MEMS DEVICES AND PROCESSES
    4.
    发明申请

    公开(公告)号:US20190300361A1

    公开(公告)日:2019-10-03

    申请号:US15938524

    申请日:2018-03-28

    Abstract: The application relates to a MEMS transducer comprising first and second conductive elements which defines a capacitor of the transducer, and a third conductive element. The third conductive element is configured to be at a potential substantially the same as that of the second conductive element, and is provided in a plane that overlies the plane of the second conductive element.

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