利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

302 条记录 (耗时 0.017 秒)

    MEMS device with bi-directional element
    5.
    发明授权
    MEMS device with bi-directional element 有权
    具有双向元件的MEMS器件

    公开(公告)号：US07973637B2

    公开(公告)日：2011-07-05

    申请号：US12732752

    申请日：2010-03-26

    申请人： Arman Gasparyan ,  John VanAtta Gates, II ,  Maria Elina Simon

    发明人： Arman Gasparyan ,  John VanAtta Gates, II ,  Maria Elina Simon

    IPC分类号： H01H61/01

    CPC分类号： H01H1/0036 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2201/031 ,  H01H37/00 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2061/006 ,  H01H2061/008

    摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.

    摘要翻译： 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括​​具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。

    MICROMECHANICAL ACTUATOR
    7.
    发明申请
    MICROMECHANICAL ACTUATOR 审中-公开
    微电子执行器

    公开(公告)号：US20110006874A1

    公开(公告)日：2011-01-13

    申请号：US12919618

    申请日：2009-02-23

    申请人： Mike Becker ,  Dietmar Lütke-Notarp ,  Klaus Froehner

    发明人： Mike Becker ,  Dietmar Lütke-Notarp ,  Klaus Froehner

    IPC分类号： H01H37/46 ,  H01L21/302 ,  H02N10/00

    CPC分类号： H01H61/04 ,  B81B2201/014 ,  B81B2201/031 ,  B81B2203/051 ,  B81C1/00682 ,  H01H2001/0047 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    摘要： A micromechanical actuator includes a movable first spring element having metal and/or silicon. The first spring element is fitted at a first point and can move freely at a second point. A second spring element connected to the first spring element has silicon and is partially arranged on an electrically insulating material which is applied to a substrate. The second spring element is arranged at a distance from the substrate above the substrate on a first plane, and the first spring element is arranged above the second spring element on a second plane which is at a distance from the first plane such that the first and second spring elements can move with respect to the substrate. The actuator has a third spring element which is mechanically coupled to the first spring element. The elastic deformation of the second spring element can be induced by a length change of the third spring element.

    摘要翻译： 微机械致动器包括具有金属和/或硅的可移动的第一弹簧元件。 第一弹簧元件安装在第一点上，并可在第二点自由移动。 连接到第一弹簧元件的第二弹簧元件具有硅并且部分地布置在施加到基板的电绝缘材料上。 第二弹簧元件在第一平面上与衬底上方的基板一定距离设置，并且第一弹簧元件布置在第二平面上方的第二平面上，第二平面与第一平面成一定距离，使得第一和 第二弹簧元件可以相对于基底移动。 致动器具有机械地联接到第一弹簧元件的第三弹簧元件。 第二弹簧元件的弹性变形可以由第三弹簧元件的长度变化引起。

    Electro-mechanical switch
    8.
    发明授权
    Electro-mechanical switch 有权
    机电开关

    公开(公告)号：US07683746B2

    公开(公告)日：2010-03-23

    申请号：US10592988

    申请日：2006-01-20

    申请人： Yoshito Nakanishi

    发明人： Yoshito Nakanishi

    IPC分类号： H01H51/22

    CPC分类号： H01H59/0009 ,  H01H50/005 ,  H01H2001/0078 ,  H01H2001/0084 ,  H01H2057/006 ,  H01H2061/006

    摘要： The present invention provides an electromechanical switch enabled to achieve a high-speed switching response at a low driving voltage. An electromechanical switch body 10, which is an MEMS switch, has a first movable electrode 14 and a second movable electrode 16, both ends of each of which are respectively fixed to and laid on a first anchor 12 and a second anchor 13 formed on a silicon substrate 2, and also has a fixed electrode 18 that faces these movable electrodes. A first electromechanical switch 22 enabled to be driven at a low voltage is constituted by the first movable electrode 14, which has a relatively weak spring force, and the fixed electrode 18. A second electromechanical switch 24 enabled to be latched at a low voltage is constituted by the second movable electrode 16, which has a relatively strong spring force, and the fixed electrode 18. Consequently, the first movable electrode 14 is displaced at high speed at a low driving voltage, so that the first electromechanical switch is turned on at high speed. A restoring force causes the second movable electrode 16 to perform natural vibrations at high speed, so that the second electromechanical switch is turned off at high speed. The restored second movable electrode 16 is latched at a low driving voltage, so that the second electromechanical switch is turned on.

