公开(公告)号：US20170140970A1

公开(公告)日：2017-05-18

申请号：US14944018

申请日：2015-11-17

Applicant: Applied Materials, Inc.

Inventor： Wendell Glenn Boyd, JR. ,  Vijay D. Parkhe ,  Teng-Fang Kuo ,  Zhenwen Ding

IPC: H01L21/683 ,  C03C17/00

CPC classification number: H01L21/6833 ,  C03C17/00 ,  H01L21/6875 ,  H01L21/68757

Abstract: A method of manufacturing an electrostatic chuck includes polishing a surface of a ceramic body of the electrostatic chuck to produce a polished surface and depositing a ceramic coating onto the polished surface of the ceramic body to produce a coated ceramic body. The method further includes disposing a mask over the coated ceramic coating, the mask comprising a plurality of elliptical holes and depositing a ceramic material through the plurality of elliptical holes of the mask to form a plurality of elliptical mesas on the coated ceramic body, wherein the plurality of elliptical mesas have rounded edges. The mask is then removed from the coated ceramic body and the plurality of elliptical mesas are polished.