公开(公告)号：US20140023265A1

公开(公告)日：2014-01-23

申请号：US13981963

申请日：2011-12-07

Applicant: Masahiro Kitazawa ,  Mitsuji Ikeda ,  Yuichi Abe ,  Junichi Taguchi ,  Wataru Nagatomo

Inventor： Masahiro Kitazawa ,  Mitsuji Ikeda ,  Yuichi Abe ,  Junichi Taguchi ,  Wataru Nagatomo

IPC: G06T7/00

CPC classification number: G06T7/0004 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01L22/12

Abstract: It is an object of the present invention to provide a semiconductor inspection apparatus capable of well carrying out position alignment and correctly determining whether the position alignment has been carried out successfully or has ended in a failure without operator interventions even if an inspected image is an image having few characteristics as is the case with a repetitive pattern or the inspected image is an image having a complicated shape.The semiconductor inspection apparatus includes means for imaging a shape on a wafer or on an exposure mask; means for storing an image inspected by the imaging means; means for storing design data of the semiconductor circuit corresponding to a position on the wafer or on the exposure mask which are to be imaged by the imaging means; means for storing a design-data image obtained as a result of converting the design data into an image; means for generating a design-data ROI image by converting an interest drawing region found from a relative crude-density relation of a shape included in the design-data image into an image; and a position alignment section configured to carry out position alignment on the inspected image and the design-data image. The semiconductor inspection apparatus makes use of the design-data ROI image in order to identify a position at which the inspected image and the design-data image match each other or compute the degree of coincidence.

Abstract translation: 本发明的目的是提供一种半导体检查装置，即使被检查的图像是图像，也能够良好地执行位置对准并且正确地确定位置对准是否已经成功地执行或者在没有操作者干预的情况下已经结束 具有与重复图案的情况相同的特性，或被检查图像是具有复杂形状的图像。 半导体检查装置包括用于对晶片或曝光掩模上的形状进行成像的装置; 用于存储由成像装置检查的图像的装置; 用于存储对应于要由成像装置成像的晶片或曝光掩模上的位置的半导体电路的设计数据的装置; 用于存储作为将设计数据转换为图像而获得的设计数据图像的装置; 用于通过将从所述设计数据图像中包含的形状的相对粗密度关系中找到的兴趣绘制区域转换为图像来生成设计数据ROI图像的装置; 以及位置对准部，被配置为在被检查图像和设计数据图像上执行位置对准。 半导体检查装置利用设计数据ROI图像来识别被检查图像和设计数据图像彼此匹配的位置或计算符合度。

公开(公告)号：US08285056B2

公开(公告)日：2012-10-09

申请号：US12401848

申请日：2009-03-11

Applicant: Junichi Taguchi ,  Mitsuji Ikeda ,  Osamu Komuro ,  Akiyuki Sugiyama

Inventor： Junichi Taguchi ,  Mitsuji Ikeda ,  Osamu Komuro ,  Akiyuki Sugiyama

IPC: G06K9/46

CPC classification number: G06T7/001 ,  G06K9/6206 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: A matching degree computing apparatus is provided for comparing an input image and an object template image and computing a matching degree between an input image and an object template image based on the compared result. The computing apparatus includes a transforming unit for transforming the input image so as to be matched to the template object region and a computing unit for computing a matching degree between the transformed input image and the template image. The transforming unit provides a shaping unit for shaping a non-background region to the form of the template object region in the object corresponding region of the input image and a processing unit for arranging the non-background region contacting with the template object corresponding region so that the non-background region has no substantial impact on the matching degree in the object non-corresponding region of the input image.

