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公开(公告)号：US06298806B1
公开(公告)日：2001-10-09
申请号：US09446980
申请日：2000-02-29
IPC分类号： C23C1600
CPC分类号： H01J37/32192 , H01J37/32229 , H05H1/46
摘要： The invention concerns a device for exciting a gas comprising a hollow structure (24) forming a waveguide to be connected to a microwave generator and means for circulating a gas through the structure. The gas circulating means comprise an assembly of at least two hollow tubes (46, 48) made of dielectric material respectively passing through said structure (24) in the zones wherein the amplitude of the electric field associated with the incident wave is substantially the same.
摘要翻译： 本发明涉及一种用于激发气体的装置，该装置包括形成要连接到微波发生器的波导管的中空结构（24）和用于使气体循环通过结构的装置。 气体循环装置包括由介电材料制成的至少两个中空管（46,48）的组件，分别穿过所述结构（24），其中与入射波相关联的电场的振幅基本相同。
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2.发明授权Section of pipe for a gas treatment device and device incorporating such a section of pipe 失效用于气体处理装置和装有这种管道的装置的管道部分公开(公告)号：US06541917B1
公开(公告)日：2003-04-01
申请号：US09461044
申请日：1999-12-15
IPC分类号： H01J724
CPC分类号： H01J37/32192 , H01J37/32522 , H05H1/46
摘要： A section of pipe, for a device for treating a gas by exciting the latter by way of incident microwave radiation suitable for producing a surface-wave plasma in the gas, including a discharge tube made of dielectric material intended to pass through the device in a region for concentrating the incident radiation. The tube comprises, over at least part of its length, a double wall.
摘要翻译： 管道的一部分，用于通过用于在气体中产生表面波等离子体的入射微波辐射来激励气体的装置，包括由介电材料制成的放电管，该放电管旨在通过装置 用于集中事件辐射的区域。 该管在其至少部分长度上包括双壁。
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3.发明授权Device for exciting a gas by a surface wave plasma and gas treatment apparatus incorporating such a device 失效用于通过包括这种装置的表面波等离子体和气体处理装置激发气体的装置公开(公告)号：US06224836B1
公开(公告)日：2001-05-01
申请号：US09066653
申请日：1998-04-27
IPC分类号： B01J1908
CPC分类号： H05H1/46
摘要： Device for exciting a gas comprising a hollow structure forming a waveguide, made of an electrically conductive material, connected to a microwave generator and including a passage for a hollow dielectric tube adapted for flow of the gas to be excited, the hollow structure further including a wave-concentrating region designed to concentrate microwave radiation produced by the generator onto the tube, during operation of the device, for the purpose of producing a surface wave plasma in the gas, at least one electromagnetic screening sleeve made of a conductive material, fastened to the hollow structure and extending along the extension of the passage so as to surround the hollow tube.
摘要翻译： 用于激发包括形成由导电材料制成的波导的中空结构的气体的装置，其连接到微波发生器并且包括适于待被激发的气体流动的中空介电管的通道，所述中空结构还包括 波集中区，设计用于将由发生器产生的微波辐射集中到管上，在器件的操作期间，用于在气体中产生表面波等离子体，至少一个由导电材料制成的电磁屏蔽套，固定到 中空结构并沿着通道的延伸部延伸以围绕中空管。
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