公开(公告)号：US20240351251A1

公开(公告)日：2024-10-24

申请号：US18640071

申请日：2024-04-19

Applicant: GOOGLE LLC

Inventor： Kang Luo ,  Thomas Mercier ,  Christophe Peroz

IPC: B29C33/38 ,  B29D11/00

CPC classification number: B29C33/3842 ,  B29D11/00663

Abstract: Techniques for fabricating a polymer reflective waveguide mold with high structural quality control (flatness, alignment, dimensions) and high precision and groove parallelism for high optical quality include using optical lithography and wet etch process. For example, a method of fabricating a reflective waveguide mold includes depositing a hard mask layer on a crystalline substrate, lithographically patterning the hard mask layer, and anisotropically removing the crystalline substrate to form a prism array waveguide mold.