Abstract translation: 提供了一种匹配度计算装置，用于比较输入图像和对象模板图像，并且基于比较结果计算输入图像和对象模板图像之间的匹配度。 计算装置包括：变换单元，用于变换输入图像以与模板对象区域匹配;以及计算单元，用于计算变换后的输入图像与模板图像之间的匹配度。 变换单元提供一个成形单元，用于将非背景区域形成为输入图像的对象对应区域中的模板对象区域的形式;以及处理单元，用于布置与模板对象对应区域接触的非背景区域 非背景区域对输入图像的对象非对应区域中的匹配度没有实质影响。

公开(公告)号：US20090232405A1

公开(公告)日：2009-09-17

申请号：US12401848

申请日：2009-03-11

Applicant: Junichi Taguchi ,  Mitsuji Ikeda ,  Osamu Komuro ,  Akiyuki Sugiyama

Inventor： Junichi Taguchi ,  Mitsuji Ikeda ,  Osamu Komuro ,  Akiyuki Sugiyama

IPC: G06K9/68

CPC classification number: G06T7/001 ,  G06K9/6206 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: A matching degree computing apparatus is provided for comparing an input image and an object template image and computing a matching degree between an input image and an object template image based on the compared result. The computing apparatus includes a transforming unit for transforming the input image so as to be matched to the template object region and a computing unit for computing a matching degree between the transformed input image and the template image. The transforming unit provides a shaping unit for shaping a non-background region to the form of the template object region in the object corresponding region of the input image and a processing unit for arranging the non-background region contacting with the template object corresponding region so that the non-background region has no substantial impact on the matching degree in the object non-corresponding region of the input image.

Abstract translation: 提供了一种匹配度计算装置，用于比较输入图像和对象模板图像，并且基于比较结果计算输入图像和对象模板图像之间的匹配度。 计算装置包括：变换单元，用于变换输入图像以与模板对象区域匹配;以及计算单元，用于计算变换后的输入图像与模板图像之间的匹配度。 变换单元提供一个成形单元，用于将非背景区域形成为输入图像的对象对应区域中的模板对象区域的形式;以及处理单元，用于布置与模板对象对应区域接触的非背景区域 非背景区域对输入图像的对象非对应区域中的匹配度没有实质影响。

公开(公告)号：US10535129B2

公开(公告)日：2020-01-14

申请号：US13981963

申请日：2011-12-07

Applicant: Masahiro Kitazawa ,  Mitsuji Ikeda ,  Yuichi Abe ,  Junichi Taguchi ,  Wataru Nagatomo

Inventor： Masahiro Kitazawa ,  Mitsuji Ikeda ,  Yuichi Abe ,  Junichi Taguchi ,  Wataru Nagatomo

IPC: G06T7/00

Abstract: It is an object of the present invention to provide a semiconductor inspection apparatus capable of well carrying out position alignment and correctly determining whether the position alignment has been carried out successfully or has ended in a failure without operator interventions even if an inspected image is an image having few characteristics as is the case with a repetitive pattern or the inspected image is an image having a complicated shape.The semiconductor inspection apparatus includes means for imaging a shape on a wafer or on an exposure mask; means for storing an image inspected by the imaging means; means for storing design data of the semiconductor circuit corresponding to a position on the wafer or on the exposure mask which are to be imaged by the imaging means; means for storing a design-data image obtained as a result of converting the design data into an image; means for generating a design-data ROI image by converting an interest drawing region found from a relative crude-density relation of a shape included in the design-data image into an image; and a position alignment section configured to carry out position alignment on the inspected image and the design-data image. The semiconductor inspection apparatus makes use of the design-data ROI image in order to identify a position at which the inspected image and the design-data image match each other or compute the degree of coincidence.

公开(公告)号：US20080205769A1

公开(公告)日：2008-08-28

申请号：US12010763

申请日：2008-01-29

Applicant: Junichi Taguchi ,  Mitsuji Ikeda

Inventor： Junichi Taguchi ,  Mitsuji Ikeda

IPC: G06K9/62

CPC classification number: G06K9/6202 ,  G06K9/685

Abstract: A similar image having a high correlation is selected through autocorrelation performs a template original image selected from an image photographed for a template, and a difference image between the similar image and template original image is formed. An image extracting a real difference is formed by removing noises and edges in unstable areas from the difference image. This image is added to the template original image to form a modified template. Template matching is performed by using the modified template as a template. The image extracting the real reference and added to the modified template functions to add an evaluation penalty to the similar image during matching evaluation to lower an evaluation value of the similar image so that a probability of erroneously recognizing the similar image as the image to be detected.

