公开(公告)号：US06664540B2

公开(公告)日：2003-12-16

申请号：US09778459

申请日：2001-02-07

申请人： Nobuhiro Shimizu ,  Yoshiharu Shirakawabe ,  Hiroshi Takahashi ,  Chiaki Yasumuro

发明人： Nobuhiro Shimizu ,  Yoshiharu Shirakawabe ,  Hiroshi Takahashi ,  Chiaki Yasumuro

IPC分类号： G01N2300

CPC分类号： G01Q10/045 ,  G01N23/046 ,  G01N2223/419 ,  G01Q20/04 ,  G01Q60/38 ,  Y10S977/873

摘要： A microprobe has a cantilever having a first lever portion having a free end portion, a second lever portion having a front end portion from which the first lever portion projects, and a support portion for supporting the second lever portion. A piezoresistive element is disposed on the second lever portion for bending the second lever portion.

摘要翻译： 微探针具有悬臂，其具有具有自由端部的第一杆部分，具有第一杆部分突出的前端部的第二杆部分和用于支撑第二杆部分的支撑部分。 压阻元件设置在第二杆部分上，用于弯曲第二杆部分。

公开(公告)号：US06469293B1

公开(公告)日：2002-10-22

申请号：US09514096

申请日：2000-02-28

申请人： Nobuhiro Shimizu ,  Hiroshi Takahashi ,  Yoshiharu Shirakawabe ,  Chiaki Yasumuro ,  Tadashi Arai

发明人： Nobuhiro Shimizu ,  Hiroshi Takahashi ,  Yoshiharu Shirakawabe ,  Chiaki Yasumuro ,  Tadashi Arai

IPC分类号： H01J516

CPC分类号： G01Q60/38 ,  G01Q20/04 ,  G01Q70/06 ,  Y10S977/874

摘要： A multiprobe device is provided for a scanning probe instrument and has a plurality of individually-selectable probe members for conducting scanning probe operations. The multiprobe has a plurality of cantilever probes supported by a support member. Each of the cantilevers is individually-selectable for use in conducting scanning probe operations, and each has a different resonance frequency from the others. In a preferred embodiment, portions of the respective cantilevers that are brought into contact with a sample to conduct scanning probe operations are arranged in a substantially linear configuration. A given one of the cantilevers is selected by vibrating the multiprobe at the resonance frequency of the given cantilever.

摘要翻译： 提供了一种用于扫描探针仪器的多探头装置，并具有用于进行扫描探针操作的多个可单独选择的探针部件。 多功能探头具有由支撑构件支撑的多个悬臂探针。 每个悬臂可单独选择用于进行扫描探针操作，并且每个具有与其他谐振频率不同的谐振频率。 在优选实施例中，与样品接触以进行扫描探针操作的各个悬臂的部分被布置成基本线性的构造。 通过在给定悬臂的共振频率下振动多重探针来选择给定的一个悬臂。

公开(公告)号：US06422069B1

公开(公告)日：2002-07-23

申请号：US09526148

申请日：2000-03-15

申请人： Nobuhiro Shimizu ,  Yoshiharu Shirakawabe ,  Hiroshi Takahashi ,  Chiaki Yasumuro ,  Tadashi Arai

发明人： Nobuhiro Shimizu ,  Yoshiharu Shirakawabe ,  Hiroshi Takahashi ,  Chiaki Yasumuro ,  Tadashi Arai

IPC分类号： G01B528

CPC分类号： G01Q10/045 ,  G01Q20/04 ,  Y10S977/873

摘要： A scanning probe apparatus and a self-exciting cantilever probe therefor are provided for measuring a characteristic of a sample by scanning a lever of the probe across the sample surface. The probe has a deflectable lever extending from a base and formed integrally therewith, and a resistive body provided on the lever to excite the lever in response to a periodic bias signal applied to the resistive body. In addition, the resistive body has a resistance value that varies in response to deflection of the lever so that the resistance of the resistive body may be monitored to detect deflection of the lever.

摘要翻译： 提供扫描探针装置和自激式悬臂探针，用于通过将探针的杆扫过样品表面来测量样品的特性。 探针具有从基座延伸并与其一体形成的可偏转杆，以及设置在杠杆上的电阻体，以响应于施加到电阻体的周期性偏置信号来激励杠杆。 此外，电阻体具有响应于杠杆的偏转而变化的电阻值，使得可以监视电阻体的电阻以检测杠杆的偏转。