公开(公告)号：US20180245206A1

公开(公告)日：2018-08-30

申请号：US15557364

申请日：2015-07-13

Applicant: Applied Materials, Inc.

Inventor： Stefan BANGERT ,  Jose Manuel DIEGUEZ-CAMPO ,  Stefan KELLER ,  Norbert SPATZ

IPC: C23C14/24

CPC classification number: C23C14/243 ,  C23C14/246 ,  C23C16/4401 ,  H01L2251/56

Abstract: An evaporation source for a metal or a metal alloy is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the metal or metal alloy, a distribution pipe with one or more outlets provided along the length of the distribution pipe, wherein the distribution pipe is in fluid communication with the evaporation crucible, wherein the distribution pipe further comprises a first outer tube and a first inner tube, and wherein the distribution pipe and the evaporation crucible are provided as one single piece.