摘要:
A substrate having flatness of less than 230 nmPV and surface roughness at RMS of less than 0.20 nm. is obtained by a method comprising: a process of polishing an object to be polished with a polishing pad comprising at least one layer having compressibility of 5% or below in a base layer of the polishing pad.
摘要:
Glass-ceramics includes Li2O, Al2O3 and SiO2, have an average crystal grain diameter of a predominant crystal phase of 90 nm or below and have crystal grain diameter distribution of 20 nm or below. The glass-ceramics can be manufactured by heat treating glass comprising Li2O, Al2O3 and SiO2 under a temperature within a range from 650° C. to 750° C. and then further heat treating the glass under a temperature within a range from 700° C. to 800° C. for 100-200 hours.
摘要翻译:玻璃陶瓷包括Li 2 O,Al 2 O 3和SiO 2,其主晶相的平均晶粒直径为90nm以下,晶粒直径分布为20nm以下。 玻璃陶瓷可以通过在650℃至750℃的温度范围内热处理包含Li 2 O,Al 2 O 3和SiO 2的玻璃来制造,然后在700℃以下的温度下进一步热处理玻璃 至800℃,持续100-200小时。
摘要:
An information storage disk holding member for holding an information storage disk in position in an information storage disk drive device, the holding member being made of glass-ceramics in which a crystal phase is dispersed in a glass matrix. The holding member has specific rigidity (Young's modulus/specific gravity) of not greater than 37 GPa, specific gravity of not greater than 3.0, coefficient of thermal expansion within a range from −50° C. to +70° C. which is within a range from +35×10−7/° C. to +130×10−7/° C., Young's modulus within a range from 95 GPa to 130 GPa, specific gravity within a range from 2.40 to 2.60 and bending strength within a range from 400 MPa to 800 MPa. There is provided an information storage disk holding member which is capable of coping with a high speed rotation of a disk in conformity with tendencies toward high speed transmission of information, increasing mechanical strength for adaptation to mobile uses, having a thermal expansion property matching that of other drive component parts and eliminating defects caused by solving out of alkali. There is also provided an information storage disk drive device using this holding member.