公开(公告)号：US20100193505A1

公开(公告)日：2010-08-05

申请号：US12697719

申请日：2010-02-01

申请人： Kevin B. Peck

发明人： Kevin B. Peck

IPC分类号： H05B3/10 ,  H05B3/20

CPC分类号： H05B3/62 ,  Y10T29/49083

摘要： A heating element includes a continuous planar strip and a plurality of mounting members. A path of the continuous strip from a first end to a second end is circuitous and includes a plurality of repeating cycles, each of which includes a plurality of first straight segments, a plurality of second straight segments and a plurality of radiused segments. A length of the first straight segment is greater than a length of the second straight segment and an angular sum of a single cycle of the circuitous path is greater than 360 degrees. The heating element can be incorporated into a heating assembly for, as an example, semiconductor processing equipment.

摘要翻译： 加热元件包括连续的平面条和多个安装构件。 连续带从第一端到第二端的路径是迂回的并且包括多个重复循环，每个重复循环包括多个第一直段，多个第二直段和多个圆弧段。 第一直段的长度大于第二直段的长度，并且迂回路径的单个周期的角度和大于360度。 作为示例，加热元件可以结合到加热组件中，半导体加工设备。

公开(公告)号：US08395096B2

公开(公告)日：2013-03-12

申请号：US12697719

申请日：2010-02-01

申请人： Kevin B. Peck

发明人： Kevin B. Peck

IPC分类号： H05B3/10

CPC分类号： H05B3/62 ,  Y10T29/49083

摘要： A heating element includes a continuous planar strip and a plurality of mounting members. A path of the continuous strip from a first end to a second end is circuitous and includes a plurality of repeating cycles, each of which includes a plurality of first straight segments, a plurality of second straight segments and a plurality of radiused segments. A length of the first straight segment is greater than a length of the second straight segment and an angular sum of a single cycle of the circuitous path is greater than 360 degrees. The heating element can be incorporated into a heating assembly for, as an example, semiconductor processing equipment.

摘要翻译： 加热元件包括连续的平面条和多个安装构件。 连续带从第一端到第二端的路径是迂回的并且包括多个重复循环，每个重复循环包括多个第一直段，多个第二直段和多个圆弧段。 第一直段的长度大于第二直段的长度，并且迂回路径的单个周期的角度和大于360度。 作为示例，加热元件可以结合到加热组件中，半导体加工设备。

公开(公告)号：US08279072B2

公开(公告)日：2012-10-02

申请号：US12404746

申请日：2009-03-16

申请人： Kevin B. Peck ,  Bjorn W. Larsson

发明人： Kevin B. Peck ,  Bjorn W. Larsson

IPC分类号： G08B17/00 ,  G08B21/00 ,  H04Q5/22 ,  G01K1/00 ,  H01L29/00 ,  H05G1/08 ,  H05G1/54 ,  G05D23/00 ,  G06F11/00

CPC分类号： G01K3/04

摘要： A method for determining a maintenance interval for a consumable part and/or for equipment containing a consumable part obtains a plurality of measurements of temperature of the consumable part, receives each of the measurements at a totalizing unit, correlates each of the measurements to one of a plurality of temperature subranges, accumulates for each of the subranges an amount of time the measurements of temperature were correlated to each of the subranges, determines a total time by aggregating the accumulated time for each subrange with a weighting function, and generates a signal to prompt a maintenance event when the total time equals or passes a runtime setpoint. In supplement to or in alternative to the above, the method also correlates a subrange of two sequential measurements, indexes a breakpoint register if the correlated subranges are different, and generates a signal to prompt a maintenance event when a value of the breakpoint register equals or passes a breakpoint setpoint. A system for collecting, storing, and displaying runtime data of a resistive heating element in a semiconductor processing unit is also disclosed.

摘要翻译： 用于确定消耗部件和/或包含消耗部件的设备的维护间隔的方法获得可消耗部件的多个温度测量值，以总计单元接收每个测量值，将每个测量值与 多个温度子范围，对于每个子范围累积温度测量值与每个子范围相关的时间量，通过用加权函数聚合每个子范围的累积时间来确定总时间，并产生信号 当总时间等于或通过运行时设定值时，提示维护事件。 在上述的补充或替代方案中，该方法还将两个连续测量的子范围相关联，如果相关子范围不同则对断点寄存器进行索引，并且当断点寄存器的值等于或等于或者产生一个信号以提示维护事件 通过断点设定点。 还公开了一种用于在半导体处理单元中收集，存储和显示电阻加热元件的运行时间数据的系统。

公开(公告)号：US20110315673A1

公开(公告)日：2011-12-29

申请号：US13168662

申请日：2011-06-24

申请人： Kevin B. Peck

发明人： Kevin B. Peck

IPC分类号： H05B3/06 ,  H05K13/00

CPC分类号： H05B3/66

摘要： Spacer for a vertical support structure of a heating element coil includes a mating feature including complimentary components on first opposing sides of the spacer, a cavity, open to second opposing sides of the spacer, and an extension offset from an axis intersecting the mating features, the extension including a pocket sized to fit an individual loop of the heating element coil. The spacer can be incorporated into a support structure for a heating element coil interlocking adjacent loops of the coil so that they are retained in a collinear and concentric arrangement while allowing the loops of the coil to move freely inward and outward from the central axis in unison.

