摘要:
Methods and apparatus for automated validation of semiconductor process steps are provided herein. In some examples, a method for validating a semiconductor process recipe includes: selecting a rule set describing an operating window for a semiconductor process tool; checking parameter values defined by steps in the semiconductor process recipe against limit-checking rules of the rule set to produce first results; determining step types from the steps in the semiconductor process recipe using step definition rules of the rule set to produce second results; checking transitions between the step types against step transition rules of the rule set to produce third results; and generating, using the computer, validation data for use of the semiconductor process recipe with the semiconductor process tool based on the first, the second, and the third results.
摘要:
Articles, systems and methods for dispensing multiple volatile materials into the environment, including but not limited to scents, are disclosed. In one embodiment of the method, a method for scenting a room occupied by a person is provided that includes the steps of: (a) dispersing into the room a first scent element for a play period, the play period being long enough for the person to comprehend an aroma while not exceeding an interval of time in which the person would become desensitized to the aroma; (b) dispersing into the room a second scent element for the play period after completing the play period associated with the first scent element, the second scent element being different than the first scent element; and (c) dispersing into the room a third scent element for the play period after completing the play period associated with the second scent element, the third scent element being different than both of the first and second scent elements.