公开(公告)号：US20240393624A1

公开(公告)日：2024-11-28

申请号：US18200643

申请日：2023-05-23

Applicant: GlobalFoundries U.S. Inc.

Inventor： Brian McGowan ,  Ping-Chuan Wang ,  Michal Rakowski ,  Sujith Chandran ,  Yusheng Bian

IPC: G02F1/01

Abstract: Structures for a thermo-optic phase shifter and methods of forming a thermo-optic phase shifter. The structure comprises an interconnect structure including a dielectric layer, a waveguide core on the dielectric layer, and a heater on the dielectric layer. The heater includes a resistive heating element positioned adjacent to the waveguide core.

公开(公告)号：US20220299706A1

公开(公告)日：2022-09-22

申请号：US17202729

申请日：2021-03-16

Applicant: GLOBALFOUNDRIES U.S. Inc. ,  KHALIFA UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Yusheng Bian ,  Michal Rakowski ,  Roderick A. Augur ,  Marios Papadovasilakis ,  Sujith Chandran ,  Jaime Viegas ,  Yonas Gebregiorgis

IPC: G02B6/12 ,  G02B6/122 ,  G02B6/13 ,  G02B6/125

Abstract: Structures for a wavelength-division multiplexing filter and methods of forming a structure for a wavelength-division multiplexing filter. A waveguide core of the wavelength-division multiplexing filter includes a first bend having a first curvature and a second bend having a second curvature different than the first curvature. The structure further includes a waveguide core region having a first end surface, a second end surface, and a bend arranged between the first and second end surfaces. The bend is positioned over the first bend of the waveguide core in an overlapping relationship.

公开(公告)号：US11256030B1

公开(公告)日：2022-02-22

申请号：US17063103

申请日：2020-10-05

Applicant: GLOBALFOUNDRIES U.S. Inc. ,  KHALIFA UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Sujith Chandran ,  Yusheng Bian ,  Jaime Viegas ,  Ajey Poovannummoottil Jacob

IPC: G02B6/122 ,  G02B6/12

Abstract: Structures for an optical power splitter and methods of forming a structure for an optical power splitter. A first waveguide core provides an input port, and second and third waveguide cores provide respective output ports. A non-linear waveguide taper is coupled to the first waveguide core at a first interface and is coupled to the second and third waveguide cores at a second interface. The non-linear waveguide taper includes a first curved section having a first width dimension that increases with increasing longitudinal distance from the first interface. The non-linear waveguide taper includes a second curved section having a second width dimension that increases with increasing longitudinal distance from the second interface. The first and second curved sections join at a longitudinal location at which the first and second width dimensions are each equal to a maximum width of the non-linear waveguide taper.

公开(公告)号：US10942321B1

公开(公告)日：2021-03-09

申请号：US16559979

申请日：2019-09-04

Applicant: GLOBALFOUNDRIES U.S. Inc. ,  KHALIFA UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Sujith Chandran ,  Marcus Dahlem ,  Ajey Poovannummoottil Jacob ,  Yusheng Bian ,  Bruna Paredes ,  Jaime Viegas

IPC: G02B6/42 ,  G02B6/293

Abstract: Structures for a wavelength-division multiplexing filter and methods of fabricating a structure for a wavelength-division multiplexing filter. The structure includes a first waveguide core, a second waveguide core laterally spaced from the first waveguide core, and a ring resonator arranged in a vertical direction over the first waveguide core and the second waveguide core. The ring resonator is also arranged in a lateral direction between the first waveguide core and the second waveguide core. The first and second waveguide cores are composed of a semiconductor material, such as single-crystal silicon, and the ring resonator is composed of a dielectric material, such as silicon nitride.