公开(公告)号：US10770336B2

公开(公告)日：2020-09-08

申请号：US15672096

申请日：2017-08-08

Applicant: ASM IP Holding B.V.

Inventor： Eric Hill ,  John DiSanto

IPC: H01L21/687 ,  H01L21/67 ,  C23C16/458 ,  C30B25/08 ,  C30B25/12

Abstract: A substrate support assembly suitable for use in a reactor including a common processing and substrate transfer region is disclosed. The substrate support assembly includes a susceptor and one or more lift pins that can be used to lower a substrate onto a surface of the susceptor and raise the substrate from the surface, to allow transfer of the substrate from the processing region, without raising or lowering the susceptor.