    摘要翻译： 本发明提供一种能够在低驱动电压下实现高速开关响应的机电开关。 作为MEMS开关的机电开关体10具有第一可动电极14和第二可动电极16，其各自的两端分别固定在第一锚定体12上并铺设在第一锚定体12上， 硅基板2，并且还具有面向这些可动电极的固定电极18。 能够以低电压驱动的第一机电开关22由具有相对较弱的弹簧力的第一可动电极14和固定电极18构成。能够以低电压锁存的第二机电开关24是 由具有相对较强的弹簧力的第二可动电极16和固定电极18构成。因此，第一可动电极14在低驱动电压下以高速移位，使得第一机电开关在 高速。 恢复力使第二可动电极16以高速进行自然振动，使第二机电开关高速关闭。 恢复的第二可动电极16被锁定在低驱动电压，使得第二机电开关导通。

    MEMS switch and method for manufacturing the same
    9.
    发明授权
    MEMS switch and method for manufacturing the same 失效
    MEMS开关及其制造方法

    公开(公告)号：US07619289B2

    公开(公告)日：2009-11-17

    申请号：US11472312

    申请日：2006-06-22

    申请人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Duck-hwan Kim ,  Yun-kwon Park ,  Hee-moon Jeong ,  Young-tack Hong ,  Che-heung Kim ,  Seok-chul Yun ,  Kuang-woo Nam

    发明人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Duck-hwan Kim ,  Yun-kwon Park ,  Hee-moon Jeong ,  Young-tack Hong ,  Che-heung Kim ,  Seok-chul Yun ,  Kuang-woo Nam

    IPC分类号： H01L29/78

    CPC分类号： H01H61/02 ,  H01H61/063 ,  H01H2061/006

    摘要： A MEMS switch includes a lower substrate having a signal line on an upper surface of the lower substrate; an upper substrate, having a cavity therein, disposed apart from the upper surface of the lower substrate by a distance, and having a membrane layer on a lower surface of the upper substrate; a bimetal layer formed in the cavity of the upper substrate on the membrane layer; a heating layer formed on a lower surface of the membrane layer; and a contact member formed on a lower surface of the heating layer. The contact member can come into contact with or separate from the signal line. A method for manufacturing the MEMS switch includes preparing the upper and lower substrates and combining them so that a surface having the signal line faces a surface having the contact member and the upper and lower substrates are disposed apart by a distance.

    摘要翻译： MEMS开关包括在下基板的上表面上具有信号线的下基板; 在其上具有空腔的上基板，与下基板的上表面隔开一段距离，并且在上基板的下表面上具有膜层; 形成在膜层上的上基板的空腔中的双金属层; 形成在所述膜层的下表面上的加热层; 以及形成在所述加热层的下表面上的接触构件。 接触构件可以与信号线接触或分离。 制造MEMS开关的方法包括制备上基板和下基板并将其组合，使得具有信号线的表面面向具有接触构件的表面，并且上下基板分开一定距离。

    Hysteretic mems thermal device and method of manufacture
    10.
    发明申请
    Hysteretic mems thermal device and method of manufacture 有权
    滞后装置及制造方法

    公开(公告)号：US20090201119A1

    公开(公告)日：2009-08-13

    申请号：US12318634

    申请日：2009-01-05

    申请人： Paul J. Rubel

    发明人： Paul J. Rubel

    IPC分类号： H01H71/18 ,  H02N10/00 ,  H01H11/00

    CPC分类号： F03G7/06 ,  B81B3/0059 ,  B81B2201/018 ,  B81B2201/032 ,  B81B2201/054 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H2061/008 ,  H02N10/00 ,  Y10T29/49105

    摘要： A MEMS hysteretic thermal actuator may have a plurality of beams disposed over a heating element formed on the surface of the substrate. The plurality of beams may be coupled to a passive beam which is not disposed over the heating element. One of the plurality of beams may be formed in a first plane parallel to the substrate, whereas another of the plurality of beams may be formed in a second plane closer to the surface of the substrate. When the heating element is activated, it heats the plurality of beams such that they move the passive beam in a trajectory that is neither parallel to nor perpendicular to the surface of the substrate. When the beams are cooled, they may move in a different trajectory, approaching the substrate before moving laterally across it to their initial positions. By providing one electrical contact on the distal end of the passive beam and another stationary electrical contact on the substrate surface, the MEMS hysteretic actuator may form a reliable electrical switch that is relatively simple to manufacture and operate.

    摘要翻译： MEMS迟滞热致动器可以具有设置在形成在基板的表面上的加热元件上的多个光束。 多个光束可以耦合到未设置在加热元件上方的无源光束。 多个光束中的一个可以形成在平行于衬底的第一平面中，而多个光束中的另一个可以形成在靠近衬底表面的第二平面中。 当加热元件被激活时，它加热多个光束，使得它们以不平行于或垂直于衬底表面的轨迹移动被动束。 当梁被冷却时，它们可以以不同的轨迹移动，在横向移动到其初始位置之前接近基板。 通过在被动束的远端上提供一个电接触，并在衬底表面上提供另一个固定的电触点，MEMS滞后致动器可形成可靠的电开关，其制造和操作相对简单。