Method and apparatus for automated validation of semiconductor process recipes
    11.
    发明授权
    Method and apparatus for automated validation of semiconductor process recipes 有权
    用于半导体工艺配方自动验证的方法和装置

    公开(公告)号:US08527081B2

    公开(公告)日:2013-09-03

    申请号:US13044747

    申请日:2011-03-10

    IPC分类号: G06F19/00

    CPC分类号: G06N5/025

    摘要: Methods and apparatus for automated validation of semiconductor process steps are provided herein. In some examples, a method for validating a semiconductor process recipe includes: selecting a rule set describing an operating window for a semiconductor process tool; checking parameter values defined by steps in the semiconductor process recipe against limit-checking rules of the rule set to produce first results; determining step types from the steps in the semiconductor process recipe using step definition rules of the rule set to produce second results; checking transitions between the step types against step transition rules of the rule set to produce third results; and generating, using the computer, validation data for use of the semiconductor process recipe with the semiconductor process tool based on the first, the second, and the third results.

    摘要翻译: 本文提供了半导体工艺步骤的自动验证的方法和装置。 在一些示例中,用于验证半导体处理配方的方法包括:选择描述半导体处理工具的操作窗口的规则集; 检查由半导体工艺配方中的步骤定义的参数值,以反映规则集的限制检查规则以产生第一个结果; 使用规则集的步骤定义规则从半导体工艺配方中的步骤确定步骤类型以产生第二结果; 检查步骤类型与规则集的步骤转换规则之间的转换,以产生第三个结果; 以及基于第一,第二和第三结果,使用计算机产生使用半导体处理工具的半导体工艺配方的验证数据。

    Articles, systems, and methods for dispensing volatile materials
    12.
    发明申请
    Articles, systems, and methods for dispensing volatile materials 审中-公开
    用于分配挥发性物质的物品,系统和方法

    公开(公告)号:US20050214158A1

    公开(公告)日:2005-09-29

    申请号:US11135589

    申请日:2005-05-23

    摘要: Articles, systems and methods for dispensing multiple volatile materials into the environment, including but not limited to scents, are disclosed. In one embodiment of the method, a method for scenting a room occupied by a person is provided that includes the steps of: (a) dispersing into the room a first scent element for a play period, the play period being long enough for the person to comprehend an aroma while not exceeding an interval of time in which the person would become desensitized to the aroma; (b) dispersing into the room a second scent element for the play period after completing the play period associated with the first scent element, the second scent element being different than the first scent element; and (c) dispersing into the room a third scent element for the play period after completing the play period associated with the second scent element, the third scent element being different than both of the first and second scent elements.

    摘要翻译: 公开了用于将多种挥发性材料分配到环境中的物品,系统和方法,包括但不限于香料。 在该方法的一个实施例中,提供了一种用于吹动由人占据的房间的方法,其包括以下步骤:(a)将第一气味元件分散到游戏室中,游戏期间足够长 理解香气,而不会超过一段时间,使人变得脱敏的香气; (b)在完成与第一香味元素相关的播放期间之后,将第二香味元素分散到游戏室中,第二香味元素不同于第一香味元素; 和(c)在完成与第二​​香味元素相关的播放期间之后,向室内分散第三香味元素,用于播放期间,第三香味元素不同于第一和第二香味元素。