公开(公告)号：US06298806B1

公开(公告)日：2001-10-09

申请号：US09446980

申请日：2000-02-29

Applicant: Michel Moisan ,  Zenon Zakrzewski ,  Roxane Etemadi ,  Jean-Christophe Rostaing

Inventor： Michel Moisan ,  Zenon Zakrzewski ,  Roxane Etemadi ,  Jean-Christophe Rostaing

IPC: C23C1600

CPC classification number: H01J37/32192 ,  H01J37/32229 ,  H05H1/46

Abstract: The invention concerns a device for exciting a gas comprising a hollow structure (24) forming a waveguide to be connected to a microwave generator and means for circulating a gas through the structure. The gas circulating means comprise an assembly of at least two hollow tubes (46, 48) made of dielectric material respectively passing through said structure (24) in the zones wherein the amplitude of the electric field associated with the incident wave is substantially the same.

Abstract translation: 本发明涉及一种用于激发气体的装置，该装置包括形成要连接到微波发生器的波导管的中空结构（24）和用于使气体循环通过结构的装置。 气体循环装置包括由介电材料制成的至少两个中空管（46,48）的组件，分别穿过所述结构（24），其中与入射波相关联的电场的振幅基本相同。