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1.发明申请公开(公告)号：US20190013177A1
公开(公告)日：2019-01-10
申请号：US15753685
申请日：2015-08-21
发明人： Yusuke OMINAMI , Akiko HISADA
IPC分类号： H01J37/16 , H01J37/28 , H01J37/20 , H01J37/244
CPC分类号： H01J37/16 , H01J37/20 , H01J37/244 , H01J37/28 , H01J2237/1825 , H01J2237/2003 , H01J2237/2007
摘要： In order to observe a water-containing sample with excellent convenience under an air atmosphere or a gas atmosphere, or under a desired pressure, in the present invention, there is provided an observation support unit for observation by irradiating the sample disposed in a non-vacuum space separated by a diaphragm from an inner space of a charged particle optical lens barrel that generates a charged particle beam, with the charged particle beam. The observation support unit includes a main body portion for covering a hole portion that forms an observation region where the sample is observed, and the sample, and the observation support unit is directly mounted between the sample and the diaphragm, that is, on the sample.
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2.发明授权公开(公告)号：US10043633B2
公开(公告)日：2018-08-07
申请号：US14994724
申请日：2016-01-13
申请人： PROTOCHIPS, INC.
CPC分类号： H01J37/20 , H01J37/16 , H01J37/18 , H01J37/26 , H01J37/29 , H01J37/30 , H01J2237/2002 , H01J2237/2003 , H01J2237/2007
摘要： A novel sample holder for specimen support devices for insertion in electron microscopes. The novel sample holder of the invention allows for the introduction of gases or liquids to specimens for in situ imaging, as well as electrical contacts for electrochemical or thermal experiments.
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公开(公告)号：US10008361B2
公开(公告)日：2018-06-26
申请号：US15318455
申请日：2016-03-04
发明人： Shuhei Yabu , Naoto Koga , Mitsuo Akatsu , Isao Takahira , Shinichi Tomita , Hiroyuki Noda , Ai Masuda
IPC分类号： H01J37/26 , G21K5/00 , H01J37/16 , H01J37/248
CPC分类号： H01J37/16 , H01J37/248 , H01J37/26 , H01J37/28 , H01J2237/2813
摘要： Provided is a charged particle beam device that is small, high performance, and easy to transport. A charged particle beam device (100) is provided with a detachable body unit (15) and an auxiliary unit (14), the body unit (15) housing a functional unit related to charged particle beams, and the auxiliary unit (14) housing a power source unit (9).
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公开(公告)号：US20180169290A1
公开(公告)日：2018-06-21
申请号：US15896395
申请日：2018-02-14
IPC分类号： A61L9/22 , H01T23/00 , H01J37/30 , B01D46/00 , H01J37/16 , H01J37/08 , H01J27/02 , F24F3/16 , F16M13/02 , F02M35/02 , F02M27/04 , F01N3/08 , B03C3/82 , B03C3/41 , B03C3/155 , B03C3/04 , B03C3/011 , B01D46/52
CPC分类号： A61L9/22 , A61L2209/16 , B01D46/0032 , B01D46/521 , B03C3/011 , B03C3/04 , B03C3/155 , B03C3/41 , B03C3/82 , F01N3/0892 , F02M27/04 , F02M27/042 , F02M35/0205 , F02M35/0217 , F16M13/02 , F24F3/166 , F24F2003/1682 , H01J27/022 , H01J27/028 , H01J37/08 , H01J37/16 , H01J37/3002 , H01T23/00
摘要： The present invention provides methods and systems for an ion generator mounting device for application of bipolar ionization to airflow within a conduit, the device includes a housing for mounting to the conduit having an internal panel within the enclosure, and an arm extending from the housing for extension into the conduit and containing at least one opening. At least one coupling for mounting an ion generator to the arm oriented with an axis extending between a pair of electrodes of the ion generator being generally perpendicular to a flow direction of the airflow within the conduit.
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5.发明授权公开(公告)号：US09972474B2
公开(公告)日：2018-05-15
申请号：US15224628
申请日：2016-07-31
申请人： FEI Company
IPC分类号： H01J37/00 , H01J37/244 , H01J37/16 , H01J37/18 , H01J37/20 , G01N23/225 , H01J37/26
CPC分类号： H01J37/244 , G01N23/203 , G01N23/2252 , H01J37/16 , H01J37/18 , H01J37/20 , H01J37/26 , H01J2237/164 , H01J2237/2442 , H01J2237/24475 , H01J2237/2448 , H01J2237/24578 , H01J2237/2807
摘要： An electron microscope including a vacuum chamber for containing a specimen to be analyzed, an optics column, including an electron source and a final probe forming lens, for focusing electrons emitted from the electron source, a specimen stage positioned in the vacuum chamber under the probe forming lens for holding the specimen, and multiple x-ray detectors positioned within the vacuum chamber, at different takeoff angles with respect to the sample's x-ray emission position in the chamber. Takeoff angles are provided to improve the counting efficiency of the various sensors. Multiple detectors of different types may be supported within the vacuum chamber on a mechanical support system, which may be adjustable. A method includes operating the sensors to optimize the time required for accurate x-ray counting by gathering data at the multiple takeoff angles.
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公开(公告)号：US20180122617A1
公开(公告)日：2018-05-03
申请号：US15855370
申请日：2017-12-27
发明人： Shinsuke KAWANISHI , Yusuke OMINAMI
CPC分类号： H01J37/18 , H01J37/16 , H01J37/28 , H01J2237/0213 , H01J2237/022 , H01J2237/164 , H01J2237/182 , H01J2237/2605
摘要： In a scanning electron microscope, an atmospheric pressure space having a specimen arranged therein and a vacuum space arranged on a charged particle optical system side are isolated from each other using an isolation film that transmits charged particle beams. The scanning electron microscope has an electron optical lens barrel, a chassis, and an isolation film. The electron optical lens barrel radiates a primary electron beam onto a specimen. The chassis is directly bonded to the inside of the electron optical lens barrel and has an inside that turns into a lower vacuum state than the inside of the electron optical lens barrel at least during the radiation of the primary electron beam. The isolation film isolates a space in an atmospheric pressure atmosphere having a specimen mounted therein and the inside of the chassis in a lower vacuum state, and transmits the primary charged particle beam.
