Optically stimulated electron emission contamination monitor and method
    13.
    发明授权
    Optically stimulated electron emission contamination monitor and method 失效
    光学刺激电子发射污染监测和方法

    公开(公告)号:US06856403B1

    公开(公告)日:2005-02-15

    申请号:US10662161

    申请日:2003-09-11

    IPC分类号: G01B9/02 G01N21/33 G01N23/227

    CPC分类号: G01N23/2273 G01N21/33

    摘要: An apparatus and method for performing quality inspections on a test surface based on optically stimulated emission of electrons. In one embodiment, the apparatus comprises a device for producing optical radiation having a plurality of different spectrum lines, selecting at least one of the spectrum lines, and directing the selected spectrum line to the test surface, and circuitry for detecting a current of photoelectrons emitted from the test surface, generating a signal indicative of photoelectron current, and for indicating a condition of quality based on the generated signal indicative of the photoelectron current. In one embodiment, the method comprises producing optical radiation having a plurality of different spectrum lines, selecting at least one of the spectrum lines and directing the selected spectrum line to the test surface, detecting a current of photoelectrons emitted from the test surface and generating a signal indicative of photoelectron current, and indicating a condition of quality based on the generated signal indicative of the photoelectron current.

    摘要翻译: 一种用于基于光激发的电子发射在测试表面上进行质量检查的装置和方法。 在一个实施例中,该装置包括用于产生具有多个不同光谱线的光辐射的装置,选择光谱线中的至少一个,并将所选择的光谱线引导到测试表面,以及用于检测发射的光电子的电流的电路 从测试表面产生指示光电子电流的信号,并且基于产生的指示光电子电流的信号来指示质量状态。 在一个实施例中,该方法包括产生具有多个不同光谱线的光辐射,选择光谱线中的至少一个并将所选择的光谱线引导到测试表面,检测从测试表面发射的光电子的电流并产生 指示光电子电流的信号,并且基于产生的指示光电子电流的信号来指示质量条件。