MEMS DEVICES AND PROCESSES
    3.
    发明申请

    公开(公告)号:US20190075401A1

    公开(公告)日:2019-03-07

    申请号:US16110158

    申请日:2018-08-23

    IPC分类号: H04R19/04 H04R7/04

    摘要: The application relates to a MEMS transducer comprising first and second conductive elements which defines a first capacitor of the transducer, and a third conductive element. The third conductive element is configured to be at a potential different to the potential of the second conductive element. The third conductive element is provided in a fringing field region of the first capacitor.

    MEMS DEVICES AND PROCESSES
    4.
    发明申请

    公开(公告)号:US20190300361A1

    公开(公告)日:2019-10-03

    申请号:US15938524

    申请日:2018-03-28

    IPC分类号: B81B3/00 H04R19/04 H04R19/00

    摘要: The application relates to a MEMS transducer comprising first and second conductive elements which defines a capacitor of the transducer, and a third conductive element. The third conductive element is configured to be at a potential substantially the same as that of the second conductive element, and is provided in a plane that overlies the plane of the second conductive element.