公开(公告)号：US11267695B2

公开(公告)日：2022-03-08

申请号：US16603740

申请日：2018-04-12

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： James Thomas Deas ,  Colin Wei Hong Chung ,  Marek Sebastian Piechocinski

IPC: H04R1/04 ,  B81B3/00 ,  B81C1/00 ,  H04R19/00 ,  H04R19/04

Abstract: Micro-electro-mechanical system (MEMS) devices are disclosed, including a MEMS device comprising a semiconductor die including integrated circuitry, a structure mounted on the semiconductor die and covering at least a portion of the circuitry, the structure defining a space between the structure and the at least a portion of the circuitry, and a transducer including a membrane, the transducer located outside of the space.

公开(公告)号：US10266393B2

公开(公告)日：2019-04-23

申请号：US15414178

申请日：2017-01-24

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： Colin Wei Hong Chung ,  Scott Lyall Cargill ,  Colin Robert Jenkins

IPC: B81B7/00 ,  B81C1/00 ,  G01L9/00 ,  H04R19/04 ,  H04R19/00 ,  H04R31/00 ,  B81B3/00

Abstract: The application describes MEMS transducers having a vent structure provided in a flexible membrane of the vent structure The vent structure comprises at least one moveable portion and the vent structure is configured such that, in response to a differential pressure across the vent structure, the moveable portion is rotatable about first and second axes of rotation, which axes of rotation extend in the plane of the membrane.