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公开(公告)号:US10343901B2
公开(公告)日:2019-07-09
申请号:US15543492
申请日:2016-01-25
Inventor: Scott Lyall Cargill , Colin Robert Jenkins , Euan James Boyd , Richard Ian Laming
Abstract: The application describes MEMS transducer having a flexible membrane and which seeks to alleviate and/or redistribute stresses within the membrane layer. A membrane having a first/active region and a second/inactive region is described.
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公开(公告)号:US10111021B2
公开(公告)日:2018-10-23
申请号:US15660508
申请日:2017-07-26
Inventor: James Thomas Deas , Scott Lyall Cargill
IPC: A61F11/06 , G10K11/16 , H03B29/00 , H04R31/00 , B81B3/00 , H04R19/02 , H04R19/04 , B81C1/00 , H04R9/04 , H04R19/00
Abstract: The application describes a MEMS transducer in which first and second conductive elements of a capacitor are both provided on the membrane. The membrane is shaped that the first and second conductive elements are displaced relative to each other when the flexible membrane deflects in response to a pressure differential across the membrane. For example the membrane may be corrugated.
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公开(公告)号:US10301174B2
公开(公告)日:2019-05-28
申请号:US16149515
申请日:2018-10-02
Inventor: Scott Lyall Cargill , Marek Sebastian Piechocinski
Abstract: This application relates to MEMS transducer having a membrane layer (101) and at least one variable vent structure (301). The variable vent structure has a vent hole for venting fluid so as to reduce a pressure differential across the membrane layer and a moveable vent cover (302a, 302b) which, at an equilibrium position, at least partly blocks the vent hole. The vent cover is moveable from its equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole. In various embodiments the vent cover comprises at least a first flap section (302a) and a second flap section (302b), the first flap section being hingedly coupled to the side of the vent hole and the second flap section being hingedly coupled to the first flap section so as to be moveable with respect to the first flap section. In some embodiments the second flap section (302b) may be configured so that it deflects away from the first section (302a) more readily than the first section deflects away from its equilibrium position.
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公开(公告)号:US10118817B2
公开(公告)日:2018-11-06
申请号:US15608011
申请日:2017-05-30
Inventor: Scott Lyall Cargill , Marek Sebastian Piechocinski
Abstract: This application relates to MEMS transducer having a membrane layer (101) and at least one variable vent structure (301). The variable vent structure has a vent hole for venting fluid so as to reduce a pressure differential across the membrane layer and a moveable vent cover (302a, 302b) which, at an equilibrium position, at least partly blocks the vent hole. The vent cover is moveable from its equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole. In various embodiments the vent cover comprises at least a first flap section (302a) and a second flap section (302b), the first flap section being hingedly coupled to the side of the vent hole and the second flap section being hingedly coupled to the first flap section so as to be moveable with respect to the first flap section. In some embodiments the second flap section (302b) may be configured so that it deflects away from the first section (302a) more readily than the first section deflects away from its equilibrium position.
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公开(公告)号:US20170260044A1
公开(公告)日:2017-09-14
申请号:US15608011
申请日:2017-05-30
Inventor: Scott Lyall Cargill , Marek Sebastian Piechocinski
CPC classification number: B81B7/0061 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , H04R19/005 , H04R19/04
Abstract: This application relates to MEMS transducer having a membrane layer (101) and at least one variable vent structure (301). The variable vent structure has a vent hole for venting fluid so as to reduce a pressure differential across the membrane layer and a moveable vent cover (302a, 302b) which, at an equilibrium position, at least partly blocks the vent hole. The vent cover is moveable from its equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole. In various embodiments the vent cover comprises at least a first flap section (302a) and a second flap section (302b), the first flap section being hingedly coupled to the side of the vent hole and the second flap section being hingedly coupled to the first flap section so as to be moveable with respect to the first flap section. In some embodiments the second flap section (302b) may be configured so that it deflects away from the first section (302a) more readily than the first section deflects away from its equilibrium position.
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公开(公告)号:US10375483B2
公开(公告)日:2019-08-06
申请号:US15636019
申请日:2017-06-28
Inventor: Scott Lyall Cargill
Abstract: The application describes MEMS transducers comprising a flexible membrane supported at a supporting edge relative to a substrate and further comprising one or more unbound edges. The shape of the unbound edge is selected so that the flexible membrane tends to bend along more than one bend axis in the region of the supporting edge.
