Defect inspection device and defect inspection method for inspecting whether a product has defects
    11.
    发明授权
    Defect inspection device and defect inspection method for inspecting whether a product has defects 有权
    缺陷检查装置和缺陷检查方法,用于检查产品是否有缺陷

    公开(公告)号:US08131059B2

    公开(公告)日:2012-03-06

    申请号:US12068005

    申请日:2008-01-31

    CPC classification number: G06T7/001

    Abstract: In an apparatus for photographing an image of a product to judge whether or not a defect is present, a manufacturing desirable image is formed from data acquired when the product was designed, which could be obtained if no defect was present when the product was photographed, an inspection portion where a defect may occur is selected from the formed manufacturing desirable image, a defect pattern is superimposed on the selected inspection portion so as to form a template equipped with the defect pattern. The image of the product is photographed, a template matching operation is carried out as a template having the defect pattern, and judgement is made whether or not a defect is present based upon a matched evaluation value. As a result, the judgement for judging whether or not the defect is present can be directly carried out based upon the evaluation value.

    Abstract translation: 在用于拍摄产品的图像以判断是否存在缺陷的装置中,当产品被设计时获得的数据形成制造期望的图像,如果在拍摄产品时没有存在缺陷,则可以获得, 从形成的制造期望图像中选择可能发生缺陷的检查部分,将缺陷图案叠加在所选择的检查部分上,以形成配备有缺陷图案的模板。 拍摄产品的图像,进行模板匹配操作作为具有缺陷图案的模板,并且基于匹配的评估值判断是否存在缺陷。 结果,可以基于评估值直接进行用于判断是否存在缺陷的判断。

    Apparatus, method and program product for matching with a template
    12.
    发明申请
    Apparatus, method and program product for matching with a template 有权
    用于与模板匹配的装置,方法和程序产品

    公开(公告)号:US20080205769A1

    公开(公告)日:2008-08-28

    申请号:US12010763

    申请日:2008-01-29

    CPC classification number: G06K9/6202 G06K9/685

    Abstract: A similar image having a high correlation is selected through autocorrelation performs a template original image selected from an image photographed for a template, and a difference image between the similar image and template original image is formed. An image extracting a real difference is formed by removing noises and edges in unstable areas from the difference image. This image is added to the template original image to form a modified template. Template matching is performed by using the modified template as a template. The image extracting the real reference and added to the modified template functions to add an evaluation penalty to the similar image during matching evaluation to lower an evaluation value of the similar image so that a probability of erroneously recognizing the similar image as the image to be detected.

    Abstract translation: 通过自相关选择具有高相关性的类似图像,执行从为模板拍摄的图像中选择的模板原始图像,并且形成相似图像和模板原始图像之间的差分图像。 通过从不同图像中去除不稳定区域中的噪声和边缘,形成提取真实差异的图像。 该图像被添加到模板原始图像以形成修改的模板。 通过使用修改的模板作为模板来执行模板匹配。 提取真实参考并添加到修改的模板的图像功能,以在匹配评估期间向相似图像添加评估代价以降低相似图像的评估值,使得错误地识别与要检测的图像相似的图像的概率 。

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