公开(公告)号：US10266393B2

公开(公告)日：2019-04-23

申请号：US15414178

申请日：2017-01-24

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： Colin Wei Hong Chung ,  Scott Lyall Cargill ,  Colin Robert Jenkins

IPC: B81B7/00 ,  B81C1/00 ,  G01L9/00 ,  H04R19/04 ,  H04R19/00 ,  H04R31/00 ,  B81B3/00

Abstract: The application describes MEMS transducers having a vent structure provided in a flexible membrane of the vent structure The vent structure comprises at least one moveable portion and the vent structure is configured such that, in response to a differential pressure across the vent structure, the moveable portion is rotatable about first and second axes of rotation, which axes of rotation extend in the plane of the membrane.