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公开(公告)号：US20190075401A1
公开(公告)日：2019-03-07
申请号：US16110158
申请日：2018-08-23
Inventor： Richard Ian LAMING , Marek Sebastian PIECHOCINSKI
Abstract: The application relates to a MEMS transducer comprising first and second conductive elements which defines a first capacitor of the transducer, and a third conductive element. The third conductive element is configured to be at a potential different to the potential of the second conductive element. The third conductive element is provided in a fringing field region of the first capacitor.
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