PROCESS CONTROL PATTERN TO IMPROVE NANOIMPRINT DETACHING PROCESS

    公开(公告)号:US20240427236A1

    公开(公告)日:2024-12-26

    申请号:US18755207

    申请日:2024-06-26

    Applicant: GOOGLE LLC

    Abstract: A method of nanoimprinting a waveguide includes forming a working stamp having at least one waveguide feature pattern and at least one process control feature pattern. The working stamp is pressed into a waveguide workpiece thereby forming waveguide features in one or more functional waveguide zones of the waveguide workpiece and one or more sets of process control features in one or more regions outside of the one or more functional waveguide zones. The working stamp is detached from the waveguide workpiece.

    OPTICAL WAVEGUIDE INCLUDING GRATING TRANSITION AREAS

    公开(公告)号:US20250116804A1

    公开(公告)日:2025-04-10

    申请号:US18484024

    申请日:2023-10-10

    Applicant: GOOGLE LLC

    Abstract: A waveguide includes a set of grating structures forming a component on the surface of the waveguide. The set of grating structures is configured to direct light received at the component based on a parameter of one or more grating structures of the set of grating structures. Further, the waveguide includes a first transition area disposed adjacent to a first side of the component wherein the parameter is modulated across the grating structures of the first transition area. Additionally, the waveguide includes a second transition area disposed adjacent to a second, opposite side of the component wherein the parameter is also modulated across the grating structures of the second transition area.

    FABRICATION OF REFLECTIVE POLYMER WAVEGUIDE MOLD

    公开(公告)号:US20240351251A1

    公开(公告)日:2024-10-24

    申请号:US18640071

    申请日:2024-04-19

    Applicant: GOOGLE LLC

    CPC classification number: B29C33/3842 B29D11/00663

    Abstract: Techniques for fabricating a polymer reflective waveguide mold with high structural quality control (flatness, alignment, dimensions) and high precision and groove parallelism for high optical quality include using optical lithography and wet etch process. For example, a method of fabricating a reflective waveguide mold includes depositing a hard mask layer on a crystalline substrate, lithographically patterning the hard mask layer, and anisotropically removing the crystalline substrate to form a prism array waveguide mold.

    LOCALLY MODIFIED WAVEGUIDE TOTAL THICKNESS VARIATION

    公开(公告)号:US20250162337A1

    公开(公告)日:2025-05-22

    申请号:US18515631

    申请日:2023-11-21

    Applicant: GOOGLE LLC

    Abstract: Optical waveguides are formed based on measured parameters of an optical substrate. Regions for forming one or more optical elements are identified based on these measurements, and inkjet deposition is utilized to deposit a refraction-matched deposition material is applied to one or more identified regions to selectively modify the total thickness variation (TTV) in each such region. Prior to or subsequent to the deposition, optical gratings or other optical elements are formed within the adjusted regions.

    CASTING FABRICATION OF REFLECTIVE POLYMER WAVEGUIDE

    公开(公告)号:US20250076563A1

    公开(公告)日:2025-03-06

    申请号:US18810012

    申请日:2024-08-20

    Applicant: GOOGLE LLC

    Abstract: A fabrication process uses casting to form portions of a waveguide having ultra-flat surfaces. A casting resin is coated between a prism mold and a top flat mold via inkjet, slot die, spray coating, etc. The top flat mold is lowered to conform with the casting resin and the casting resin is then cured to form a bottom prism array. After curing, the bottom prism array is demolded from the prism mold and the top flat mold is used as a carrier wafer to support the bottom prism array. The bottom prism array is selectively coated with a reflective coating and a second casting process is performed by coating the bottom prism array with casting resin to form a reflective waveguide.

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