公开(公告)号：US20190033242A1

公开(公告)日：2019-01-31

申请号：US16048139

申请日：2018-07-27

Applicant: Apple Inc.

Inventor： Paulo S. MOTTA ,  Roberto M. RIBEIRO ,  Richard YEH

IPC: G01N27/12 ,  B81B7/00

CPC classification number: G01N27/12 ,  B81B7/0061 ,  B81B7/0087 ,  B81B2201/0214 ,  G01N27/123 ,  G01N27/128

Abstract: A miniature gas sensing device includes a silicon-based substrate including an opening. A first membrane is formed over the silicon-based substrate and a first portion of the first membrane covers the opening. A gas sensing layer is formed over a number of electrodes disposed over a first surface of the first portion of the first membrane and one or more heating elements. A permeable enclosure encapsulating the gas sensing layer can maintain thermal energy density over the gas sensing layer at a level sufficient to destroy a target gas to allow measuring a zero baseline.