公开(公告)号：US20190036405A1

公开(公告)日：2019-01-31

申请号：US16073258

申请日：2017-01-05

Applicant: ASML Netherlands B.V.

Inventor： Maarten Hartger Kimman ,  Dave Braaksma ,  Peter Michel Silvester Maria Heijmans ,  Christiaan Alexander Hoogendam

IPC: H02K3/28 ,  H02K41/03

Abstract: An electromagnetic motor is described, the electromagnetic motor comprising: a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction; a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.