公开(公告)号：US09048060B2

公开(公告)日：2015-06-02

申请号：US14056710

申请日：2013-10-17

申请人： FEI Company

发明人： Erik René Kieft ,  Fredericus Bernardus Kiewiet ,  Adam Christopher Lassise ,  Otger Jan Luiten ,  Petrus Henricus Antonius Mutsaers ,  Edgar Jan Dirk Vredenbregt ,  Alexander Henstra

IPC分类号： H01J37/26 ,  H01J37/04 ,  H01J37/28

CPC分类号： H01J37/045 ,  H01J37/28 ,  H01J2237/0432

摘要： The invention relates to a charged-particle microscope comprising a charged-particle source; a sample holder; a charged-particle lens system; a detector; and a beam pulsing device, for causing the beam to repeatedly switch on and off so as to produce a pulsed beam. The beam pulsing device comprises a unitary resonant cavity disposed about a particle-optical axis and has an entrance aperture and an exit aperture for the beam. The resonant cavity is configured to simultaneously produce a first oscillatory deflection of the beam at a first frequency in a first direction and a second oscillatory deflection of the beam at a second, different frequency in a second, different direction. The resonant cavity may have an elongated (e.g. rectangular or elliptical) cross-section, with a long axis parallel to said first direction and a short axis parallel to said second direction.

摘要翻译： 本发明涉及包含带电粒子源的带电粒子显微镜; 样品架 带电粒子透镜系统; 检测器 以及光束脉冲装置，用于使光束重复打开和关闭以产生脉冲光束。 束脉冲装置包括围绕粒子 - 光轴设置的整体谐振腔，并具有用于束的入射孔和出射孔。 谐振腔被配置成同时在第一方向上以第一频率和第二不同频率处的第二不同方向上产生第一振荡偏转波束的第二振荡偏转。 谐振腔可以具有细长（例如矩形或椭圆形）横截面，其中长轴平行于所述第一方向和短轴平行于所述第二方向。