公开(公告)号：US09373680B1

公开(公告)日：2016-06-21

申请号：US14611908

申请日：2015-02-02

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Ki Young Lee ,  Tony Joung ,  Sanggil Bae

IPC: H01L21/02 ,  H01L49/02 ,  H01L23/522 ,  H01L21/768 ,  H01L21/311 ,  H01L23/532 ,  H01L27/08

CPC classification number: H01L28/40 ,  H01L21/31144 ,  H01L21/32139 ,  H01L21/76808 ,  H01L21/76811 ,  H01L21/76831 ,  H01L23/5223 ,  H01L23/53238 ,  H01L23/5329 ,  H01L23/53295 ,  H01L27/0805 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Integrated circuits with MIM capacitors and methods for producing them with metal and oxide hard masks are provided. Embodiments include disposing a dielectric layer over an ILD, the ILD including a contact therethrough in a first region; forming a capacitor trench in the dielectric layer in a second region; forming a MIM hard mask by: disposing a first metal hard mask in the first region and in the capacitor trench in the second region; disposing an oxide hard mask over the first metal hard mask; and disposing a second metal hard mask over the oxide hard mask; forming a metal line trench through the MIM hard mask in the first region, including over the contact, while masking the second region; and removing portions of the MIM hard mask in the capacitor trench, wherein a remaining portion of the first metal hard mask comprises a bottom plate of an MIM capacitor.

Abstract translation: 提供具有MIM电容器的集成电路和用金属和氧化物硬掩模制造它们的方法。 实施例包括在ILD上设置介电层，ILD在第一区域中包括穿过其中的接触; 在第二区域中在所述电介质层中形成电容器沟槽; 通过以下方式形成MIM硬掩模：在第一区域和第二区域的电容器沟槽中设置第一金属硬掩模; 在第一金属硬掩模上设置氧化物硬掩模; 并在所述氧化物硬掩模上设置第二金属硬掩模; 在所述第一区域中形成穿过所述MIM硬掩模的金属线沟槽，包括在所述接触件上方，同时掩蔽所述第二区域; 以及去除所述电容器沟槽中的MIM硬掩模的部分，其中所述第一金属硬掩模的剩余部分包括MIM电容器的底板。

公开(公告)号：US09178009B2

公开(公告)日：2015-11-03

申请号：US13648504

申请日：2012-10-10

Applicant: GLOBALFOUNDRIES, Inc.

Inventor： Ki Young Lee ,  Sanggil Bae ,  Jae Ho Joung

IPC: H01G7/00 ,  H01L49/02

CPC classification number: H01L28/60 ,  H01L27/10805

Abstract: Methods of forming a capacitor and contact structures are provided. The methods include, for instance, providing a layer of conductive material above a conductive structure and above a lower electrode of a capacitor; etching the layer of conductive material to define a conductive material hard mask and an upper electrode of the capacitor, the conductive material hard mask being disposed at least partially above the conductive structure; and forming a first conductive contact structure and a second conductive contact structure, the first conductive contact structure extending through an opening in the conductive material hard mask and conductively contacting the conductive structure, and the second conductive contact structure conductively contacting one of the lower electrode of the capacitor, or the upper electrode of the capacitor.

Abstract translation: 提供形成电容器和接触结构的方法。 所述方法包括例如在导电结构之上和电容器的下电极之上提供导电材料层; 蚀刻导电材料层以限定导电材料硬掩模和电容器的上电极，导电材料硬掩模至少部分地设置在导电结构之上; 以及形成第一导电接触结构和第二导电接触结构，所述第一导电接触结构延伸穿过所述导电材料硬掩模中的开口并导电地接触所述导电结构，并且所述第二导电接触结构导电地接触所述导电接触结构的下电极之一 电容器或电容器的上电极。

公开(公告)号：US08809149B2

公开(公告)日：2014-08-19

申请号：US13712234

申请日：2012-12-12

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Ki Young Lee ,  Sanggil Bae ,  Tony Joung

IPC: H01L21/336 ,  H01L29/788

CPC classification number: H01L29/66181 ,  H01L28/60 ,  H01L29/94

Abstract: A serial capacitor comprised of a bottom electrode, a top electrode that is conductively coupled the bottom electrode, a middle electrode positioned between the bottom and top electrode, a lower dielectric layer positioned between the bottom and middle electrodes, and an upper dielectric layer positioned between the middle and the electrodes. A method includes forming the bottom electrode in a first layer of insulating material, forming the lower dielectric layer and the middle electrode above the bottom electrode, wherein the middle electrode is positioned in a second layer of insulating material, forming the upper dielectric layer above the middle electrode, forming an opening that exposes a portion of the bottom electrode, and forming the top electrode above the upper dielectric layer, wherein a portion of the top electrode extends through the opening and contacts the bottom electrode.

Abstract translation: 一种串联电容器，包括底部电极，导电耦合底部电极的顶部电极，位于底部和顶部电极之间的中间电极，位于底部和中间电极之间的下部电介质层，以及位于 中间和电极。 一种方法包括在第一绝缘材料层中形成底部电极，在底部电极之上形成下部电介质层和中间电极，其中中间电极位于第二绝缘材料层中，形成上部电介质层 中间电极，形成露出所述底部电极的一部分的开口，以及在所述上部电介质层的上方形成所述顶部电极，其中所述顶部电极的一部分延伸穿过所述开口并接触所述底部电极。