00476 , B81C1/00619 , B81C1/00626 , B81C1/00666 , B81C2201/0109 , B81C2201/013 , B81C2201/0167 , B81C2201/017 , B81C2203/0136 , B81C2203/0172 , G06F17/5068 , G06F17/5072 , H01H1/0036 , H01H57/00 , H01H59/0009 , H01H2057/006 , H01L41/1136 , H01L2924/0002 , Y10S438/937 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49105 , Y10T29/49121 , Y10T29/49126 , Y10T29/4913 , Y10T29/49155 , Y10T29/5313 , H01L2924/00
摘要： A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.
-
公开(公告)号：US20190077655A1
公开(公告)日：2019-03-14
申请号：US15255757
申请日：2016-09-02
申请人： TDK CORPORATION
发明人： Jotaro AKIYAMA , Kenji ENDOU , Takashi AOYAGI , Katsunori OSANAI , Tohru INOUE
CPC分类号： B81B7/02 , B81B3/0097 , B81B7/008 , B81B2201/014 , B81B2203/0118 , B81B2203/04 , H01H1/00 , H01H1/0036 , H01H2001/0084 , H01H2057/006
摘要： A MEMS switch includes a first signal line provided in a first beam, a first GND adjacent to the first signal line, a second signal line provided in a second beam, and a second GND adjacent to the second signal line. A contact terminal is fixed to any one of the first signal line and the second signal line and performs connection between the first signal line and the second signal line according to deformation of the first beam.
-
5.发明申请公开(公告)号：US20180346318A1
公开(公告)日：2018-12-06
申请号：US16042303
申请日：2018-07-23
CPC分类号： B81B3/0072 , B81B3/0021 , B81B2201/01 , B81B2201/014 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81C1/0015 , B81C1/00365 , B81C1/00476 , B81C1/00619 , B81C1/00626 , B81C1/00666 , B81C2201/0109 , B81C2201/013 , B81C2201/0167 , B81C2201/017 , B81C2203/0136 , B81C2203/0172 , G06F17/5068 , G06F17/5072 , H01H1/0036 , H01H57/00 , H01H59/0009 , H01H2057/006 , H01L41/1136 , H01L2924/0002 , Y10S438/937 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49105 , Y10T29/49121 , Y10T29/49126 , Y10T29/4913 , Y10T29/49155 , Y10T29/5313 , H01L2924/00
摘要： A method of forming at least one Micro-Electro-Mechanical System (MEMS) includes patterning a wiring layer to form at least one fixed plate and forming a sacrificial material on the wiring layer. The method further includes forming an insulator layer of one or more films over the at least one fixed plate and exposed portions of an underlying substrate to prevent formation of a reaction product between the wiring layer and a sacrificial material. The method further includes forming at least one MEMS beam that is moveable over the at least one fixed plate. The method further includes venting or stripping of the sacrificial material to form at least a first cavity.
-
公开(公告)号：US20180315748A1
公开(公告)日：2018-11-01
申请号：US15771245
申请日：2016-11-14
CPC分类号： H01H1/0036 , H01H59/0009 , H01L27/0248
摘要： The present disclosure generally relates to the combination of MEMS intrinsic technology with specifically designed solid state ESD protection circuits in state of the art solid state technology for RF applications. Using ESD protection in MEMS devices has some level of complexity in the integration which can be seen by some as a disadvantage. However, the net benefits in the level of overall performance for insertion loss, isolation and linearity outweighs the disadvantages.
-
公开(公告)号：US09944517B2
公开(公告)日：2018-04-17
申请号：US14883745
申请日：2015-10-15
CPC分类号： B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
摘要： An approach includes a method of fabricating a switch. The approach includes forming a first fixed electrode and a second fixed electrode, forming a first cantilevered electrode aligned vertically over the first fixed electrode, forming a second cantilevered electrode aligned vertically over the second fixed electrode, and which has an end that overlaps and is operable to directly contact an end of the first cantilevered electrode upon an application of a voltage to at least one of the first fixed electrode and the second fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.
-
公开(公告)号：US20180096751A1
公开(公告)日：2018-04-05
申请号：US15788441
申请日：2017-10-19
IPC分类号： H01B7/00 , C12M1/12 , B32B9/00 , H05K1/03 , B32B17/06 , C12M1/34 , G01N27/416 , G01N33/68 , H01H1/00 , H01H1/021 , H01L51/00 , H01B1/06 , H01B3/00 , C08J3/075
CPC分类号： H01B7/0027 , B32B9/00 , B32B17/06 , B32B2457/00 , C08J3/075 , C08J2305/12 , C12M1/34 , C12M1/3407 , C12M25/14 , G01N27/416 , G01N33/6872 , H01B1/06 , H01B3/00 , H01H1/0036 , H01H1/021 , H01L51/00 , H05K1/0306 , H05K1/0326 , H05K2201/0162 , Y10T156/10 , Y10T428/26 , Y10T428/31971
摘要： The invention provides a hydrogel network comprising a plurality of hydrogel objects, wherein each of said hydrogel objects comprises: a hydrogel body, and an outer layer of amphipathic molecules, on at least part of the surface of the hydrogel body, wherein each of said hydrogel objects contacts another of said hydrogel objects to form an interface between the contacting hydrogel objects. A process for producing the hydrogel networks is also provided. The invention also provides an electrochemical circuit and a hydrogel component for mechanical devices comprising a hydrogel network. Various uses of the hydrogel network are also described, including their use in synthetic biology and as components in electrochemical circuits and mechanical devices.
-
公开(公告)号：US20180093884A1
公开(公告)日：2018-04-05
申请号：US15809066
申请日：2017-11-10
CPC分类号： B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
摘要： An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode, forming a second cantilevered electrode over an electrode and operable to contact the first cantilevered electrode upon an application of a voltage to the electrode, and forming an arm on the first cantilevered electrode with an extending protrusion extending upward from an upper surface of the arm.
-
公开(公告)号：US20180079640A1
公开(公告)日：2018-03-22
申请号：US15700179
申请日：2017-09-11
CPC分类号： B81B3/0013 , B81B3/0086 , B81B7/0006 , B81B7/008 , B81C1/00206 , B81C1/00936 , H01H1/0036 , H01H59/0009 , H01H2001/0078
摘要： Systems and methods for forming an electrostatic MEMS switch that is used to switch a source of current or voltage. At least one surface of the MEMS switch may be rotated on approach to another substrate, such that when the surfaces are separated, the forces are shearing forces rather than static frictional forces.
-
-
-
-
-
-
-
-
-
搜索结果
1060 条记录 (耗时 0.031 秒)
