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公开(公告)号:US20170338343A1
公开(公告)日:2017-11-23
申请号:US15161604
申请日:2016-05-23
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Sylvain Henri Baudot , Gunter Grasshoff , Juergen Faul , Peter Javorka
IPC: H01L29/78 , H01L29/06 , H01L27/092 , H01L21/8238 , H01L21/84 , H01L29/08 , H01L27/12
CPC classification number: H01L29/7838 , H01L21/76 , H01L21/761 , H01L21/76224 , H01L21/823814 , H01L21/823892 , H01L21/84 , H01L27/092 , H01L27/0928 , H01L27/1203 , H01L29/0649 , H01L29/0847 , H01L29/7831 , H01L29/78648 , H01L29/78654
Abstract: A semiconductor device is provided comprising a silicon-on-insulator (SOI) substrate comprising a semiconductor bulk substrate, a buried oxide layer formed on the semiconductor bulk substrate and a semiconductor layer formed on the buried oxide layer and a transistor device, wherein the transistor device comprises a gate electrode formed by a part of the semiconductor bulk substrate, a gate insulation layer formed by a part of the buried oxide layer and a channel region formed in a part of the semiconductor layer.