公开(公告)号：US08314389B2

公开(公告)日：2012-11-20

申请号：US12975248

申请日：2010-12-21

Applicant: Yu-An Lin

Inventor： Yu-An Lin

IPC: G01J5/00

CPC classification number: G01B21/04 ,  G01M11/0221

Abstract: A measuring instrument includes a housing, a number of infrared light emitting devices, a number of infrared light receiving devices, at least two light sources, and a controller. The housing includes a first sidewall and a second sidewall substantially parallel to the first sidewall. The infrared light emitting devices are positioned on the first sidewall. The infrared light receiving devices are positioned on the second sidewall and receive infrared lights emitted by the infrared light emitting devices. The controller is electrically coupled to the infrared light receiving devices and the light sources. When one of the infrared light receiving devices does not receive infrared light emitted by a corresponding infrared light emitting device, the controller turns the light sources on.

Abstract translation: 测量仪器包括壳体，多个红外发光装置，多个红外光接收装置，至少两个光源和控制器。 壳体包括基本上平行于第一侧壁的第一侧壁和第二侧壁。 红外发光装置位于第一侧壁上。 红外光接收装置位于第二侧壁上并且接收由红外发光装置发射的红外光。 控制器电耦合到红外光接收装置和光源。 当其中一个红外光接收装置没有接收到由相应的红外发光装置发射的红外光时，控制器打开光源。

公开(公告)号：US20120044588A1

公开(公告)日：2012-02-23

申请号：US12958399

申请日：2010-12-02

Applicant: YU-AN LIN

Inventor： YU-AN LIN

IPC: G02B11/02 ,  G02B3/00

CPC classification number: G02B7/021 ,  G02B3/02 ,  G02B7/022

Abstract: An optical lens includes a central optical portion and a peripheral portion surrounding the optical portion. The peripheral portion includes a first step surface, a second step surface, and a first connecting surface interconnecting the first step surface and the second step surface. The first step surface is adjacent to the optical portion. The second step surface has a circular groove formed therein, and the circular groove is adjacent to the first connecting surface. A lens assembly including the optical lens is also provided.

Abstract translation: 光学透镜包括中心光学部分和围绕光学部分的周边部分。 周边部分包括第一台阶表面，第二台阶表面和互连第一台阶表面和第二台阶表面的第一连接表面。 第一台阶表面与光学部分相邻。 第二台阶表面上形成有圆形槽，圆形槽与第一连接表面相邻。 还提供了包括光学透镜的透镜组件。

公开(公告)号：US06711956B2

公开(公告)日：2004-03-30

申请号：US09984903

申请日：2001-10-31

Applicant: Yu-An Lin ,  Long-Wen Lin ,  Wen-Cheng Lai ,  Chang-Ping Lin

Inventor： Yu-An Lin ,  Long-Wen Lin ,  Wen-Cheng Lai ,  Chang-Ping Lin

IPC: G01L700

CPC classification number: H01L21/67253 ,  G05D16/2013 ,  Y10T137/7761

Abstract: In accordance with the present invention, an apparatus and a method for regulating exhaust pressure in an evacuation system of a semiconductor process chamber are provided. The method comprises steps of generating a first pressure in the semiconductor process chamber with the evacuation system, monitoring the first pressure to generate a first signal, determining a set point for the exhaust pressure responsive to the first signal, and regulating the exhaust pressure by a controller till reaching the set point. The key aspect of the present invention is to maintain the equilibrium of the chamber pressure and the exhaust pressure by implementing an exhaust controller to control the gas flow rate introduced into the evacuation system. In other words, when the chamber pressure is increased, the gas is introduced into the evacuation system at an increased flow rate. On the other hand, when the chamber pressure is decreased, the gas is introduced into the evacuation system at a decreased flow rate. The dynamic control over the gas introduced into the evacuation system advantageously increase the speed of response during the changes of chamber pressure, as well as active control of the chamber pressure in place of moving the throttle valve. Thus, by minimizing the movement of throttle valve, the chances of particulate contamination of the process are greatly reduced.

Abstract translation: 根据本发明，提供一种用于调节半导体处理室的抽空系统中的排气压力的装置和方法。 该方法包括以下步骤：在具有排气系统的半导体处理室中产生第一压力，监测第一压力以产生第一信号，响应于第一信号确定用于排气压力的设定点，并且将排气压力调节为 控制器达到设定点。 本发明的关键方面是通过实施排气控制器来控制引入抽空系统的气体流量来保持腔室压力和排气压力的平衡。 换句话说，当腔室压力增加时，气体以增加的流速被引入抽空系统。 另一方面，当腔室压力降低时，以降低的流量将气体引入抽空系统。 引入抽空系统的气体的动态控制有利地增加了腔室压力变化期间的响应速度，以及主动地控制腔室压力以代替移动节流阀。 因此，通过最小化节流阀的运动，该方法的微粒污染的机会大大降低。

公开(公告)号：US5469811A

公开(公告)日：1995-11-28

申请号：US248683

申请日：1994-05-25

Applicant: Yu-An Lin

Inventor： Yu-An Lin

IPC: A01K63/04 ,  A01K63/00

CPC classification number: A01K63/042

Abstract: The present invention relates to an improved leak-proof device for a bubbling port of an aquarium comprising a water tank, a base cover and a base disc, the water tank having a bubbling port on the bottom, and an exhaust outlet setting with a check valve. The base cover has an integrally molded communication connector, and on top of the connector, a check valve. The base disc has an air pump with a connected conduit. With the assembly of these members, air produced from the air pump may enter water tank for bubbling, and because of the check valve and related devices on the water tank and base cover, the bubbling port on the base, of the water tank has double leak-proof effect.

Abstract translation: 本发明涉及一种用于水族箱的起泡口的改进的防漏装置，其包括水箱，底盖和底盘，所述水箱在底部具有起泡口，排气出口设置有支架 阀。 底盖具有一体模制的通信连接器，并且在连接器的顶部具有止回阀。 底盘具有带有连接导管的气泵。 通过这些构件的组装，从气泵产生的空气可以进入水箱进行冒泡，并且由于水箱和底盖上的止回阀和相关装置，水箱底座上的起泡口具有双重的 防漏效果。