公开(公告)号：US5851286A

公开(公告)日：1998-12-22

申请号：US763888

申请日：1996-12-11

Applicant: Atsushi Ozaki ,  Masahiko Urano ,  Isamu Harada ,  Tomohiro Kakegawa ,  Hideki Nakano

Inventor： Atsushi Ozaki ,  Masahiko Urano ,  Isamu Harada ,  Tomohiro Kakegawa ,  Hideki Nakano

IPC: C30B15/00 ,  C30B15/14 ,  C30B35/00

CPC classification number: C30B15/14 ,  Y10S117/90 ,  Y10T117/1004 ,  Y10T117/1008

Abstract: A crystal pulling apparatus is disclosed which employs the Czochralski method. The crystal pulling apparatus is operated while a heater for heating a material melt in a crucible is controlled by the main controller of a main system. When maintenance of a heating state is disabled for some reason, a relay of a signal changeover circuit is switched so as to maintain the heating state under control of the backup controller of a backup system, thereby maintaining the material melt in a molten state. Thus, even when it becomes impossible for the main system to heat the material melt within the crucible, the material melt can be prevented from becoming solidified.

Abstract translation: 公开了采用Czochralski法的晶体拉制装置。 在通过主系统的主控制器控制用于加热坩埚中的材料熔化的加热器的同时操作晶体拉制装置。 当由于某种原因禁用加热状态的维持时，切换信号切换电路的继电器，以便在备用系统的备用控制器的控制下保持加热状态，从而将材料熔体保持在熔融状态。 因此，即使主体系不可能在坩埚内加热材料熔融物，也可以防止材料熔融变得凝固。