中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

6 records (took 0.012 seconds)

    IMPROVEMENTS IN AND RELATING TO VACUUM CONDUITS
    1.
    发明申请
    IMPROVEMENTS IN AND RELATING TO VACUUM CONDUITS 审中-公开
    对真空导管的改进和相关

    公开(公告)号：US20150292494A1

    公开(公告)日：2015-10-15

    申请号：US14648135

    申请日：2013-10-28

    Applicant: EDWARDS LIMITED

    Inventor： Neil Turner ,  Jack Raymond Tattersall ,  Alan Ernest Kinnaird Holbrook ,  Matthew Richard Wickes

    IPC: F04B11/00 ,  F04B41/06 ,  F04B37/14 ,  F04B39/00

    CPC classification number: F04B11/0091 ,  F04B37/14 ,  F04B39/0055 ,  F04B41/06 ,  F04C18/126 ,  F04C25/02 ,  F04C28/28 ,  F04C29/124

    Abstract: In situations where a vacuum system is suddenly overloaded, there is a risk of mechanical damage being sustained, for example, bearing damage, gear slippage or rotor and/or stator collisions. Sudden overloads can also lead to electrical damage, for example, over-currents or power surges. Therefore a pressure regulating apparatus is provided for use in a vacuum pumping system having an inlet, an outlet and a conduit interposed between, and in fluid communication with, the inlet and the outlet, wherein the cross-sectional area of the conduit is greater than that required to meet the conductance requirements of the inlet and the outlet.

    Abstract translation: 在真空系统突然超载的情况下，存在持续的机械损坏的风险，例如轴承损坏，齿轮打滑或转子和/或定子碰撞。 突然过载也可能导致电气损坏，例如过电流或电涌。 因此，提供一种用于真空泵送系统的压力调节装置，其具有插入在入口和出口之间并与入口和出口流体连通的入口，出口和导管，其中导管的横截面面积大于 这需要满足入口和出口的电导要求。

    Pump
    3.
    发明申请
    Pump 审中-公开
    泵

    公开(公告)号：US20150037187A1

    公开(公告)日：2015-02-05

    申请号：US14374771

    申请日：2013-01-29

    Applicant: Edwards Limited

    Inventor： Neil Turner ,  Jack Raymond Tattersall ,  Paul David Neller ,  Malcolm William Gray

    IPC: F04C23/00 ,  F04C25/02 ,  F04C18/12

    CPC classification number: F04C23/003 ,  F01C21/10 ,  F01C21/108 ,  F04C18/123 ,  F04C18/126 ,  F04C23/001 ,  F04C25/02 ,  F04C2230/60 ,  F04C2230/70 ,  F04C2230/80 ,  F04C2230/85 ,  F04C2240/805

    Abstract: The present invention relates to a multi-stage vacuum pump which has a plurality of pumping stages. The pump comprises a stator forming the pumping chambers of respective pumping stages and at least one shaft, for supporting a plurality of rotors for rotation in respective pumping chambers. The stator comprises: a stator envelope which extends over an axial extent of a plurality of stator stages thereby circumscribing said at least one shaft and forming an internal profile of a plurality of stator stages: and a plurality of transverse walls located on either axial side of the stator stages to form respective said pumping chambers. At least one of the transverse walls is an inter-stage between stator stages and the stator envelope is configured to circumscribe the inter-stage for location of said inter-stage radially inward of the stator part.

    Abstract translation: 本发明涉及具有多个泵送级的多级真空泵。 泵包括形成相应泵送级的泵送室的定子和至少一个轴，用于支撑多个转子以在相应的泵送室中旋转。 定子包括：定子外壳，其在多个定子级的轴向范围上延伸，从而限定所述至少一个轴并形成多个定子级的内部轮廓;以及多个横向壁，其位于 定子级形成相应的所述泵送室。 横向壁中的至少一个是定子级之间的阶段，并且定子外壳被配置为围绕定子部分的径向向内的所述级间位置的阶段。

    Pressure regulating apparatus including conduit
    4.
    发明授权
    Pressure regulating apparatus including conduit 有权

    公开(公告)号：US10539123B2

    公开(公告)日：2020-01-21

    申请号：US14648135

    申请日：2013-10-28

    Applicant: Edwards Limited

    Inventor： Neil Turner ,  Jack Raymond Tattersall ,  Alan Ernest Kinnaird Holbrook ,  Matthew Richard Wickes

    IPC: F04B11/00 ,  F04B37/14 ,  F04B41/06 ,  F04B39/00

    Abstract: In situations where a vacuum system is suddenly overloaded, there is a risk of mechanical damage being sustained, for example, bearing damage, gear slippage or rotor and/or stator collisions. Sudden overloads can also lead to electrical damage, for example, over-currents or power surges. Therefore a pressure regulating apparatus is provided for use in a vacuum pumping system having an inlet, an outlet and a conduit interposed between, and in fluid communication with, the inlet and the outlet, wherein the cross-sectional area of the conduit is greater than that required to meet the conductance requirements of the inlet and the outlet.

    METHOD AND APPARATUS FOR WARMING UP A VACUUM PUMP ARRANGEMENT
    6.
    发明申请
    METHOD AND APPARATUS FOR WARMING UP A VACUUM PUMP ARRANGEMENT 审中-公开
    用于加热真空泵装置的方法和装置

    公开(公告)号：US20150086387A1

    公开(公告)日：2015-03-26

    申请号：US14398119

    申请日：2013-04-24

    Applicant: Edwards Limited

    Inventor： Jack Raymond Tattersall

    IPC: F04B49/02 ,  F04B23/04 ,  F04B49/20

    CPC classification number: F04B49/02 ,  F04B23/04 ,  F04B49/20 ,  F04B2201/0801 ,  F04C23/005 ,  F04C25/02 ,  F04C28/06 ,  F04C2220/30 ,  F04C2270/701 ,  F04D19/046 ,  F04D27/0261 ,  F04D27/0292 ,  F05D2260/85

    Abstract: A method for warming up a vacuum pump arrangement having a booster pump and a backing pump downstream of the booster pump for evacuating a process chamber includes setting the booster pump at a first speed higher than an idle speed of the booster pump when the same is in an idle mode; and controlling a backing pressure at an outlet of the booster pump within a range from 0.1 mbar to 10 mbar at least for a period of time from when the vacuum pump arrangement is activated from the idle mode to when the booster pump reaches a temperature equal to or exceeding a first predetermined threshold value. Such method is implemented in system where a controlled is configured to carry out the above-motioned actions.

    Abstract translation: 一种用于升温真空泵装置的方法，其具有在增压泵下游的增压泵和背衬泵，用于抽空处理室包括将增压泵设定为高于增压泵的怠速的第一速度，当相同时 空闲模式; 并且在所述增压泵的出口处控制背压在0.1毫巴至10毫巴的范围内，至少在从所述真空泵装置从空转模式启动到所述增压泵达到等于 或超过第一预定阈值。 这样的方法在被配置为执行上述动作的系统中实现。

Patent Agency Ranking