Abstract translation: 通过自相关选择具有高相关性的类似图像，执行从为模板拍摄的图像中选择的模板原始图像，并且形成相似图像和模板原始图像之间的差分图像。 通过从不同图像中去除不稳定区域中的噪声和边缘，形成提取真实差异的图像。 该图像被添加到模板原始图像以形成修改的模板。 通过使用修改的模板作为模板来执行模板匹配。 提取真实参考并添加到修改的模板的图像功能，以在匹配评估期间向相似图像添加评估代价以降低相似图像的评估值，使得错误地识别与要检测的图像相似的图像的概率 。

公开(公告)号：US08019164B2

公开(公告)日：2011-09-13

申请号：US12010763

申请日：2008-01-29

Applicant: Junichi Taguchi ,  Mitsuji Ikeda

Inventor： Junichi Taguchi ,  Mitsuji Ikeda

IPC: G06K9/68

CPC classification number: G06K9/6202 ,  G06K9/685

Abstract: A similar image having a high correlation is selected through autocorrelation performs a template original image selected from an image photographed for a template, and a difference image between the similar image and template original image is formed. An image extracting a real difference is formed by removing noises and edges in unstable areas from the difference image. This image is added to the template original image to form a modified template. Template matching is performed by using the modified template as a template. The image extracting the real reference and added to the modified template functions to add an evaluation penalty to the similar image during matching evaluation to lower an evaluation value of the similar image so that a probability of erroneously recognizing the similar image as the image to be detected.

Abstract translation: 通过自相关选择具有高相关性的类似图像，执行从为模板拍摄的图像中选择的模板原始图像，并且形成相似图像和模板原始图像之间的差分图像。 通过从不同图像中去除不稳定区域中的噪声和边缘，形成提取真实差异的图像。 该图像被添加到模板原始图像以形成修改的模板。 通过使用修改的模板作为模板来执行模板匹配。 提取真实参考并添加到修改的模板的图像功能，以在匹配评估期间向相似图像添加评估代价以降低相似图像的评估值，使得错误地识别与要检测的图像相似的图像的概率 。

公开(公告)号：US20080310702A1

公开(公告)日：2008-12-18

申请号：US12068005

申请日：2008-01-31

Applicant: Junichi Taguchi ,  Takumichi Sutani

Inventor： Junichi Taguchi ,  Takumichi Sutani

IPC: G06K9/00

CPC classification number: G06T7/001

Abstract: In an apparatus for photographing an image of a product to judge whether or not a defect is present, a manufacturing desirable image is formed from data acquired when the product was designed, which could be obtained if no defect was present when the product was photographed, an inspection portion where a defect may occur is selected from the formed manufacturing desirable image, a defect pattern is superimposed on the selected inspection portion so as to form a template equipped with the defect pattern. The image of the product is photographed, a template matching operation is carried out as a template having the defect pattern, and judgement is made whether or not a defect is present based upon a matched evaluation value. As a result, the judgement for judging whether or not the defect is present can be directly carried out based upon the evaluation value.

Abstract translation: 在用于拍摄产品的图像以判断是否存在缺陷的装置中，当产品被设计时获得的数据形成制造期望的图像，如果在拍摄产品时没有存在缺陷，则可以获得， 从形成的制造期望图像中选择可能发生缺陷的检查部分，将缺陷图案叠加在所选择的检查部分上，以形成配备有缺陷图案的模板。 拍摄产品的图像，进行模板匹配操作作为具有缺陷图案的模板，并且基于匹配的评估值判断是否存在缺陷。 结果，可以基于评估值直接进行用于判断是否存在缺陷的判断。

公开(公告)号：US06826291B2

公开(公告)日：2004-11-30

申请号：US10073010

申请日：2002-02-12

Applicant: Hiroshi Yoshiura ,  Isao Echizen ,  Junichi Taguchi ,  Akira Maeda ,  Takao Arai ,  Toshifumi Takeuchi

Inventor： Hiroshi Yoshiura ,  Isao Echizen ,  Junichi Taguchi ,  Akira Maeda ,  Takao Arai ,  Toshifumi Takeuchi

IPC: G06K900

CPC classification number: H04N19/00 ,  G06T1/0028 ,  G06T1/005 ,  G06T1/0071 ,  G06T2201/0051 ,  H04N1/32203 ,  H04N1/32208 ,  H04N1/32229 ,  H04N1/32251 ,  H04N1/32288 ,  H04N19/467 ,  H04N21/23892 ,  H04N21/8358

Abstract: A method of embedding information into contents includes a changeable range calculating step of obtaining a range where value change of the contents is imperceptible to the human being and a step of embedding information by changing the values of the contents within the changeable range.

