公开(公告)号：US20080256265A1

公开(公告)日：2008-10-16

申请号：US11787601

申请日：2007-04-16

申请人： SungChang Lee ,  Joerg Ferber

发明人： SungChang Lee ,  Joerg Ferber

IPC分类号： G06F1/18

CPC分类号： G06F11/325 ,  G11B33/122

摘要： A system with a visual display that provides an indication of a reliability of a hard disk drive of the system. The visual display may display the number of sector reallocations that have been performed by the disk drive. The display is coupled to a system housing so that a user can readily determine the reliability of the disk drive.

摘要翻译： 具有视觉显示的系统，其提供系统的硬盘驱动器的可靠性的指示。 视觉显示可以显示由磁盘驱动器执行的扇区重新分配的数量。 显示器耦合到系统外壳，使得用户可以容易地确定磁盘驱动器的可靠性。

公开(公告)号：US07428039B2

公开(公告)日：2008-09-23

申请号：US11281847

申请日：2005-11-17

申请人： Joerg Ferber

发明人： Joerg Ferber

IPC分类号： G03B27/54 ,  G03B27/42

CPC分类号： G03B27/54

摘要： An optical system for projecting a laser-beam on a mask to illuminate the mask includes a beam homogenizing arrangement including spaced arrays of microlenses. The beam homogenizing arrangement redistributes light in the laser beam such that the intensity of light in the laser-beam on the mask is nearly uniform along a transverse axis of the laser-beam. A stop extending partially into the laser-beam between the microlens arrays provides a more uniform light-intensity on the mask along the transverse axis than can be achieved by the microlens arrays alone.

摘要翻译： 用于将激光束投射在掩模上以照亮掩模的光学系统包括包括间隔开的微透镜阵列的光束均匀化装置。 光束均匀化布置将激光束中的光重新分布，使得掩模上的激光束中的光的强度沿着激光束的横轴几乎均匀。 在微透镜阵列之间部分地延伸到激光束中的停止在沿着横轴的掩模上提供比由微透镜阵列单独实现的更均匀的光强度。

公开(公告)号：US20070148567A1

公开(公告)日：2007-06-28

申请号：US11298281

申请日：2005-12-09

申请人： Joerg Ferber ,  Hiroshi Shimizu

发明人： Joerg Ferber ,  Hiroshi Shimizu

IPC分类号： G03C5/00

CPC分类号： B41J2/1634 ,  B23K26/066 ,  B23K26/384 ,  B23K26/389 ,  B41J2/162 ,  B41J2002/14475

摘要： An inkjet aperture in a substrate has a compound cross-section including a circular portion and an elongated trough-shaped portion. The aperture is formed in the substrate by laser drilling. A laser beam is projected on a mask having circular apertures corresponding to the circular portion of the inkjet aperture cross-section. An image of the mask is projected by a lens onto the substrate while reciprocally tilting a tiltable plate between the mask and the lens. This forms the trough-shaped portion of the aperture. The tiltable plate is then replaced by a fixed plate of equal thickness and the circular portion of the aperture is drilled to complete the aperture.

摘要翻译： 衬底中的喷墨孔具有包括圆形部分和细长槽形部分的复合截面。 孔通过激光钻孔形成在衬底中。 激光束投影在具有对应于喷墨孔横截面的圆形部分的圆形孔的掩模上。 掩模的图像由透镜投影到基板上，同时在面罩和透镜之间往复地倾斜可倾斜板。 这形成孔的槽形部分。 然后用相等厚度的固定板代替可倾斜板，并钻孔孔的圆形部分以完成孔。

公开(公告)号：US20070109519A1

公开(公告)日：2007-05-17

申请号：US11281847

申请日：2005-11-17

申请人： Joerg Ferber

发明人： Joerg Ferber

IPC分类号： G03B27/54

CPC分类号： G03B27/54

摘要： An optical system for projecting a laser-beam on a mask to illuminate the mask includes a beam homogenizing arrangement including spaced arrays of microlenses. The beam homogenizing arrangement redistributes light in the laser beam such that the intensity of light in the laser-beam on the mask is nearly uniform along a transverse axis of the laser-beam. A stop extending partially into the laser-beam between the microlens arrays provides a more uniform light-intensity on the mask along the transverse axis than can be achieved by the microlens arrays alone.

摘要翻译： 用于将激光束投射在掩模上以照亮掩模的光学系统包括包括间隔开的微透镜阵列的光束均匀化装置。 光束均匀化布置将激光束中的光重新分布，使得掩模上的激光束中的光的强度沿着激光束的横轴几乎均匀。 在微透镜阵列之间部分地延伸到激光束中的停止在沿着横轴的掩模上提供比由微透镜阵列单独实现的更均匀的光强度。

公开(公告)号：US20060175557A1

公开(公告)日：2006-08-10

申请号：US11348185

申请日：2006-02-06

申请人： Joerg Ferber ,  Henning Schmidt

发明人： Joerg Ferber ,  Henning Schmidt

IPC分类号： G21G5/00 ,  A61N5/00

CPC分类号： G03F7/70108 ,  G03F7/70225 ,  G03F7/70233

摘要： An optical system for projecting an image of a photomask on a substrate, using a Schwarzschild objective includes an excimer laser, beam shaping optics for shaping a laser beam from the laser and a beam-dividing prism. The beam-dividing prism has a dividing-face including four facets inclined at an angle to each other. The four facets divide the shaped beam into four beam-portions propagating at an angle to the system axis. The beam-portions overlap at the photomask and mutually diverge into the entrance aperture in the concave mirror of the Schwarzschild objective such that all of the light in the beam portions is incident on the convex mirror of the objective in an annular zone outside of the central obscuration zone of the convex mirror. This essentially eliminates transfer losses normally caused by this obscuration zone.

摘要翻译： 用于使用Schwarzschild物镜将光掩模图像投影在基板上的光学系统包括准分子激光器，用于使来自激光器的激光束成形的光束整形光学元件和分束棱镜。 分束棱镜具有包括相互倾斜的四个小面的分割面。 四个小面将成形的光束分成与系统轴成一定角度传播的四个光束部分。 光束部分在光掩模处重叠并且相互分开进入施瓦茨物镜的凹面镜中的入口孔，使得光束部分中的所有光在中心的外部的环形区域中入射到物镜的凸面镜上 凸面镜的遮蔽区。 这基本上消除了通常由该遮蔽区引起的传输损耗。