摘要翻译： 用于加热元件线圈的垂直支撑结构的间隔件包括配合特征，其包括在间隔件的第一相对侧上的互补部件，间隔开口至第二相对侧的腔，以及从与配合特征相交的轴线的延伸部偏移， 所述延伸部包括尺寸适合于加热元件线圈的单独回路的口袋。 间隔件可以结合到用于使线圈的相邻环互锁的加热元件线圈的支撑结构中，使得它们保持在共线和同心配置中，同时允许线圈的环从中心轴线一致地自由地向内和向外移动 。

公开(公告)号：US5483041A

公开(公告)日：1996-01-09

申请号：US230706

申请日：1994-04-21

申请人： Kevin B. Peck ,  Ronald E. Erickson

发明人： Kevin B. Peck ,  Ronald E. Erickson

IPC分类号： F27D1/00 ,  C30B31/10 ,  F27B5/04 ,  F27B5/14 ,  F27D7/06 ,  F27D21/00 ,  H01L21/00 ,  H01L21/22 ,  H01L21/31

CPC分类号： H01L21/67115 ,  C30B31/10

摘要： Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and heating element alignment mechanism of individual furnace tube modules with a heating element hoist mechanism allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element with individual furnace module cooling system. Improved thermocouple positioning and composition has also enhanced heat treatment process control and heating element maintainability.

摘要翻译： 通过改进的多炉模块设计，提高了高温扩散炉的性能。 该炉由适用于洁净室环境的材料构成，具有可调节的调平架组件。 具有加热元件起重机构的单独炉管模块的滑出组件和加热元件对准机构允许增强的可维护性。 通过具有单独的炉模块冷却系统的密封加热元件来改善热处理性能。 改进的热电偶定位和组成也增强了热处理过程控制和加热元件的可维护性。

公开(公告)号：US07335864B2

公开(公告)日：2008-02-26

申请号：US11443439

申请日：2006-05-31

申请人： Kevin B. Peck ,  Noel H. Johnson ,  Jim Sanches ,  Pontus K. H. Nilsson

发明人： Kevin B. Peck ,  Noel H. Johnson ,  Jim Sanches ,  Pontus K. H. Nilsson

IPC分类号： H05B6/36

CPC分类号： H05B6/36 ,  F27B5/14 ,  F27B9/063 ,  F27D11/02 ,  F27D99/0006 ,  F27D2099/0016 ,  H01L21/67109

摘要： Heating element assemblies, heating furnaces incorporating heating element assemblies, methods to form heating element assemblies, methods to form heating furnaces and methods to reduce a magnetic field in a bifilar coil are disclosed. The heating element assembly includes two components, each component formed from heating element wire. The two components are spatially positioned and electrically arranged, relative to each other, so that an electrical current applied to the heating element assembly simultaneously travels through the two components in opposite directions.

摘要翻译： 公开了加热元件组件，加热元件组件的加热炉，形成加热元件组件的方法，形成加热炉的方法和减小双线圈中的磁场的方法。 加热元件组件包括两个部件，每个部件由加热元件线形成。 两个部件相对于彼此在空间上定位和电气布置，使得施加到加热元件组件的电流同时沿相反方向穿过两个部件。

公开(公告)号：US06807220B1

公开(公告)日：2004-10-19

申请号：US10444128

申请日：2003-05-23

申请人： Kevin B. Peck

发明人： Kevin B. Peck

IPC分类号： H05B366

CPC分类号： H05B3/66 ,  F27B17/0025 ,  F27D11/00 ,  H01L21/67109

摘要： A heating assembly for use in an electric furnace includes a helical heating element encircled by thermal insulation, and rows of spacers for keeping turns of the heating element spaced apart by predetermined distances. Each spacer includes circumferential side portions facing generally in a circumferential direction of the heating element and converging toward a center region of the spacer to form a radial undercut against which the insulation abuts. The spacers of each row have through holes extending parallel to a longitudinal axis of the heating element. A guide rod extends through the through holes of each row of spacers.

