公开(公告)号：US20150037187A1

公开(公告)日：2015-02-05

申请号：US14374771

申请日：2013-01-29

Applicant: Edwards Limited

Inventor： Neil Turner ,  Jack Raymond Tattersall ,  Paul David Neller ,  Malcolm William Gray

IPC: F04C23/00 ,  F04C25/02 ,  F04C18/12

CPC classification number: F04C23/003 ,  F01C21/10 ,  F01C21/108 ,  F04C18/123 ,  F04C18/126 ,  F04C23/001 ,  F04C25/02 ,  F04C2230/60 ,  F04C2230/70 ,  F04C2230/80 ,  F04C2230/85 ,  F04C2240/805

Abstract: The present invention relates to a multi-stage vacuum pump which has a plurality of pumping stages. The pump comprises a stator forming the pumping chambers of respective pumping stages and at least one shaft, for supporting a plurality of rotors for rotation in respective pumping chambers. The stator comprises: a stator envelope which extends over an axial extent of a plurality of stator stages thereby circumscribing said at least one shaft and forming an internal profile of a plurality of stator stages: and a plurality of transverse walls located on either axial side of the stator stages to form respective said pumping chambers. At least one of the transverse walls is an inter-stage between stator stages and the stator envelope is configured to circumscribe the inter-stage for location of said inter-stage radially inward of the stator part.

Abstract translation: 本发明涉及具有多个泵送级的多级真空泵。 泵包括形成相应泵送级的泵送室的定子和至少一个轴，用于支撑多个转子以在相应的泵送室中旋转。 定子包括：定子外壳，其在多个定子级的轴向范围上延伸，从而限定所述至少一个轴并形成多个定子级的内部轮廓;以及多个横向壁，其位于 定子级形成相应的所述泵送室。 横向壁中的至少一个是定子级之间的阶段，并且定子外壳被配置为围绕定子部分的径向向内的所述级间位置的阶段。