INTEGRATED THIN-FILM RESISTIVE SENSOR WITH INTEGRATED HEATER AND METAL LAYER THERMAL EQUALIZER

    公开(公告)号:US20240053425A1

    公开(公告)日:2024-02-15

    申请号:US17884521

    申请日:2022-08-09

    CPC classification number: G01R35/005 G01R27/16

    Abstract: An integrated circuit (IC) provides on-line, wafer-level, die-level, or package-level thermal calibration of an integrated thin-film resistor, by thermally enclosing the thin-film resistor with metal layers formed above and below the thin-film resistor along its length and width. Metal vias thermally couple the metal layers to the substrate to at least partially equalize the temperature of the metal layers and the thin-film resistor and the substrate. A controllable heat source, which may be provided by another thin-film resistor integrated on or below the substrate, and a reference temperature sensor provide heating/calibration measurement of the resistance of the thin-film resistor over a range of temperature. The reference temperature sensor may be provided within the IC, for example, integrated on the substrate or packaged with the die containing the thin-film resistor, or may be otherwise thermally coupled to the metal layers, e.g., by an extension of one of the metal layers.

    Capacitive sensor including compensation for phase shift

    公开(公告)号:US11119138B1

    公开(公告)日:2021-09-14

    申请号:US16838405

    申请日:2020-04-02

    Abstract: A method may include applying an excitation signal to a capacitor of the capacitive sensor which causes generation of a modulated signal from an input signal indicative of a variance in a capacitance of the capacitor, detecting the modulated signal with a detector to generate a detected modulated signal that has a phase shift relative to the excitation signal, demodulating the detected modulated signal into an in-phase component and a quadrature component using a reference signal, nullifying the quadrature component by setting a phase of the reference signal relative to the excitation signal to compensate for the phase shift, and outputting the in-phase component as an unmodulated output signal representative of the capacitance.

    APPARATUS AND METHOD FOR MEASURING SPEAKER TRANSDUCER IMPEDANCE VERSUS FREQUENCY WITH ULTRALOW INAUDIBLE SIGNAL

    公开(公告)号:US20210075384A1

    公开(公告)日:2021-03-11

    申请号:US16562116

    申请日:2019-09-05

    Abstract: An apparatus measures a speaker impedance. A DAC converts a known digital input signal to an audio frequency first analog voltage signal. Resistors with known resistance attenuate the first analog voltage signal to generate a current. The known resistance effectively determines the current because the known resistance is high relative to the speaker impedance. The current is sourced into the speaker to generate a second analog voltage signal. The known resistance is sufficiently high to cause the second analog voltage signal to be inaudible as transduced by the speaker. An amplifier amplifies the second analog voltage signal with a known gain to generate a third analog voltage signal. An ADC converts the third analog voltage signal to a digital output signal. A processing element calculates the impedance of the speaker proportional to the digital output signal based on the known digital input signal, the known resistance, and the known gain.

    Far field interference cancellation for resistive-inductive-capacitive sensors

    公开(公告)号:US12295102B1

    公开(公告)日:2025-05-06

    申请号:US16299648

    申请日:2019-03-12

    Abstract: A method may include forming an inductor comprising a plurality of inductor coils comprising a plurality of first inductor coils and a plurality of second inductor coils, each inductor coil comprising a spiraling wire of electrically-conductive material wherein the wire of electrically-conductive material is arranged substantially in a plane, wherein the plurality of first inductor coils and the plurality of second inductor coils are electrically coupled to one another and arranged with respect to one another such that within the plane, electrical current flowing through the inductor flows clockwise in the first inductor coils, within the plane, electrical current flowing through the inductor flows counterclockwise in the second inductor coils, each first inductor coil is adjacent to at least one second inductor coil, and each second inductor coil is adjacent to at least one first inductor coil.

    Integrated thin-film resistive sensor with integrated heater and metal layer thermal equalizer

    公开(公告)号:US12066514B2

    公开(公告)日:2024-08-20

    申请号:US17884521

    申请日:2022-08-09

    CPC classification number: G01R35/005 G01R27/16

    Abstract: An integrated circuit (IC) provides on-line, wafer-level, die-level, or package-level thermal calibration of an integrated thin-film resistor, by thermally enclosing the thin-film resistor with metal layers formed above and below the thin-film resistor along its length and width. Metal vias thermally couple the metal layers to the substrate to at least partially equalize the temperature of the metal layers and the thin-film resistor and the substrate. A controllable heat source, which may be provided by another thin-film resistor integrated on or below the substrate, and a reference temperature sensor provide heating/calibration measurement of the resistance of the thin-film resistor over a range of temperature. The reference temperature sensor may be provided within the IC, for example, integrated on the substrate or packaged with the die containing the thin-film resistor, or may be otherwise thermally coupled to the metal layers, e.g., by an extension of one of the metal layers.

    SINGLE-POINT TEMPERATURE CALIBRATION OF RESISTANCE-BASED TEMPERATURE MEASUREMENTS

    公开(公告)号:US20230366754A1

    公开(公告)日:2023-11-16

    申请号:US17884517

    申请日:2022-08-09

    CPC classification number: G01K15/005 G01K7/16 G01K2219/00

    Abstract: A system and method provide on-line, wafer-level, die-level, or package-level thermal calibration of an integrated measurement resistor with a single temperature insertion. The system includes a measurement resistor integrated on a substrate with an unknown temperature coefficient and a temperature reference sensor thermally coupled to the measurement resistor. A measurement circuit measures an indication of a resistance of the measurement resistor. An electrically-controllable integrated heat source is operated by a controller to change a temperature of the measurement resistor and the temperature reference sensor and stores values of the resistance indication and the sensed temperature corresponding to multiple temperatures of the temperature of the measurement resistor and the temperature reference sensor. The controller generates or approximates a mathematical relationship between the resistance of the measurement resistor and the temperature of the measurement resistor and the temperature reference sensor from the stored values.

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