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公开(公告)号:US10085094B2
公开(公告)日:2018-09-25
申请号:US15636121
申请日:2017-06-28
Inventor: Scott Lyall Cargill , Colin Robert Jenkins , Euan James Boyd
CPC classification number: H04R19/04 , B81B3/0072 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2203/0315 , B81C1/00666 , H04R7/04 , H04R7/18 , H04R17/02 , H04R19/005 , H04R2201/003
Abstract: A MEMS transducer structure comprises a substrate comprising a cavity. A membrane layer is supported relative to the substrate to provide a flexible membrane. A peripheral edge of the cavity defines at least one perimeter region that is convex with reference to the center of the cavity. The peripheral edge of the cavity may further define at least one perimeter region that is concave with reference to the center of the cavity.
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公开(公告)号:US09695038B2
公开(公告)日:2017-07-04
申请号:US14971226
申请日:2015-12-16
Inventor: Scott Lyall Cargill , Marek Sebastian Piechocinski
CPC classification number: B81B7/0061 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , H04R19/005 , H04R19/04
Abstract: This application relates to MEMS transducer having a membrane layer (101) and at least one variable vent structure (301). The variable vent structure has a vent hole for venting fluid so as to reduce a pressure differential across the membrane layer and a moveable vent cover (302a, 302b) which, at an equilibrium position, at least partly blocks the vent hole. The vent cover is moveable from its equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole. In various embodiments the vent cover comprises at least a first flap section (302a) and a second flap section (302b), the first flap section being hingedly coupled to the side of the vent hole and the second flap section being hingedly coupled to the first flap section so as to be moveable with respect to the first flap section. In some embodiments the second flap section (302b) may be configured so that it deflects away from the first section (302a) more readily than the first section deflects away from its equilibrium position.
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公开(公告)号:US20160176704A1
公开(公告)日:2016-06-23
申请号:US14971226
申请日:2015-12-16
Inventor: Scott Lyall Cargill , Marek Sebastian Piechocinski
IPC: B81B7/00
CPC classification number: B81B7/0061 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , H04R19/005 , H04R19/04
Abstract: This application relates to MEMS transducer having a membrane layer (101) and at least one variable vent structure (301). The variable vent structure has a vent hole for venting fluid so as to reduce a pressure differential across the membrane layer and a moveable vent cover (302a, 302b) which, at an equilibrium position, at least partly blocks the vent hole. The vent cover is moveable from its equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole. In various embodiments the vent cover comprises at least a first flap section (302a) and a second flap section (302b), the first flap section being hingedly coupled to the side of the vent hole and the second flap section being hingedly coupled to the first flap section so as to be moveable with respect to the first flap section. In some embodiments the second flap section (302b) may be configured so that it deflects away from the first section (302a) more readily than the first section deflects away from its equilibrium position.
Abstract translation: 本申请涉及具有膜层(101)和至少一个可变排气口结构(301)的MEMS换能器。 可变排气结构具有用于排出流体的通气孔,以便减小横跨膜层的压差和可移动通气盖(302a,302b),其在平衡位置处至少部分地阻塞通气孔。 响应于穿过通气盖的压力差,通气盖可以从其平衡位置移动,以便改变通过通气孔的流动路径的尺寸。 在各种实施例中,通气盖包括至少第一翼片部分(302a)和第二翼片部分(302b),所述第一翼片部分铰接地联接到通气孔的侧面,并且第二翼片部分铰接地联接到第一翼片部分 翼片部分相对于第一翼片部分可移动。 在一些实施例中,第二折翼部分(302b)可以被配置为使得其比第一部分偏离其平衡位置更容易偏离第一部分(302a)。
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公开(公告)号:US10674298B2
公开(公告)日:2020-06-02
申请号:US16136939
申请日:2018-09-20
Inventor: James Thomas Deas , Scott Lyall Cargill
IPC: A61F11/06 , G10K11/16 , H03B29/00 , H04R31/00 , B81C1/00 , H04R9/04 , H04R19/00 , B81B3/00 , H04R19/02 , H04R19/04
Abstract: The application describes a MEMS transducer in which first and second conductive elements of a capacitor are both provided on the membrane. The membrane is shaped such that the first and second conductive elements are displaced relative to each other when the flexible membrane deflects in response to a pressure differential across the membrane. For example the membrane may be corrugated.
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