公开(公告)号：US07878564B2

公开(公告)日：2011-02-01

申请号：US11987482

申请日：2007-11-30

申请人： Jin-won Kang ,  Jun-young Lee ,  Jung-hyeon Kim

发明人： Jin-won Kang ,  Jun-young Lee ,  Jung-hyeon Kim

IPC分类号： B25J15/06

CPC分类号： H01L21/6838

摘要： A vacuum type pickup apparatus may include an absorption pad having an absorption inlet for contacting and/or picking up an object. A pad holder may be connected to the absorption pad. The pad holder may also have a vacuum line. A separator may be provided in the pad holder for forcibly releasing the object from the absorption inlet of the absorption pad. During the forcible release of the object, the air around the absorption pad may be drawn into the pad holder, thus reducing or preventing the potential contamination by impurities of the object as well as the equipment around the object. Also, an additional vacuum extinguisher may not be required, thus simplifying the structure of the vacuum type pickup apparatus and reducing installation costs. Furthermore, the object may be picked up and released in a relatively expedient, safe, and accurate manner, despite the suction force of the vacuum that may be maintained in the pad holder.

摘要翻译： 真空型拾取装置可以包括具有用于接触和/或拾取物体的吸收入口的吸收垫。 吸垫保持器可以连接到吸收垫。 垫座也可以具有真空管线。 可以在衬垫保持器中设置分离器，以从吸收垫的吸收入口强制地释放物体。 在物体的强制释放期间，吸收垫周围的空气可以被吸入到垫保持器中，从而减少或防止物体的杂质以及物体周围的设备的潜在污染。 此外，可以不需要附加的真空灭火器，因此简化了真空型拾取装置的结构并降低了安装成本。 此外，尽管可以在垫保持器中保持真空的吸力，但是物体可以以相对便利，安全和准确的方式被拾取和释放。