公开(公告)号：US20070262271A1

公开(公告)日：2007-11-15

申请号：US11432977

申请日：2006-05-12

Applicant: Joseph Ferrara ,  Patrick Splinter ,  Michael Graf ,  Victor Benveniste

Inventor： Joseph Ferrara ,  Patrick Splinter ,  Michael Graf ,  Victor Benveniste

IPC: H01J37/317

CPC classification number: H01J37/3171 ,  H01J37/16 ,  H01J2237/0822 ,  H01J2237/20 ,  H01J2237/244 ,  H01L21/26513 ,  H01L21/26566 ,  H01L21/67213

Abstract: An ion implantation cluster tool for implanting ions into a workpiece is provided, wherein a plurality of beamline assemblies having a respective plurality of ion beamlines associated therewith are positioned about a common process chamber. Each of the plurality of ion beamline assemblies are selectively isolated from the common process chamber, and the plurality of beamline intersect at a processing region of the process chamber. A scanning apparatus positioned within the common process chamber is operable to selectively translate a workpiece holder in one or more directions through each of the plurality of ion beamlines within the processing region, and a common dosimetry apparatus within the common process chamber is operable to measure one or more properties of each of the plurality of ion beamlines. A load lock chamber is operably coupled to the common process chamber for exchange of workpieces between the common process chamber and an external environment.

Abstract translation: 提供了用于将离子注入到工件中的离子注入簇工具，其中具有与其相关联的多个离子束线的多个束线组件围绕公共处理室定位。 多个离子束线组件中的每一个与公共处理室选择性地隔离，并且多个束线在处理室的处理区域相交。 定位在公共处理室内的扫描设备可操作以选择性地将工件保持器在一个或多个方向上通过处理区域内的多个离子束线中的每一个，并且公共处理室内的常见剂量测量装置可操作以测量一个 或更多的多个离子束线中的每一个的性质。 负载锁定室可操作地联接到公共处理室，用于在公共处理室和外部环境之间交换工件。