公开(公告)号：US20160281261A1

公开(公告)日：2016-09-29

申请号：US15077354

申请日：2016-03-22

Applicant: Applied Materials, Inc.

Inventor： Shinichi OKI ,  Yoshinobu MORI

IPC: C30B25/08 ,  C23C16/455

Abstract: Chamber components for an epitaxial growth apparatus are disclosed. A reaction chamber defined and formed by a ceiling plate. A reactant gas is rectified in a reactant gas supply path disposed in the side wall, so that a horizontal component in a flow direction of the reactant gas in the reaction chamber corresponds to a horizontal component in a direction extending from the center of an opening of the reactant gas supply path. Improvements to the upper side wall, susceptor and rectification plate of the epitaxial growth apparatus have resulted in improvements to the uniformity and formation speed of the epitaxial layer formed on substrates resulting in higher throughput and lower defects.