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    MEMS device and processes
    3.
    发明授权
    MEMS device and processes 有权

    公开(公告)号：US10301174B2

    公开(公告)日：2019-05-28

    申请号：US16149515

    申请日：2018-10-02

    Applicant: Cirrus Logic International Semiconductor Ltd.

    Inventor： Scott Lyall Cargill ,  Marek Sebastian Piechocinski

    IPC: G01L9/00 ,  B81B7/00 ,  H04R19/04 ,  H04R19/00

    Abstract: This application relates to MEMS transducer having a membrane layer (101) and at least one variable vent structure (301). The variable vent structure has a vent hole for venting fluid so as to reduce a pressure differential across the membrane layer and a moveable vent cover (302a, 302b) which, at an equilibrium position, at least partly blocks the vent hole. The vent cover is moveable from its equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole. In various embodiments the vent cover comprises at least a first flap section (302a) and a second flap section (302b), the first flap section being hingedly coupled to the side of the vent hole and the second flap section being hingedly coupled to the first flap section so as to be moveable with respect to the first flap section. In some embodiments the second flap section (302b) may be configured so that it deflects away from the first section (302a) more readily than the first section deflects away from its equilibrium position.

    MEMS devices with membrane having venting flaps hingedly attached to one another
    4.
    发明授权
    MEMS devices with membrane having venting flaps hingedly attached to one another 有权

    公开(公告)号：US10118817B2

    公开(公告)日：2018-11-06

    申请号：US15608011

    申请日：2017-05-30

    Applicant: Cirrus Logic International Semiconductor Ltd.

    Inventor： Scott Lyall Cargill ,  Marek Sebastian Piechocinski

    IPC: G01L9/00 ,  B81B7/00 ,  H04R19/00 ,  H04R19/04

    Abstract: This application relates to MEMS transducer having a membrane layer (101) and at least one variable vent structure (301). The variable vent structure has a vent hole for venting fluid so as to reduce a pressure differential across the membrane layer and a moveable vent cover (302a, 302b) which, at an equilibrium position, at least partly blocks the vent hole. The vent cover is moveable from its equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole. In various embodiments the vent cover comprises at least a first flap section (302a) and a second flap section (302b), the first flap section being hingedly coupled to the side of the vent hole and the second flap section being hingedly coupled to the first flap section so as to be moveable with respect to the first flap section. In some embodiments the second flap section (302b) may be configured so that it deflects away from the first section (302a) more readily than the first section deflects away from its equilibrium position.

    MEMS DEVICES AND PROCESSES
    5.
    发明申请
    MEMS DEVICES AND PROCESSES 审中-公开

    公开(公告)号：US20170260044A1

    公开(公告)日：2017-09-14

    申请号：US15608011

    申请日：2017-05-30

    Applicant: Cirrus Logic International Semiconductor Ltd.

    Inventor： Scott Lyall Cargill ,  Marek Sebastian Piechocinski

    IPC: B81B7/00 ,  H04R19/00 ,  H04R19/04

    CPC classification number: B81B7/0061 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  H04R19/005 ,  H04R19/04

    Abstract: This application relates to MEMS transducer having a membrane layer (101) and at least one variable vent structure (301). The variable vent structure has a vent hole for venting fluid so as to reduce a pressure differential across the membrane layer and a moveable vent cover (302a, 302b) which, at an equilibrium position, at least partly blocks the vent hole. The vent cover is moveable from its equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole. In various embodiments the vent cover comprises at least a first flap section (302a) and a second flap section (302b), the first flap section being hingedly coupled to the side of the vent hole and the second flap section being hingedly coupled to the first flap section so as to be moveable with respect to the first flap section. In some embodiments the second flap section (302b) may be configured so that it deflects away from the first section (302a) more readily than the first section deflects away from its equilibrium position.

    MEMS devices with membrane having venting flaps hingedly attached to one another
    8.
    发明授权
    MEMS devices with membrane having venting flaps hingedly attached to one another 有权

    公开(公告)号：US09695038B2

    公开(公告)日：2017-07-04

    申请号：US14971226

    申请日：2015-12-16

    Applicant: Cirrus Logic International Semiconductor Ltd.

    Inventor： Scott Lyall Cargill ,  Marek Sebastian Piechocinski

    IPC: B81B7/00 ,  H01L29/00 ,  H04R19/00 ,  H04R19/04

    CPC classification number: B81B7/0061 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  H04R19/005 ,  H04R19/04

    Abstract: This application relates to MEMS transducer having a membrane layer (101) and at least one variable vent structure (301). The variable vent structure has a vent hole for venting fluid so as to reduce a pressure differential across the membrane layer and a moveable vent cover (302a, 302b) which, at an equilibrium position, at least partly blocks the vent hole. The vent cover is moveable from its equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole. In various embodiments the vent cover comprises at least a first flap section (302a) and a second flap section (302b), the first flap section being hingedly coupled to the side of the vent hole and the second flap section being hingedly coupled to the first flap section so as to be moveable with respect to the first flap section. In some embodiments the second flap section (302b) may be configured so that it deflects away from the first section (302a) more readily than the first section deflects away from its equilibrium position.

    MEMS DEVICES AND PROCESSES
    9.
    发明申请
    MEMS DEVICES AND PROCESSES 有权
    MEMS器件和工艺

    公开(公告)号：US20160176704A1

    公开(公告)日：2016-06-23

    申请号：US14971226

    申请日：2015-12-16

    Applicant: Cirrus Logic International Semiconductor Ltd.

    Inventor： Scott Lyall Cargill ,  Marek Sebastian Piechocinski

    IPC: B81B7/00

    CPC classification number: B81B7/0061 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  H04R19/005 ,  H04R19/04

    Abstract: This application relates to MEMS transducer having a membrane layer (101) and at least one variable vent structure (301). The variable vent structure has a vent hole for venting fluid so as to reduce a pressure differential across the membrane layer and a moveable vent cover (302a, 302b) which, at an equilibrium position, at least partly blocks the vent hole. The vent cover is moveable from its equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole. In various embodiments the vent cover comprises at least a first flap section (302a) and a second flap section (302b), the first flap section being hingedly coupled to the side of the vent hole and the second flap section being hingedly coupled to the first flap section so as to be moveable with respect to the first flap section. In some embodiments the second flap section (302b) may be configured so that it deflects away from the first section (302a) more readily than the first section deflects away from its equilibrium position.

    Abstract translation: 本申请涉及具有膜层（101）和至少一个可变排气口结构（301）的MEMS换能器。 可变排气结构具有用于排出流体的通气孔，以便减小横跨膜层的压差和可移动通气盖（302a，302b），其在平衡位置处至少部分地阻塞通气孔。 响应于穿过通气盖的压力差，通气盖可以从其平衡位置移动，以便改变通过通气孔的流动路径的尺寸。 在各种实施例中，通气盖包括至少第一翼片部分（302a）和第二翼片部分（302b），所述第一翼片部分铰接地联接到通气孔的侧面，并且第二翼片部分铰接地联接到第一翼片部分 翼片部分相对于第一翼片部分可移动。 在一些实施例中，第二折翼部分（302b）可以被配置为使得其比第一部分偏离其平衡位置更容易偏离第一部分（302a）。

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