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公开(公告)号：US09939728B2
公开(公告)日：2018-04-10
申请号：US14344067
申请日：2012-09-12
IPC分类号： H01J37/16 , H01J37/18 , H01J37/24 , G03F7/20 , H01L21/67 , H01J37/317 , B82Y10/00 , B82Y40/00 , G01N21/88 , H01J37/20 , H01J37/26
CPC分类号： G03F7/2014 , B82Y10/00 , B82Y40/00 , G01N21/88 , G01N2201/022 , G03F7/70841 , G03F7/7085 , H01J37/16 , H01J37/18 , H01J37/20 , H01J37/24 , H01J37/261 , H01J37/3174 , H01J37/3177 , H01J2237/28 , H01L21/6719
摘要： A target processing machine (100), such as a lithography or inspection machine, comprising a rigid base plate (150), a projection column (101) for projecting one or more optical or particle beams on to a target (130), a support frame (102) supporting the projection column, the support frame being supported by and fixed to the base plate, a stage comprising a movable part (128) for carrying the target and a fixed part (132, 133) being supported by and fixed to the base plate, a beam sensor (160) for detecting one or more of the beams projected by the column, the beam sensor at least in part being supported by and fixed to the base plate, and a vacuum chamber (110) enclosing the support frame and the column, for maintaining a vacuum environment in the interior space of the chamber, the vacuum chamber formed with the base plate forming part thereof, and supporting a plurality of wall panels (171, 172) including a plurality of side wall panels (171) supported by and fixed thereto.
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公开(公告)号：US20170348687A1
公开(公告)日：2017-12-07
申请号：US15611564
申请日：2017-06-01
CPC分类号： B01L3/50273 , B01L3/502707 , B01L9/00 , B01L2200/12 , B01L2300/046 , B01L2300/06 , B01L2300/0609 , B01L2300/0681 , B01L2300/0867 , B01L2300/0887 , B01L2300/0896 , B01L2400/0415 , G01N1/28 , G01N23/02 , G01N23/04 , G01N23/2251 , G01N27/4473 , G01N27/44791 , G01N35/0099 , G01N2223/307 , G01N2223/418 , G01N2223/638 , H01J37/16 , H01L21/3065 , H01L21/31122 , H01L21/47573 , H01L2924/1067
摘要： A fluid sampler includes: a sample cell that includes: a substrate comprising: a first port; a second port in fluid communication with the first port; a viewing reservoir in fluid communication with the first port and the second port and that receives the fluid from the first port and communicates the fluid to the second port, the viewing reservoir including: a first view membrane; a second view membrane; and a pillar interposed between the first view membrane and second view membrane, the pillar separating the first view membrane from the second view membrane at a substantially constant separation distance such that a volume of the viewing reservoir is substantially constant and invariable with respect to a temperature and invariable with respect to a pressure to which the sample cell is subjected.
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公开(公告)号：US20170348686A1
公开(公告)日：2017-12-07
申请号：US15611557
申请日：2017-06-01
CPC分类号： B01L3/50273 , B01L3/502707 , B01L9/00 , B01L2200/12 , B01L2300/046 , B01L2300/06 , B01L2300/0609 , B01L2300/0681 , B01L2300/0867 , B01L2300/0887 , B01L2300/0896 , B01L2400/0415 , G01N1/28 , G01N23/02 , G01N23/04 , G01N23/2251 , G01N27/4473 , G01N27/44791 , G01N35/0099 , G01N2223/307 , G01N2223/418 , G01N2223/638 , H01J37/16 , H01L21/3065 , H01L21/31122 , H01L21/47573 , H01L2924/1067
摘要： A fluid sampler includes: a sample cell that includes: a substrate comprising: a first port; a second port in fluid communication with the first port; a viewing reservoir in fluid communication with the first port and the second port and that receives the fluid from the first port and communicates the fluid to the second port, the viewing reservoir including : a first view membrane; a second view membrane; and a pillar interposed between the first view membrane and second view membrane, the pillar separating the first view membrane from the second view membrane at a substantially constant separation distance such that a volume of the viewing reservoir is substantially constant and invariable with respect to a temperature and invariable with respect to a pressure to which the sample cell is subjected.
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10.发明授权公开(公告)号：US09818578B2
公开(公告)日：2017-11-14
申请号：US14626234
申请日：2015-02-19
申请人： PROTOCHIPS, INC.
发明人： Daniel Stephen Gardiner , William Bradford Carpenter , John Damiano, Jr. , Franklin Stampley Walden, II , David P. Nackashi
IPC分类号： G01L7/00 , G01N21/03 , G01K11/32 , H01J37/26 , H01J37/16 , G01L11/02 , H01J37/20 , G01L19/04
CPC分类号： H01J37/261 , G01K11/32 , G01L11/025 , G01L19/04 , H01J37/16 , H01J37/20 , H01J37/3178 , H01J2237/2001 , H01J2237/2002 , H01J2237/2801
摘要： An apparatus and a method for measuring and monitoring the properties of a fluid, for example, pressure, temperature, and chemical properties, within a sample holder for an electron microscope. The apparatus includes at least one fiber optic sensor used for measuring temperature and/or pressure and/or pH positioned in proximity of the sample.
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