Abstract translation: 将信息嵌入到内容中的方法包括：可变范围计算步骤，用于获得内容的值改变对人类不了解的范围，以及通过改变可变范围内的内容的值来嵌入信息的步骤。

公开(公告)号：US5929637A

公开(公告)日：1999-07-27

申请号：US798343

申请日：1997-02-10

Applicant: Junichi Taguchi ,  Shigeru Watanabe ,  Koichi Sano

Inventor： Junichi Taguchi ,  Shigeru Watanabe ,  Koichi Sano

IPC: G01P5/18 ,  A61B5/055 ,  G01R33/48 ,  G01R33/54 ,  G01R33/563 ,  G06T1/00 ,  G01V3/00

CPC classification number: G01R33/56308 ,  G01R33/56316

Abstract: The present invention intends to easily perform arithmetic operations for determining flow velocities without making phase correction and to reduce the aliasing error. To this end, a plurality of data pieces having phase sensitivity are measured using phase contrast pulse sequences in a magnetic resonance diagnostic apparatus. When four data pieces having phase sensitivity of tetrahedral type are acquired, four measured images are obtained. Individual measured images have vector values at corresponding points. Predetermined pair images are subjected to an arithmetic operation for determining an angle between two vectors at individual points on the images, the thus obtained phase images are added and a sum image is multiplied by a suitable coefficient to produce an x-direction flow velocity image. Flow velocity images in y and z directions are similarly obtained and images determining the magnitudes of flow velocities can also be produced.

Abstract translation: 本发明意图容易地执行用于确定流速的算术运算，而不进行相位校正并减少混叠误差。 为此，使用磁共振诊断装置中的相位脉冲序列来测量具有相位敏感度的多个数据。 当获得具有四面体型相位灵敏度的四个数据时，获得四个测量图像。 单个测量图像在对应点具有向量值。 对预定的对图像进行用于确定图像上各个点的两个矢量之间的角度的算术运算，将如此获得的相位图像相加，并且求和图像乘以合适的系数以产生x方向流速图像。 类似地获得y和z方向上的流速图像，也可以产生确定流速大小的图像。

公开(公告)号：US08131059B2

公开(公告)日：2012-03-06

申请号：US12068005

申请日：2008-01-31

Applicant: Junichi Taguchi ,  Takumichi Sutani

Inventor： Junichi Taguchi ,  Takumichi Sutani

IPC: G06K9/62

CPC classification number: G06T7/001

Abstract: In an apparatus for photographing an image of a product to judge whether or not a defect is present, a manufacturing desirable image is formed from data acquired when the product was designed, which could be obtained if no defect was present when the product was photographed, an inspection portion where a defect may occur is selected from the formed manufacturing desirable image, a defect pattern is superimposed on the selected inspection portion so as to form a template equipped with the defect pattern. The image of the product is photographed, a template matching operation is carried out as a template having the defect pattern, and judgement is made whether or not a defect is present based upon a matched evaluation value. As a result, the judgement for judging whether or not the defect is present can be directly carried out based upon the evaluation value.

Abstract translation: 在用于拍摄产品的图像以判断是否存在缺陷的装置中，当产品被设计时获得的数据形成制造期望的图像，如果在拍摄产品时没有存在缺陷，则可以获得， 从形成的制造期望图像中选择可能发生缺陷的检查部分，将缺陷图案叠加在所选择的检查部分上，以形成配备有缺陷图案的模板。 拍摄产品的图像，进行模板匹配操作作为具有缺陷图案的模板，并且基于匹配的评估值判断是否存在缺陷。 结果，可以基于评估值直接进行用于判断是否存在缺陷的判断。