摘要翻译： 用于电炉的加热组件包括由热绝缘包围的螺旋加热元件和用于保持加热元件的匝间隔开预定距离的隔离排。 每个间隔件包括大致在加热元件的圆周方向上的圆周侧部分，并且朝着间隔件的中心区域会聚，以形成径向底切，绝缘体抵靠该径向底切。 每列的间隔件具有平行于加热元件的纵向轴线延伸的通孔。 导杆延伸穿过每排间隔件的通孔。

公开(公告)号：US06514106B2

公开(公告)日：2003-02-04

申请号：US09879152

申请日：2001-06-13

申请人： Kevin B. Peck

发明人： Kevin B. Peck

IPC分类号： H01R13415

CPC分类号： H01R13/426 ,  H01B17/26 ,  Y10S439/908

摘要： An improved collar, interlocking arrangement, an electric furnace are provided. The improved arrangement includes an electrically insulating collar having a mounting flange and a passageway, an electrically conductive lead disposed at least partially within the passageway, and means for securing the lead relative to the passageway such that the lead is maintained in its proper position. An improved electric furnace includes an interior portion, thermal insulation disposed within the interior portion, at least one heating element disposed, an electrical lead having a first terminal portion disposed within the interior portion and a second terminal portion disposed outside the interior portion, an electrical connector electrically connected to the at least one heating element and disposed on the first terminal portion, an exterior wall, an electrically insulating collar, the lead being at least partially received within the collar, and the lead being secured relative to the collar such that the lead is maintained in its proper position.

摘要翻译： 提供改进的套环，互锁装置，电炉。 改进的布置包括具有安装凸缘和通道的电绝缘套环，至少部分地设置在通道内的导电引线以及用于相对于通道固定导线的装置，使得引线保持在其适当的位置。 一种改进的电炉包括内部部分，设置在内部部分内的热绝缘体，设置有至少一个加热元件，具有设置在内部部分内的第一端子部分的电引线和设置在内部部分外部的第二端子部分， 连接器，其电连接到所述至少一个加热元件并且设置在所述第一端子部分上，外壁，电绝缘套环，所述引线至少部分地容纳在所述套环内，并且所述引线相对于所述套环固定，使得所述引线 铅保持在适当的位置。

公开(公告)号：US5530222A

公开(公告)日：1996-06-25

申请号：US230786

申请日：1994-04-21

申请人： Kevin B. Peck ,  Ronald E. Erickson ,  Stephen H. Matthews

发明人： Kevin B. Peck ,  Ronald E. Erickson ,  Stephen H. Matthews

IPC分类号： F27D1/00 ,  C30B31/10 ,  F27B5/04 ,  F27B5/14 ,  F27D7/06 ,  F27D21/00 ,  H01L21/00 ,  H01L21/22 ,  H01L21/31 ,  F27D11/00

CPC分类号： H01L21/67115 ,  C30B31/10

摘要： Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and heating element alignment mechanism of individual furnace tube modules with a heating element hoist mechanism allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element with individual furnace module cooling system. Improved thermocouple positioning and composition has also enhanced heat treatment process control and heating element maintainability.

摘要翻译： 通过改进的多炉模块设计，提高了高温扩散炉的性能。 该炉由适用于洁净室环境的材料构成，具有可调节的调平架组件。 具有加热元件起重机构的单独炉管模块的滑出组件和加热元件对准机构允许增强的可维护性。 通过具有单独的炉模块冷却系统的密封加热元件来改善热处理性能。 改进的热电偶定位和组成也增强了热处理过程控制和加热元件的可维护性。

公开(公告)号：US5481088A

公开(公告)日：1996-01-02

申请号：US230598

申请日：1994-04-21

申请人： Kevin B. Peck ,  Ronald E. Erickson ,  Stephen H. Matthews

发明人： Kevin B. Peck ,  Ronald E. Erickson ,  Stephen H. Matthews

IPC分类号： F27D1/00 ,  C30B31/10 ,  F27B5/04 ,  F27B5/14 ,  F27D7/06 ,  F27D21/00 ,  H01L21/00 ,  H01L21/22 ,  H01L21/31

CPC分类号： H01L21/67115 ,  C30B31/10

摘要： Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and heating element alignment mechanism of individual furnace tube modules with a heating element hoist mechanism allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element with individual furnace module cooling system. Improved thermocouple positioning and composition has also enhanced heat treatment process control and heating element maintainability.

摘要翻译： 通过改进的多炉模块设计，提高了高温扩散炉的性能。 该炉由适用于洁净室环境的材料构成，具有可调节的调平架组件。 具有加热元件起重机构的单独炉管模块的滑出组件和加热元件对准机构允许增强的可维护性。 通过具有单独的炉模块冷却系统的密封加热元件来改善热处理性能。 改进的热电偶定位和组成也增强了热处理过程控制和加热元件的可维护性。