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公开(公告)号:US08926920B2
公开(公告)日:2015-01-06
申请号:US12598988
申请日:2008-05-02
CPC分类号: H05H1/24 , H05H1/34 , H05H1/40 , H05H2001/3484 , H05H2240/20 , H05H2245/1225
摘要: The invention relates to a plasma source (1) comprising: a conduit (3, 4) carrying a gas flow and an ionization chamber (10) in which a plasma is generated, wherein the ionization chamber (10) is connected to the conduit (3, 4), so that the gas flow in the conduit (3, 4) carries away gas particles out of the ionization chamber (10) thereby reducing the pressure in the ionization chamber (10).
摘要翻译: 本发明涉及一种等离子体源(1),其包括:承载气流的导管(3,4)和其中产生等离子体的电离室(10),其中所述电离室(10)连接到所述导管 3,4),使得导管(3,4)中的气体流动将气体颗粒带出电离室(10),从而降低电离室(10)中的压力。
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公开(公告)号:US20100130911A1
公开(公告)日:2010-05-27
申请号:US12598988
申请日:2008-05-02
CPC分类号: H05H1/24 , H05H1/34 , H05H1/40 , H05H2001/3484 , H05H2240/20 , H05H2245/1225
摘要: The invention relates to a plasma source (1) comprising: a conduit (3, 4) carrying a gas flow and an ionization chamber (10) in which a plasma is generated, wherein the ionization chamber (10) is connected to the conduit (3, 4), so that the gas flow in the conduit (3, 4) carries away gas particles out of the ionization chamber (10) thereby reducing the pressure in the ionization chamber (10).
摘要翻译: 本发明涉及一种等离子体源(1),其包括:承载气流的导管(3,4)和其中产生等离子体的电离室(10),其中所述电离室(10)连接到所述导管 3,4),使得导管(3,4)中的气体流动将气体颗粒带出电离室(10),从而降低电离室(10)中的压力。
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